IP Library › Granted Patent US 6,556,648
Granted Patent Utility
US 6,556,648 · Confirmation No. 3964

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY

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 Code Description Pages PDF
2001-11-05 TRNA Transmittal of New Application 2 View
2001-11-05 SPEC Specification 37 View
2001-11-05 CLM Claims 4 View
2001-11-05 ABST Abstract 1 View
2001-11-05 DRW Drawings-only black and white line drawings 10 View
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Quick Facts
Patent No.
US 6,556,648
App. No.
09/985,645
Filed
2001-11-05
Granted
2003-04-29
Examiner
DUNN, DREW A
Art Unit
2882
PTA
-3 days