Granted Patent
Utility
US 6,747,729
· Confirmation No. 1633
LITHOGRAPHIC PROJECTION APPARATUS, DEVICE MANUFACTURING METHOD, DEVICE MANUFACTURED THEREBY AND GAS COMPOSITION
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Code | Description | Pages | ||
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| 2004-01-09 | RUSH |
Printer Query form, used by the publications branch | 1 | View | |
| 2004-01-09 | XRUSH |
Internal Response to Printer Query from Technology Center(TC) | 1 | View | |
| 2004-01-09 | SPEC |
Specification | 2 | View | |
| 2003-11-20 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-08-22 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2003-08-22 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2003-08-22 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-08-22 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-06-30 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-06-30 | CLM |
Claims | 1 | View | |
| 2003-06-30 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2003-06-30 | AF/D |
Affidavit-submitted prior to Mar 15, 2013 | 2 | View | |
| 2003-06-30 | XT/ |
Extension of Time | 2 | View | |
| 2003-01-30 | CTNF |
Non-Final Rejection | 9 | View | |
| 2003-01-30 | 892 |
List of references cited by examiner | 1 | View | |
| 2002-10-16 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2002-10-07 | CTRS |
Requirement for Restriction/Election | 4 | View | |
| 2002-05-10 | C.AD |
Change of Address | 1 | View | |
| 2001-10-22 | OATH |
Oath or Declaration filed | 2 | View | |
| 2001-10-22 | LET. |
Miscellaneous Incoming Letter | 6 | View | |
| 2001-08-23 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 1 | View | |
| 2001-07-06 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-07-06 | SPEC |
Specification | 29 | View | |
| 2001-07-06 | CLM |
Claims | 8 | View | |
| 2001-07-06 | ABST |
Abstract | 1 | View | |
| 2001-07-06 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-07-06 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-07-06 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2001-07-06 | FWCLM |
Index of Claims | 1 | View | |
| 2001-07-06 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2001-07-06 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2001-07-06 | FRPR |
Certified Copy of Foreign Priority Application | 26 | View | |
| 2001-07-06 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-07-06 | SPEC |
Specification | 29 | View | |
| 2001-07-06 | CLM |
Claims | 8 | View | |
| 2001-07-06 | ABST |
Abstract | 1 | View | |
| 2001-07-06 | DRW |
Drawings-only black and white line drawings | 2 | View |
Inventors
Wouter Onno Pril
Eindhoven, NETHERLANDS
Philip Dennis Henshaw
Carlisle, MA
Engelbertus Antonius Fransiscus van de Pasch
Oirschot, NETHERLANDS
Marcel Hendrikus Maria Beems
Veldhoven, NETHERLANDS
Attorneys & Agents of Record
Classification
USPC
355/30
C01B23/00
G03F7/70775
G03F7/70866
G03F7/70933
Prosecution
- Examiner
- FULLER, RODNEY EVAN
- Art Unit
- 2851
- Customer No.
- 909
- Docket No.
- P 0281484 P-0197.020 US
- Confirmation No.
- 1633
Foreign Priority
00306022.5
·
2000-07-14
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20020045113A1
- Pub. Date
- 2002-04-18
Patent Term Adjustment
0days
from
HENSHAW, PHILIP DENNIS,
BEEMS, MARCEL HENDRIKUS MARIA,
PRIL, WOUTER ONNO,
VAN DE PASCH, ENGELBERTUS ANTONIUS FRANSISCUS
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-22
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Quick Facts
- Patent No.
- US 6,747,729
- App. No.
- 09/899,566
- Filed
- 2001-07-06
- Granted
- 2004-06-08
- Pub. No.
- US20020045113A1
- Examiner
- FULLER, RODNEY EVAN
- Art Unit
- 2851
- PTA
- 0 days
External Links