IP Library › Patent Application 60297432
Patent Application Provisional
App. No. 60/297,432 · Confirmation No. 3351

Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas composition

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2001-06-13 TRNA Transmittal of New Application 2 View
2001-06-13 SPEC Specification 24 View
2001-06-13 CLM Claims 8 View
2001-06-13 ABST Abstract 1 View
2001-06-13 DRW Drawings-only black and white line drawings 2 View
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Quick Facts
App. No.
60/297,432
Filed
2001-06-13