IP Library › Granted Patent US 6,740,891
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US 6,740,891 · Confirmation No. 9594

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING MEHTOD, AND DEVICE MANUFACTURED THEREBY

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2009-01-27 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-01-27 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-12-29 LET. Miscellaneous Incoming Letter 1 View
2008-12-29 PA.. Power of Attorney 1 View
2008-12-29 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2008-12-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2004-04-16 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-06 LET. Miscellaneous Incoming Letter 1 View
2004-02-06 DRW Drawings-only black and white line drawings 15 View
2004-01-20 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-01-20 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-01-20 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-01-20 FWCLM Index of Claims 1 View
2004-01-20 SRFW Search information including classification, databases and other search related notes 1 View
2004-01-06 SRNT Examiner's search strategy and results 1 View
2003-12-11 EXIN Examiner Interview Summary Record (PTOL - 413) 3 View
2003-12-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-12-08 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-10-27 CTNF Non-Final Rejection 6 View
2003-10-27 FWCLM Index of Claims 1 View
2003-10-07 WFEE Fee Worksheet (SB06) 1 View
2003-09-05 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-09-05 CLM Claims 3 View
2003-09-05 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-09-05 DRW Drawings-only black and white line drawings 4 View
2003-06-17 CTNF Non-Final Rejection 5 View
2003-06-17 1449 List of References cited by applicant and considered by examiner 1 View
2003-04-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-04-23 SPEC Specification 2 View
2003-04-23 CLM Claims 1 View
2003-04-23 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-04-23 LET. Miscellaneous Incoming Letter 1 View
2003-04-23 DRW Drawings-only black and white line drawings 4 View
2003-04-23 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-04-23 FOR Foreign Reference 17 View
2003-01-02 CTNF Non-Final Rejection 5 View
2003-01-02 892 List of references cited by examiner 1 View
2003-01-02 1449 List of References cited by applicant and considered by examiner 1 View
2002-12-20 SRNT Examiner's search strategy and results 1 View
2002-05-14 C.AD Change of Address 1 View
2002-02-20 LET. Miscellaneous Incoming Letter 5 View
2002-02-20 DRW Drawings-only black and white line drawings 15 View
2002-02-20 OATH Oath or Declaration filed 3 View
2001-11-21 TRNA Transmittal of New Application 3 View
2001-11-21 SPEC Specification 23 View
2001-11-21 CLM Claims 3 View
2001-11-21 ABST Abstract 1 View
2001-11-21 DRW Drawings-only black and white line drawings 15 View
2001-11-21 TRNA Transmittal of New Application 3 View
2001-11-21 SPEC Specification 23 View
2001-11-21 CLM Claims 3 View
2001-11-21 ABST Abstract 1 View
2001-11-21 DRW Drawings-only black and white line drawings 15 View
2001-11-21 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-11-21 SRFW Search information including classification, databases and other search related notes 1 View
2001-11-21 FWCLM Index of Claims 1 View
2001-11-21 WFEE Fee Worksheet (SB06) 1 View
2001-11-21 FOR Foreign Reference 13 View
2001-11-21 FOR Foreign Reference 14 View
2001-11-21 FRPR Certified Copy of Foreign Priority Application 56 View
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Quick Facts
Patent No.
US 6,740,891
App. No.
09/989,700
Filed
2001-11-21
Granted
2004-05-25
Pub. No.
US20020079464A1
Art Unit
2881
PTA
-131 days