Patent Assignment
Reel/Frame 011561/0478
Assignment of Assignor's Interest
Recorded: 2001-02-21
Received: 2001-03-12
Pages: 2
Assignee
ASM LITHOGRAPHY B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NLX, NETHERLANDS
Covered Property
(1)
Method of Measuring Aberration in an Optical Imaging System
Application:
09/788,478 →