Patent Assignment
Reel/Frame 011561/0487
Assignment of Assignor's Interest
Recorded: 2001-02-20
Received: 2001-03-12
Pages: 3
Assignor
YOKOTA, KAZUKI
Executed: 2001-02-16
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME MINATO-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
Alignment Mark Set and Method of Measuring Alignment Accuracy
Application:
09/788,759 →