IP Library › Granted Patent US 6,498,401
Granted Patent Utility
US 6,498,401 · Confirmation No. 4715

ALIGNMENT MARK SET AND METHOD OF MEASURING ALIGNMENT ACCURACY

Inventor: Kazuki Yokota
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-04-20 SPEC Specification 35 View
2001-04-20 CLM Claims 5 View
2001-04-20 ABST Abstract 1 View
2001-02-20 TRNA Transmittal of New Application 5 View
2001-02-20 SPEC Specification 30 View
2001-02-20 CLM Claims 4 View
2001-02-20 ABST Abstract 1 View
2001-02-20 DRW Drawings-only black and white line drawings 11 View
2001-02-20 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,498,401
App. No.
09/788,759
Filed
2001-02-20
Granted
2002-12-24
Pub. No.
US20010021548A1
Examiner
LE, THAO P
Art Unit
2818
PTA
-83 days