Patent Assignment
Reel/Frame 011567/0033
Assignment of Assignor's Interest
Recorded: 2001-02-20
Received: 2001-03-13
Pages: 2
Assignee
MATTSON TECHNOLOGY, INC.
4425 FORTRAN DRIVE, RICHARD SEHR, SAN JOSE, CA, 95134, UNITED STATES
Covered Property
(1)
High temperature short time curing of low dielectric constant materials using rapid thermal processing techniques
Application:
09/789,062 →