Patent Assignment
Reel/Frame 011594/0556
Assignment of Assignor's Interest
Recorded: 2001-03-07
Received: 2001-03-21
Pages: 3
Assignor
VELLA, MICHAEL C.
Executed: 2001-02-23
Assignee
ADVANCED TECHNOLOGY MATERIALS, INC.
7 COMMERCE DRIVE, DANBURY, CT, 06810, UNITED STATES
Covered Property
(1)
Thermal Regulation of an Ion Implantation System
Application:
09/800,643 →