IP Library › Granted Patent US 6,670,623
Granted Patent Utility
US 6,670,623 · Confirmation No. 3339

THERMAL REGULATION OF AN ION IMPLANTATION SYSTEM

Inventor: Michael C. Vella
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2003-11-04 LET. Miscellaneous Incoming Letter 3 View
2003-11-04 DRW Drawings-only black and white line drawings 9 View
2003-09-03 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-09-03 LET. Miscellaneous Incoming Letter 1 View
2003-07-24 CTNF Non-Final Rejection 7 View
2003-07-24 FWCLM Index of Claims 1 View
2003-07-24 SRFW Search information including classification, databases and other search related notes 1 View
2001-03-07 TRNA Transmittal of New Application 2 View
2001-03-07 SPEC Specification 21 View
2001-03-07 CLM Claims 4 View
2001-03-07 ABST Abstract 1 View
2001-03-07 DRW Drawings-only black and white line drawings 9 View
2001-03-07 TRNA Transmittal of New Application 2 View
2001-03-07 SPEC Specification 21 View
2001-03-07 CLM Claims 4 View
2001-03-07 ABST Abstract 1 View
2001-03-07 DRW Drawings-only black and white line drawings 9 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,670,623
App. No.
09/800,643
Filed
2001-03-07
Granted
2003-12-30
Pub. No.
US20020130278A1
Art Unit
2881
PTA
0 days