Patent Assignment
Reel/Frame 050965/0035
Assignment of Patent Security Interest Recorded at Reel/Frame 048811/0679
Recorded: 2019-11-05
Pages: 233
Assignor
GOLDMAN SACHS BANK USA
Executed: 2019-10-31
Assignee
MORGAN STANLEY SENIOR FUNDING, INC.
1300 THAMES STREET, 4TH FLOOR, BALTIMORE, MARYLAND, 21231
Covered Properties
(882)
Compositions and Methods for the Selective Removal of Silicon Nitride
PCT:
PCT/US2007/088643 ↗
Liquid Cleaner for the Removal of Post-Etch Residues
PCT:
PCT/US2007/088644 ↗
Microporous Polyamide-Imide Membranes
PCT:
PCT/US2014/065699 ↗
System and Method for Operation of a Pump with Feed and Dispense Sensors, Filtration and Dispense Confirmation, and Reduced Pressure Priming of Filter
PCT:
PCT/US2015/032817 ↗
Molded Fluoropolymer Breakseal with Compliant Material
PCT:
PCT/US2015/041402 ↗
Ion Implantation Processes and Apparatus
PCT:
PCT/US2015/057444 ↗
Film with Improved Flex Crack Resistance
PCT:
PCT/US2015/063185 ↗
Bag Assembly Sterilizable by Gamma Irradiation
PCT:
PCT/US2017/015397 ↗
Wafer Contact Surface Protrusion Profile with Improved Particle Performance
PCT:
PCT/US2017/016145 ↗
Cushion Retainer for Substrate Container
PCT:
PCT/US2017/016534 ↗
Substrate Shipper
PCT:
PCT/US2017/017228 ↗
Flexible Substrate Shipper
PCT:
PCT/US2017/017234 ↗
Microenvironment for Flexible Substrates
PCT:
PCT/US2017/017242 ↗
Tungsten Post-Cmp Cleaning Compositions
PCT:
PCT/US2017/021624 ↗
Hydrophobic Polyethylene Membrane for Use in Venting, Degassing, and Membrane Distillation Processes
PCT:
PCT/US2017/022913 ↗
Hydrogenated Isotopically Enriched Boront Trifluoride Dopant Source Gas Composition
PCT:
PCT/US2017/024312 ↗
Nozzle Filter
PCT:
PCT/US2017/025030 ↗
Diaphragm Valve with Full Closure
PCT:
PCT/US2017/025345 ↗
Gas Filter
PCT:
PCT/US2017/025709 ↗
Tamper-Resistant Chemical Reagent Package
PCT:
PCT/US2017/026816 ↗
Airborne Molecular Contamination Filter Cartridge System with Combustible Filter Cartridge and Reusable Frame
PCT:
PCT/US2017/030009 ↗
Fluorinated Compositions for Ion Source Performance Improvement in Nitrogen Ion Implantation
PCT:
PCT/US2017/031894 ↗
Latching Mechanism for a Substrate Container
PCT:
PCT/US2017/034609 ↗
Coated Porous Polymeric Membranes
PCT:
PCT/US2017/034649 ↗
Conductive Filter Device
PCT:
PCT/US2017/035210 ↗
Fluid Circuit with Integrated Electrostatic Discharge Mitigation
PCT:
PCT/US2017/035213 ↗
Vapor Phase Etching of Hafnia and Zirconia
PCT:
PCT/US2017/035613 ↗
Highly Retentive Polyamide Hollow Fiber Membranes Produced via Controlled Shrinkage
PCT:
PCT/US2017/039203 ↗
Cvd Mo Deposition by Using MOOC14
PCT:
PCT/US2017/041883 ↗
Spacer Film with Integrated Lamination Strip
PCT:
PCT/US2017/042327 ↗
Alloys of Co to Reduce Stress
PCT:
PCT/US2017/046270 ↗
Reticle Pod Having Side Containment of Reticle
PCT:
PCT/US2017/048396 ↗
Cmp Pad Conditioning Assembly
PCT:
PCT/US2017/051324 ↗
Haloalkynyl Dicobalt Hexacarbonyl Precursors for Chemical Vapor Deposition of Cobalt
PCT:
PCT/US2017/062487 ↗
Cleaning Compositions for Removing Post Etch Residue
PCT:
PCT/US2017/062761 ↗
76SUBSTRATE Container with Latching Mechansim Having Two Cam Profiles
PCT:
PCT/US2017/066144 ↗
Articles Coated with a Fluoro-Annealed Film
PCT:
PCT/US2018/013710 ↗
Post-Etch Residue Removal for Advanced Node Beol Processing
PCT:
PCT/US2018/013970 ↗
Compositions and Methods for Removing Ceria Particles from a Surface
PCT:
PCT/US2018/014049 ↗
Post Chemical Mechanical Polishing Formulations and Method of Use
PCT:
PCT/US2018/027179 ↗
Formulations to Selectively Etch Silicon-Germanium Relative to Silicon
PCT:
PCT/US2018/027181 ↗
Low Temperature Molybdenum Film Depositon Utilizing Boron Nucleation Layers
PCT:
PCT/US2018/029366 ↗
Fluidized Granular Absorbent Bed Filter
PCT:
PCT/US2018/032730 ↗
Substrate Container with Particle Mitigation Feature
PCT:
PCT/US2018/036216 ↗
Thermochromic Indicator for Reagent Gas Vessel
PCT:
PCT/US2018/036406 ↗
Airborne Molecular Contamination Acid Removal Filter Using Functionalized Materials
PCT:
PCT/US2018/038516 ↗
Silicon Carbide Filter Membrane and Methods of Use
PCT:
PCT/US2018/040698 ↗
Container for Holding and Transporting Reticles Having a Transparent Window Assembly
PCT:
PCT/US2018/042275 ↗
Compositions and Methods for Etching Silicon Nitride-Containing Substrates
PCT:
PCT/US2018/049701 ↗
Coatings for Glass-Shaping Molds and Molds Comprising the Same
PCT:
PCT/US2018/052238 ↗
Diffusion Barriers Between Noble Metal Electrodes and Metallization Layers, and Integrated Circuit and Semiconductor Devices Comprising Same
Patent:
6,320,213 →
Application:
08/994,089 →
Tantalum Amide Precorsors for Deposition of Tantalum Nitride on a Subtrate
Patent:
6,015,917 →
Application:
09/012,679 →
Automatic Dilution System for High-Resolution Particle Size Analysis
Patent:
6,211,956 →
Application:
09/172,675 →
Safety System for Gas Purifier
Patent:
6,168,645 →
Application:
09/174,055 →
Surface Modified Porous Membrane and Process
Patent:
6,273,271 →
Application:
09/174,619 →
Wafer Carrier Box Hinge
Patent:
6,000,550 →
Application:
09/185,992 →
Advanced Wafer Shipper
Patent:
5,992,638 →
Application:
09/189,672 →
Textured Bi-Based Oxide Ceramic Films
Patent:
6,713,797 →
Application:
09/197,984 →
Low Temperature Cvd Processes for Preparing Ferroelectric Films Using Bi Alcoxides
Patent:
6,500,489 →
Application:
09/208,541 →
Method of Controlled Chemical Vapor Deposition of a Metal Oxide Ceramic Layer
Patent:
6,787,186 →
Application:
09/210,912 →
Selective Silicon Oxide Etchant Formulation Including Fluoride Salt, Chelating Agent, and Glycol Solvent
Patent:
6,280,651 →
Application:
09/215,655 →
Liquid Delivery Mocvd Process for Deposition of High Frequency Dielectric Materials
Patent:
6,277,436 →
Application:
09/216,673 →
Sputtering Process for the Conformal Deposition of a Metallization or Insulating Layer
Patent:
6,100,200 →
Application:
09/218,563 →
Indium Source Reagent Compositions, and Use Thereof for Deposition of Indium-Containing Films on Substrates and Ion Implanttion of Indium-Doped Shallow Junction Microelectronics Structures
Patent:
6,204,402 →
Application:
09/218,992 →
Clipless Tray
Patent:
6,079,565 →
Application:
09/221,745 →
Door Guide for a Wafer Container
Patent:
6,206,196 →
Application:
09/226,372 →
Scalable Lead Zirconium Titanate(Pzt) Thin Film Material and Deposition Method, and Ferroelectric Memory Device Structures Comprising Such Thin Film Material
Patent:
6,316,797 →
Application:
09/251,890 →
Smif Container Including a Reticle Support Structure
Patent:
6,216,873 →
Application:
09/272,132 →
Liquid Chemical Dispensing System with Pressurization
Patent:
6,206,240 →
Application:
09/274,723 →
Fluid Storage and Dispensing System
Patent:
6,089,027 →
Application:
09/300,994 →
Method of and System for Sub-Atmospheric Gas Delivery with Backflow Control
Patent:
6,155,289 →
Application:
09/307,650 →
Process for the Removal of Water from Evacuated Chambers or from Gases
Patent:
6,304,367 →
Application:
09/315,600 →
Composite Substrate Carrier
Patent:
6,428,729 →
Application:
09/317,989 →
Delivery System and Manifold
Patent:
6,047,744 →
Application:
09/327,842 →
Integrated Heated Getter Purifier System
Patent:
6,299,670 →
Application:
09/330,316 →
Cushioned Wafer Container
Patent:
6,267,245 →
Application:
09/349,314 →
Auto-Switching Gas Delivery System Utilizing Sub-Atmospheric Pressure Gas Supply Vessels
Patent:
6,302,139 →
Application:
09/356,020 →
Rejuvenable Ambient Temperature Purifier
Patent:
6,521,192 →
Application:
09/369,644 →
Planarization Composition for Removing Metal Films
Patent:
6,267,909 →
Application:
09/416,353 →
Post Chemical-Mechanical Planarization (Cmp) Cleaning Composition
Patent:
6,194,366 →
Application:
09/440,917 →
Integrated Circuit Devices and Methods Employing Amorphous Silicon Carbide Resistor Materials
Patent:
6,268,229 →
Application:
09/461,693 →
Bulk Chemical Delivery System
Patent:
6,435,229 →
Application:
09/462,690 →
Liquid Delivery System Comprising Upstream Pressure Control Means
Patent:
6,245,151 →
Application:
09/463,124 →
Low Temperature Process for High Density Thin Film Integrated Capacitors and Amorphously Frustrated Ferroelectric Materials Therefor
Patent:
6,348,705 →
Application:
09/469,700 →
Chemical Delivery and Containment System Employing Mobile Shipping Crate
Patent:
6,192,919 →
Application:
09/475,387 →
Multi-Component Mixtures for Manufacture of Semi-Conductors
Patent:
6,228,159 →
Application:
09/476,080 →
Self-regenerative process for contaminant removal from liquid and supercritical CO2 fluid streams
Patent:
6,361,696 →
Application:
09/487,637 →
Wafer Container with Minimal Contact
Patent:
6,776,289 →
Application:
09/523,745 →
Ammonium Borate Containing Compositions for Stripping Residues from Semiconductor Substrates
Patent:
6,875,733 →
Application:
09/529,496 →
Fluid storage and dispensing system featuring interiorly disposed and exteriorly adjustable regulator for high flow dispensing of gas
Patent:
6,257,000 →
Application:
09/532,268 →
Silicon Reagents and Low Temperature Cvd Method of Forming Silicon-Containing Gate Dielectric Materials Using Same
Patent:
6,736,993 →
Application:
09/551,018 →
Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein
Patent:
6,343,476 →
Application:
09/552,347 →
Post Chemical-Mechanical Planarization (Cmp) Cleaning Composition
Patent:
6,492,308 →
Application:
09/587,883 →
Stable hydride source compositions for manufacture of semiconductor devices and structures
Patent:
6,319,565 →
Application:
09/603,597 →
Gas Purification System with an Integrated Hydrogen Sorption and Filter Assembly
Patent:
6,733,571 →
Application:
09/614,649 →
Sensor Usable in Ultra Pure and Highly Corrosive Environments
Patent:
6,612,175 →
Application:
09/620,007 →
Fluid Distribution System and Process, and Semiconductor Fabrication Facility Utilizing Same
Patent:
6,453,924 →
Application:
09/624,478 →
Fluid Storage and Dispensing System
Patent:
6,500,238 →
Application:
09/635,880 →
Method for sub-atmospheric gas delivery with backflow control
Patent:
6,253,783 →
Application:
09/695,361 →
Self-Regenerative Process for Contaminant Removal from Ammonia
Patent:
6,524,544 →
Application:
09/699,100 →
Semiconductor Manufacturing System with Getter Safety Device
Patent:
6,398,846 →
Application:
09/708,985 →
Fabrication of electron emitters coated with material such as carbon
Post Chemical-Mechanical Planarization (Cmp) Cleaning Composition
Fluid Storage and Dispensing System Featuring Ex Situ Strain Gauge Pressure Monitoring Assembly
Molecular contamination control system
Disposable Fluid Separation Device and Manifold Assembly Design with Easy Change-Out Feature
Double Chamber Ion Implantation System
Thermal Regulation of an Ion Implantation System
Boric Acid Containing Compositions for Stripping Residues from Semiconductor Substrates
Door Guide for a Wafer Container
Method for purification of lens gases used in photolithography
Patent:
6,391,090 →
Application:
09/824,382 →
Cleaning Compositions
Filters Employing Both Acidic Polymers and Physical-Adsorption Media
Shock Resistant Variable Load Tolerant Wafer Shipper
Process for Making Carbon Foam Induced by Process Depressurization
Fluid Distribution System and Process, and Semiconductor Fabrication Facility Utilizing Same
Liquid Handling System with Electronic Information Storage
Gas Purification System and Method
Patent:
6,514,313 →
Application:
09/887,761 →
Hollow Fiber Membrane Contactor
Patent:
6,582,496 →
Application:
09/889,960 →
Skinned Hollow Fiber Membrane and Method of Manufacture
Patent:
6,921,482 →
Application:
09/889,961 →
Microporous Hollow Fiber Membranes from Perfluorinated Thermoplastic Polymers
Patent:
6,802,972 →
Application:
09/890,109 →
Method for Manufacturing Hollow Fiber Membranes
Patent:
6,663,745 →
Application:
09/890,111 →
Perfluorinated Thermoplastic Filter Cartridge
Patent:
7,347,937 →
Application:
09/890,290 →
Filter Housing
Smif Container Including an Electrostatic Dissipative Reticle Support Structure
Source Reagent Compositions for Cvd Formation of High Dielectric Constant and Ferroelectric Metal Oxide Thin Films and Method of Using Same
Filtration Cartridge and Process for Filtering a Slurry
Patent:
7,247,245 →
Application:
09/913,977 →
Gas Cabinet Assembly Comprising Back Migration Scrubber Unit
Patent:
6,471,750 →
Application:
09/924,866 →
Process for Making Porous Graphite and Articles Produced Therefrom
Scalable Lead Zirconium Titanate (Pzt) Thin Film Material and Deposition Method, and Ferroelectric Memory Device Structures Comprising Such Thin Film Material
Apparatus for Removal of Water from Evacuated Chambers or from Gasses Using Boron Oxide
Abrasive Free Formulations for Chemical Mechanical Polishing of Copper and Associated Materials and Method of Using Same
Preparation of High Performance Silica Slurry Using a Centrifuge
Post Plasma Ashing Wafer Cleaning Formulation
Source Reagent Compositions for Cvd Formation of Gate Dielectric Thin Films Using Amide Precursors and Method of Using Same
Blow Molded Drum
Formulations Including a 1,3-Dicarbonyl Compound Chelating Agent and Copper Corrosion Inhibiting Agents for Stripping Residues from Semiconductor Substrates Containing Copper Structures
Transport Module
Method for Removal of Impurities in Cyclic Siloxanes Useful as Precursors for Low Dielectric Constant Thin Films
Fluid Storage and Dispensing System Featuring Externally Adjustable Regulator Assembly for High Flow Dispensing
Fluid Storage and Delivery System Utilizing Low Heels Carbon Sorbent Medium
System for Preventing Improper Insertion of Foup Door into Foup
Channelized Sorbent Media, and Methods of Making Same
Transportable Container Including an Internal Environment Monitor
Adsorbents for Low Vapor Pressure Fluid Storage and Delivery
Method for Purification of Lens Gases Used in Photolithography
Transport Module with Latching Door
Patent:
6,945,405 →
Application:
10/088,237 →
Liquid Handling System with Electronic Information Storage
Apparatus and Method for Minimizing the Generation of Particles in Ultrapure Liquids
Returnable and Reusable, Bag-in-Drum Fluid Storage and Dispensing Container System
Infrared Thermopile Detector System for Semiconductor Process Monitoring and Control
Patent:
6,617,175 →
Application:
10/140,848 →
Self-Regenerative Process for Contaminant Removal from Ammonia
Fluoropolymer Flowmeter
Pressure-Based Gas Delivery System and Method for Reducing Risks Associated with Storage and Delivery of High Pressure Gases
Component to Component Sealing Method
Method for Rapid Activation or Preconditioning of Porous Gas Purification Substrates
Patent:
6,638,341 →
Application:
10/173,335 →
Boric Acid Containing Compositions for Stripping Residues from Semiconductor Substrates
Reticle Carrier
Thin Wafer Carrier
High Volume Dispense Head with Seal Verification and Low Foam Return Line
Sensors and Methods for High-Sensitivity Optical Particle Counting and Sizing
Composition and Process for Wet Stripping Removal of Sacrificial Anti-Reflective Material
Vaporizer Delivery Ampoule
Filters Employing Both Acidic Polymers and Physical-Adsorption Media
Process for Fabricating Composite Substrate Carrier
Composite Substrate Carrier
BR2SBCH3 a Solid Source Ion Implant and Cvd Precursor
Matrix Tray with Tacky Surfaces
Apparatus and Method for Dispensing High-Viscosity Liquid
System and Method for Determining and Controlling Contamination
Apparatus and Method for Inhibiting Decomposition of Germane
Patent:
6,716,271 →
Application:
10/282,377 →
Ion Implantation and Wet Bench Systems Utilizing Exhaust Gas Recirculation
Wafer Enclosure Sealing Arrangement for Wafer Containers
Composition and Method for Low Temperature Deposition of Silicon-Containing Films Such as Films Including Silicon Nitride, Silicon Dioxide and/or Silicon-Oxynitride
Wafer Carrier with Wafer Retaining System
Porogen Material
Wafer Carrier Door and Latching Mechanism Withhourglass Shaped Key Slot
Permeable Gas Assembly for Gas Delivery
Rectangular Parallelepiped Fluid Storage and Dispensing Vessel
Gas Storage and Dispensing System with Monolithic Carbon Adsorbent
Passivative Chemical Mechanical Polishing Composition for Copper Film Planarization
Wafer Container Cushion System
Wafer Carrier Door and Latching Mechanism with C-Shaped Cam Follower
Wafer Carrier Door and Spring Biased Latching Mechanism
Porous or Non-Porous Substrate Coated with an Immobilized Polymeric Composition Having Sulfonyl Groups and Hydrophilic Functional Groups and Process
Wafer Carrier Door with Form Fitting Mechanism Cover
Chemical Vapor Deposition Precursors for Deposition of Tantalum-Based Materials
Hollow Fiber Membrane Contactor
Photoresist Removal
Fully Drainable Weir Valve
Cleaning Compositions
Microporous Hollow Fiber Membranes from Perfluorinated Thermoplastic Polymers
Sensor Usable in Ultra Pure and Highly Corrosive Environments
Connector Apparatus and System Including Connector Apparatus
Fluid Handling Component with Ultraphobic Surfaces
Ultraphobic Surface for High Pressure Liquids
Thin Wafer Insert
Exchange Apparatus
High-Strength, Chemically Resistant Laminar Film with Limited Extractables
Front Opening Wafer Carrier with Path to Ground Effectuated by Door
Filter Cartridge Construction
Filter Cartridge Construction
Fluid Flow Measuring and Proportional Fluid Flow Control Device
Method for Purifying Carbon Dioxide
Method for analysis of contaminants in a process fluid stream
Filter Device
Hydride Gas Purification for the Semiconductor Industry
Methods and Materials for Making a Monolithic Porous Pad Cast Onto a Rotatable Base
Resist, Barc and Gap Fill Material Stripping Chemical and Method
Canister Guard
Gas Purification System with an Integrated Hydrogen Sorption and Filter Assembly
Lithographic Projection Apparatus, Gas Purging Method and Device Manufacturing Method and Purge Gas Supply System
Infrared Thermopile Detector System for Semiconductor Process Monitoring and Control
Delivery Systems for Efficient Vaporization of Precursor Source Material
Photometrically Modulated Delivery of Reagents
Precursor Compositions and Processes for Mocvd of Barrier Materials in Semiconductor Manufacturing
Disposable Fluid Separation Device and Manifold Assembly Design with Easy Change-Out Feature
Filters Employing Porous Strongly Acidic Polymers
Stabilized Cyclosiloxanes for Use as Cvd Precursors for Low-Dielectric Constant Thin Films
Microfluidic Device with Ultraphobic Surfaces
Reactive Gas Filter
Auto-Switching System for Switch-Over of Gas Storage and Dispensing Vessels in a Multi-Vessel Array
System and Method for Monitoring Contamination
Monitoring System Comprising Infrared Thermopile Detector
Membrane and Reticle-Pellicle Apparatus with Purged Pellicle-to-Reticle Gap Using Same
Monosilane or Disilane Derivatives and Method for Low Temperature Deposition of Silicon-Containing Films Using the Same
Method for the Removal of Airborne Molecular Contaminants Using Oxygen Gas Mixtures
Tantalum Amide Complexes for Depositing Tantalum-Containing Films, and Method of Making Same
Method for Purification of Lens Gases Used in Photolithography and Metrology
Method for Rapid Activation or Preconditioning of Porous Gas Purification Substrates
Composition and Method for Low Temperature Deposition of Silicon-Containing Films
Fluid Storage and Dispensing Vessels Having Colorimetrically Veriflable Leak-Tightness, and Method of Making Same
Skinned Hollow Fiber Membrane and Method of Manufacture
Chemical Mechanical Planarization Pad
Double Diaphragm Precision Throttling Valve
Patent:
42,401 →
Application:
10/722,168 →
Manufacturing System with Intrinsically Safe Electric Information Storage
Infrared Thermopile Detector System for Semiconductor Process Monitoring and Control
Infrared Thermopile Detector System for Semiconductor Process Monitoring and Control
Porous Sintered Composite Materials
Secure Reader System
Returnable and Reusable, Bag-in-Drum Fluid Storage and Dispensing Container System
Gas Storage and Dispensing System with Monolithic Carbon Adsorbent
Composite Structure for High Efficiency Hydrogen Separation and Its Associated Methods of Manufacture and Use
System and Method for Flow Monitoring and Control
System for Controlling Fluid Flow
Composition and Process for Post-Etch Removal of Photoresist and/or Sacrificial Anti-Reflective Material Deposited on a Substrate
Chemical Vapor Deposition of High Conductivity, Adherent Thin Films of Ruthenium
Transport Module
Filters Employing Both Acidic Polymers and Physical-Adsorption Media
Method and Apparatus to Help Promote Contact of Gas with Vaporized Material
Composition and Method for Low Temperature Chemical Vapor Deposition of Silicon-Containing Films Including Silicon Carbonitride and Silicon Oxycarbonitride Films
Fluoropolymer Flowmeter
Extended Stroke Valve and Diaphragm
Air Handling and Chemical Filtration System and Method
Lithographic Projection Apparatus, Gas Purging Method, Device Manufacturing Method, and Purge Gas Supply System
System and Method for Optimizing and Simulating Thermal Management Systems and Predictive Flow Control
Filtration Module Including Unitary Filter Cartridge-Bowl Construction
Shipper with Tooth Design for Improved Loading
Substrate Carrier
Fluid Storage and Dispensing System Including Dynamic Fluid Monitoring of Fluid Storage and Dispensing Vessel
Front Opening Substrate Container with Bottom Plate
Wafer Container and Door with Vibration Dampening Latching Mechanism
Wafer Carrier with Apertured Door for Cleaning
Liquid Dispensing System
Wafer Container and Door with Cam Latching Mechanism
Wafer Container with Door Actuated Wafer Restraint
Reticle Carrier Including Reticle Positioning and Location Means
Methods and Apparatus for Electrophoretic Mobility Determination Using Phase Light Scattering Analysis
Systems and Methods for Detecting Contaminants
System and Method for Reducing Thermal Shock in a Hydrogen Diffusion Cell
Patent:
7,407,529 →
Application:
11/027,874 →
Metal Ion Concentration Analysis for Liquids
Connector Apparatus and System Including Connector Apparatus
Magnetic Flow Meter with Unibody Construction and Conductive Polymer Electrodes
System and Method for Flow Monitoring and Control
Method and System for Purging a Dispensed Fluid Within a Fluid Dispensing System Including a Filter-Free Connector Apparatus
Pressure-Based Gas Delivery System and Method for Reducing Risks Associated with Storage and Delivery of High Pressure Gases
Porogen Material
Liquid Handling System with Electronic Information Storage
Filter Device Including Pleated Filter Incorporated in a Housing
Aqueous Cleaner with Low Metal Etch Rate Comprising Alkanolamine and Tetraalkylammonium Hydroxide
System and Method for Efficiently Separating Hydrogen Gas from a Mixed Gas Source
Patent:
7,396,385 →
Application:
11/097,535 →
Gas Storage and Dispensing System with Monolithic Carbon Adsorbent
Wafer Container with Sealable Door
Substrate Container with Fluid-Sealing Flow Passageway
Wafer Carrier Door and Spring Biased Latching Mechanism
Transportable Container Including an Internal Environment Monitor
Delivery Systems for Efficient Vaporization of Precursor Source Material
Photometrically Modulated Delivery of Reagents
Air Purification System with Regenerative Purification Units
Permeable Gas Assembly for Gas Delivery
Gas Storage and Dispensing System with Monolithic Carbon Adsorbent
Tantalum Amide Complexes for Depositing Tantalum-Containing Films, and Method of Making Same
Returnable and Reusable, Bag-in-Drum Fluid Storage and Dispensing Container System
Rectangular Parallelepiped Fluid Storage and Dispensing Vessel
System and Method for Flow Monitoring and Control
Apparatus for a Liquid Chemical Concentration Analysis System
Auto-Switching System for Switch-Over of Gas Storage and Dispensing Vessels in a Multi-Vessel Array
Wafer Container with Secondary Wafer Restraint System
System and Method for Control of Fluid Pressure
Gas Storage and Dispensing System for Variable Conductance Dispensing of Gas at Constant Flow Rate
Scalable Lead Zirconium Titanate (Pzt) Thin Film Material and Deposition Method, and Ferroelectric Memory Device Structures Comprising Such Thin Film Material
Chemical Vapor Deposition Precursors for Deposition of Tantalum-Based Materials
Kinematic Coupling with Textured Contact Surfaces
System and Method for Processing Fuel for Use by a Fuel Cell Using a Micro-Channel Catalytic Hydrogen Separator
Patent:
7,704,485 →
Application:
11/341,541 →
Low-Profile Surface Mount Filter
Pressure-Based Gas Delivery System and Method for Reducing Risks Associated with Storage and Delivery of High Pressure Gases
System and Method for Monitoring Operation of a Pump
Reticle Pod with Isolation System
Environmental Control in a Reticle Smif Pod
Drum Cap Venting Device
High-volume fluid dispense system
Identification Tag for Fluid Containment Drum
Disposable Fluid Separation Device and Manifold Assembly Design with Easy Change-Out Feature
Gas Delivery System with Integrated Valve Manifold Functionality for Sub-Atmospheric and Super-Atmospheric Pressure Applications
Photometrically Modulated Delivery of Reagents
Polytetrafluoroethylene Treatment
Apparatus and Methods for Variable Furnace Control
In-Situ Gas Blending and Dilution System for Delivery of Dilute Gas at a Predetermined Concentration
Filter Cartridge Construction
Chemically Inert Flow Controller with Non-Contaminating Body
Method and Apparatus for a Liquid Chemical Concentration Analysis System
Method for a Liquid Chemical Concentration Analysis System
System for Controlling Fluid Flow Based on a Valve Break Point
Porous Sintered Composite Materials
Wafer Container with Door Actuated Wafer Restraint
Composite Structure for High Efficiency Hydrogen Separation Containing Preformed Nano-Particles in a Bonded Layer
Patent:
7,749,305 →
Application:
11/515,976 →
Sensors and Methods for High-Sensitivity Optical Particle Counting and Sizing
Semiconductor Manufacturing Facility Utilizing Exhaust Recirculation
System and Method for Separating Hydrogen Gas from a Mixed Gas Source Using Composite Structure Tubes
Patent:
8,002,875 →
Application:
11/522,004 →
Monitoring System Comprising Infrared Thermopile Detector
Fluid Storage and Dispensing System Including Dynamic Fluid Monitoring of Fluid Storage and Dispensing Vessel
I/O Systems, Methods and Devices for Interfacing a Pump Controller
System and Method for a Pump with Reduced Form Factor
System and Method for Valve Sequencing in a Pump
System and Method for Position Control of a Mechanical Piston in a Pump
Error Volume System and Method for a Pump
System and Method for Pressure Compensation in a Pump
O-Ring-Less Low Profile Fittings and Fitting Assemblies
Tantalum Amide Complexes for Depositing Tantalum-Containing Films, and Method of Making Same
System and Method for Removing Contaminants
Manufacturing System with Intrinsically Safe Electric Information Storage
Transportable Container Including an Internal Environment Monitor
Wafer Container and Door with Vibration Dampening Latching Mechanism
System and Method for a Variable Home Position Dispense System
Novel Fluorine-Free Precursors and Methods for the Deposition of Conformal Conductive Films for Nanointerconnect Seed and Fill
Chemical Vapor Deposition of High Conductivity, Adherent Thin Films of Ruthenium
Fluid Storage and Dispensing Vessels Having Colorimetrically Verifiable Leak-Tightness, and Method of Making Same
Front Opening Substrate Container with Bottom Plate
Thin Wafer Insert
Multilayer Porous Membrane And Process
System and Apparatus for Adjustable Stacker Bar Assembly Having Vertical Accommodation Features
Magnetic Flow Meter with Unibody Construction and Conductive Polymer Electrodes
Composition Useful for Removal of Post-Etch Photoresist and Bottom Anti-Reflection Coatings
Method and Apparatus to Help Promote Contact of Gas with Vaporized Material
Method for a Liquid Chemical Concentration Analysis System
Fluid Flow Measuring and Proportional Fluid Flow Control Device
Liner-Based Liquid Storage and Dispensing Systems with Empty Detection Capability
Fluid Storage and Dispensing Systems, and Fluid Supply Processes Comprising Same
Metal and Dielectric Compatible Sacrificial Anti-Reflective Coating Cleaning and Removal Composition
Method and apparatus for treating fluids to reduce microbubbles
Filtration Module
Scalable Lead Zirconium Titanate (Pzt) Thin Film Material and Deposition Method, and Ferroelectric Memory Device Structures Comprising Such Thin Film Material
Method and Apparatus to Help Promote Contact of Gas with Vaporized Material
System, Method, and Apparatus for Conversion Bonding of Precursor Subcomponents into a Unitary Monolith
System for Controlling Valve Fluid Flow Based on Rate of Change of Close Rate Acceleration
Chemical Mechanical Planarization Pad
System and Method for Operation of a Pump
Exchange Apparatus
Porous Sintered Composite Materials
Tantalum Amido-Complexes with Chelate Ligands Useful for Cvd and Ald of Tan and TA205 Thin Films
Monosilane or Disilane Derivatives and Method for Low Temperature Deposition of Silicon-Containing Films Using the Same
Substrate Container with Fluid-Sealing Flow Passageway
Purge System for a Substrate Container
Hollow Fiber Membrane Contact Apparatus and Process
Hydrogen Gas Separator System Having a Micro-Channel Construction for Efficiently Separating Hydrogen Gas from a Mixed Gas Source
Copper Precursors for Cvd/Ald/Digital Cvd of Copper Metal Films
Boron Ion Implantation Using Alternative Fluorinated Boron Precursors, and Formation of Large Boron Hydrides for Implanation
Reticle Pod
Oxidizing Aqueous Cleaner for the Removal of Post-Etch Residues
Composition and Method for Recycling Semiconductor Wafers Having Low-K Dielectric Materials Thereon
Molded Rotatable Base for a Porous Pad
Network Interface Device
Photometrically Modulated Delivery of Reagents
Welded Diaphragm Valve
Nanoporous Articles and Methods of Making Same
Gas Delivery System with Integrated Valve Manifold Functionality for Sub-Atmospheric and Super-Atmospheric Pressure Applications
A Pressurized System for Dispensing Fluids
Filtration Module Including Unitary Filter Cartridge-Bowl Construction
Method and System for High Viscosity Pump
Method of Passivating Chemical Mechanical Polishing Compositions for Copper Film Planarization Processes
Composition and Method for Low Temperature Deposition of Silicon-Containing Films
Fluid Flow Measuring and Proportional Fluid Flow Control Device
Amorphous Ge/Te Deposition Process
Shock Absorbing Substrate Container
Fluid Handling Device with Isolating Chamber
Precursor Compositions for Atomic Layer Deposition and Chemical Vapor Deposition of Titanate, Lanthanate, and Tantalate Dielectric Films
Atmospheric Pressure Microwave Plasma Treated Porous Membranes
Cleaning of Semiconductor Processing Systems
Low Temperature Deposition of Phase Change Memory Materials
Barrier Fluoropolymer Film-Based Liners and Packaging Comprising Same
Reusable Resilient Cushion for Wafer Container
Liquid Dispensing Systems Encompassing Gas Removal
System for Purging Reticle Storage
Antimony and Germanium Complexes Useful for Cvd/Ald of Metal Thin Films
Systems and Methods for Managing Material Storage Vessels Having Information Storage Elements
Filtering System for a Semiconductor Processing Tool
Apparatus and Method for Reducing Particle Contamination in a Vacuum Chamber
Method and Apparatus to Help Promote Contact of Gas with Vaporized Material
Semiconductor Manufacturing Facility Utilizing Exhaust Recirculation
Valve Manifold Assembly
Gas Storage and Dispensing System with Monolithic Carbon Adsorbent
Rectangular Parallelepiped Fluid Storage and Dispensing Vessel
Antioxidants for Post-Cmp Cleaning Formulations
Low Ph Mixtures for the Removal of High Density Implanted Resist
Filter Apparatus Capable of Releasing Air
Solid Precursor-Based Delivery of Fluid Utilizing Controlled Solids Morphology
Electrostatic Chuck
System and Method for Welding Small Diameter Tubes into a High-Density Matrix
Patent:
8,230,594 →
Application:
12/463,381 →
Composition and Method for Low Temperature Deposition of Silicon-Containing Films Such as Films Including Silicon, Silicon Nitride, Silicon Dioxide and/or Silicon-Oxynitride
Sensing System and Method
Low-Profile Surface Mount Filter
Diamond Like Carbon Coating of Substrate Housings
Compositions and Methods for the Selective Removal of Silicon Nitride
Precursor Compositions for Ald/Cvd of Group Ii Ruthenate Thin Films
Composition and Method for Low Temperature Chemical Vapor Deposition of Silicon-Containing Films Including Silicon Carbonitride and Silicon Oxycarbonitride Films
Pressure-Based Gas Delivery System and Method for Reducing Risks Associated with Storage and Delivery of High Pressure Gases
Precursor Compositions for Atomic Layer Deposition and Chemical Vapor Deposition of Titanate, Lanthanate, and Tantalate Dielectric Films
Removal of Masking Material
Precursors for Silicon Dioxide Gap Fill
Strontium Precursor for Use in Chemical Vapor Deposition, Atomic Layer Deposition and Rapid Vapor Deposition
In Situ Generation of RUO4 for Ald of Ru and Ru Related Materials
Liquid Handling System with Electronic Information Storage
Non-Amine Post-Cmp Composition and Method of Use
Method and System for Controlling Operation of a Pump Based on Filter Information in a Filter Information Tag
Method and System for Optimizing Operation of a Pump
Solvent-Free Synthesis of Soluble Nanocrystals
Scalable Lead Zirconium Titanate (Pzt) Thin Film Material and Deposition Method, and Ferroelectric Memory Device Structures Comprising Such Thin Film Material
Photometrically Modulated Delivery of Reagents
System and Method for Flow Monitoring and Control
Composition and Method for Low Temperature Deposition of Silicon-Containing Films
Hollow Gst Structure with Dielectric Fill
Composition and Method for Low Temperature Deposition of Silicon-Containing Films Such as Films Including Silicon, Silicon Nitride, Silicon Dioxide and/or Silicon-Oxynitride
Method of Filling a Drum Having an Rfid Identification Tag
Antimony and Germanium Complexes Useful for Cvd/Ald of Metal Thin Films
Composition and Method for Low Temperature Chemical Vapor Deposition of Silicon-Containing Films Including Silicon Carbonitride and Silicon Oxycarbonitride Films
Low-Profile Surface Mount Filter
Isotopically-Enriched Boron-Containing Compounds, and Methods of Making and Using Same
Boron Ion Implantation Using Alternative Fluorinated Boron Precursors, and Formation of Large Boron Hydrides for Implantation
Wafer Container with Tubular Environmental Control Components
Method and Apparatus to Help Promote Contact of Gas with Vaporized Material
Scalable Lead Zirconium Titanate (Pzt) Thin Film Material and Deposition Method, and Ferroelectric Memory Device Structures Comprising Such Thin Film Material
Closure/Connector for Liner-Based Dispense Containers
System and Method for Monitoring Operation of a Pump
Nanoporous Articles and Methods of Making Same
Monosilane or Disilane Derivatives and Method for Low Temperature Deposition of Silicon-Containing Films Using the Same
Antimony Compounds Useful for Deposition of Antimony-Containing Materials
Fluid Flow Measuring and Proportional Fluid Flow Control Device
Front Opening Wafer Carrier with Path to Ground Effectuated by Door
Composition and Method for Low Temperature Deposition of Silicon-Containing Films
Isotopically-Enriched Boron-Containing Compounds, and Methods of Making and Using Same
Composition and Method for Low Temperature Deposition of Silicon-Containing Films Such as Films Including Silicon, Silicon Nitride, Silicon Dioxide and/or Silicon-Oxynitride
Network Interface Device
I/O Systems, Methods and Devices for Interfacing a Pump Controller
Oxidizing Aqueous Cleaner for the Removal of Post-Etch Residues
Photometrically Modulated Delivery of Reagents
Chemical Vapor Deposition of High Conductivity, Adherent Thin Films of Ruthenium
Hydrogen Gas Separator System Having a Micro-Channel Construction with a Tubular Wire Insert for Retaining Catalyst Material
Patent:
9,169,118 →
Application:
13/101,113 →
Composition and Method for Recycling Semiconductor Wafers Having Low-K Dielectric Materials Thereon
Atmospheric Pressure Microwave Plasma Treated Porous Membranes
Copper Cleaning and Protection Formulations
High Concentration Nitrogen-Containing Germanium Telluride Based Memory Devices and Processes of Making
Fluid Storage and Dispensing Systems, and Fluid Supply Processes Comprising Same
Fluid Storage and Dispensing Systems and Processes
Filters Employing Both Acidic Polymers and Physical-Adsorption Media
Patent:
44,536 →
Application:
13/151,161 →
Fluid Storage and Dispensing System Including Dynamic Fluid Monitoring of Fluid Storage and Dispensing Vessel
Filter Apparatus Capable of Releasing Air
Antimony and Germanium Complexes Useful for Cvd/Ald of Metal Thin Films
Rectangular Parallelepiped Fluid Storage and Dispensing Vessel
Fluid Storage and Dispensing System Including Dynamic Fluid Monitoring of Fluid Storage and Dispensing Vessel
Methods and Materials for Making a Monolithic Porous Pad Cast Onto a Rotatable Base
Ion Source Cleaning in Semiconductor Processing Systems
Fluid Storage and Dispensing Vessels Having Colorimetrically Verifiable Leak-Tightness and Method of Making Same
Gas Storage and Dispensing System with Monolithic Carbon Adsorbent
System and Method for a Pump with Reduced Form Factor
Apparatus and Method for Preparation of Compounds or Intermediates Thereof from a Solid Material, and Using Such Compounds and Intermediates
Molded Rotatable Base for a Porous Pad
System and Method for Pressure Compensation in a Pump
Porous Composite Membrane
Method and Composition for Depositing Ruthenium with Assistive Metal Species
Non-Dewetting Porous Membranes
DOPED ZrO2 CAPACITOR MATERIALS AND STRUCTURES
Application:
13/264,745 →
Publication:
US 2012/0127629
Electrostatic Chuck with Polymer Protrusions
Method and System for Pump Priming
Compositions and Method for the Removal of Photoresist for a Wafer Rework Application
Application:
13/286,281 →
Publication:
US 2012/0042898
Aqueous Cerium-Containing Solution Having an Extended Bath Lifetime for Removing Mask Material
Isotopically-Enriched Boron-Containing Compounds, and Methods of Making and Using Same
System and Method for Position Control of a Mechanical Piston in a Pump
Low Temperature Gst Process
Pvdf Pyrolyzate Adsorbent and Gas Storage and Dispensing System Utilizing Same
Monosilane or Disilane Derivatives and Method for Low Temperature Deposition of Silicon-Containing Films Using the Same
Precursor Compositions for Atomic Layer Deposition and Chemical Vapor Deposition of Titanate, Lanthanate, and Tantalate Dielectric Films
Tpir Apparatus for Monitoring Tungsten Hexafluoride Processing to Detect Gas Phase Nucleation, and Method and System Utilizing Same
Fluid Processing Systems and Methods
Sintered Porous Material Comprising Particles Of Different Average Sizes
Fluid Monitoring Apparatus
Substantially Rigid Collapsible Liner and Flexible Gusseted or Non-Gusseted Liners and Methods of Manufacturing the Same and Methods for Limiting Choke-Off in Liners
Method and Apparatus to Help Promote Contact of Gas with Vaporized Material
Method and Apparatus for Enhanced Lifetime and Performance of Ion Source in an Ion Implantation System
Optical Sensor Apparatus to Detect Light Based on the Refractive Index of a Sample
Liquid Handling System with Electronic Information Storage
Ion Implantation System and Method
Universal Disk Shipper
Purifier for Removing Hydrogen Fluoride from Electrolytic Solution
Porous Barrier for Evenly Distributed Purge Gas in a Microenvironment
Ventilation Gas Management Systems and Processes
System and Method for a Variable Home Position Dispense System
Reticle Pod
Method and Apparatus for Enhanced Lifetime and Performance of Ion Source in an Ion Implantation System
Photoresist Removal
Cleaning Agent for Semiconductor Provided with Metal Wiring
Thin Wafer Shipper
Gas Storage and Dispensing System with Monolithic Carbon Adsorbent
System and Method for Monitoring Operation of a Pump
Antimony and Germanium Complexes Useful for Cvd/Ald of Metal Thin Films
Germanium Antimony Telluride Materials and Devices Incorporating Same
Liner-Based Liquid Storage and Dispensing Systems with Empty Detection Capability
Electrostatic Chuck with Photo-Patternable Soft Protrusion Contact Surface
Germanium Antimony Telluride Materials and Devices Incorporating Same
High Surface Resistivity Electrostatic Chuck
Endpoint Determination for Capillary-Assisted Flow Control
Liquid Dispensing Systems Encompassing Gas Removal
Boron Ion Implantation Using Alternative Fluorinated Boron Precursors, and Formation of Large Boron Hydrides for Implantation
Composite Substrate Carrier
DOPING OF ZrO2 FOR DRAM APPLICATIONS
Aqueous Cleaner for the Removal of Post-Etch Residues
Etching Solution for Copper or Copper Alloy
High Conductivity Electrostatic Chuck
Method and Apparatus for Enhanced Lifetime and Performance of Ion Source in an Ion Implantation System
Methods and Apparatus for Large Diameter Wafer Handling
Diamond Like Carbon Coating of Substrate Housings
Method and Apparatus to Help Promote Contact of Gas with Vaporized Material
System and Method for Welding a Plurality of Small Diameter Palladium Alloy Tubes to a Common Base Plate in a Space Efficient Manner
Phase Change Memory Structure Comprising Phase Change Alloy Center-Filled with Dielectric Material
Composition and Process for Selectively Etching Metal Nitrides
Composition for and Method of Suppressing Titanium Nitride Corrosion
Connectors for Liner-Based Dispense Containers
Wafer Container with Door Guide and Seal
Liner-Based Assembly for Removing Impurities
Enriched Silicon Precursor Compositions and Apparatus and Processes for Utilizing Same
Tellurium Compounds Useful for Deposition of Tellurium Containing Materials
Molded Rotatable Base for a Porous Pad
Filtration Article With Fluoropolymer Knit
Apparatus and Process for Integrated Gas Blending
Rectangular Parallelepiped Fluid Storage and Dispensing Vessel
Formulations for the Removal of Particles Generated by Cerium-Containing Solutions
Application:
13/978,825 →
Publication:
US 2014/0318584
Liner-Based Dispenser
Nested Blow Molded Liner and Overpack and Methods of Making Same
Chemical Mechanical Planarization Conditioner
Cluster Ion Implantation of Arsenic and Phosphorus
System and Method for a Pump with Onboard Electronics
Method and Materials for Making a Monolithic Porous Pad Cast Onto a Rotatable Base
Purifier Cassette
Fluid Storage and Dispensing System Including Dynamic Fluid Monitoring of Fluid Storage and Dispensing Vessel
Atmospheric Pressure Microwave Plasma Treated Porous Membranes
Method and System for Anhydrous Ammonia Recovery
Isotopically-Enriched Boron-Containing Compounds, and Methods of Making and Using Same
Low Temperature Gst Process
Porous Composite Membrane Including Microporous Membrane Layers And Nanofiber Layer
Application:
14/114,868 →
Publication:
US 2014/0061114
Refillable Ampoule with Purge Capability
Reticle Pod
System and Method for Position Control of a Mechanical Piston in a Pump
Method and System for Controlling Operation of a Pump Based on Filter Information in a Filter Information Tag
Sulfolane Mixtures as Ambient Aprotic Polar Solvents
Antimony Compounds Useful for Deposition of Antimony-Containing Materials
Low Temperature Deposition of Phase Change Memory Materials
Pvdf Pyrolyzate Adsorbent and Gas Storage and Dispensing System Utilizing Same
Photoresist Removal
Antioxidants for Post-Cmp Cleaning Formulations
Alon Coated Substrate with Optional Yttria Overlayer
Nanotube and Finely Milled Carbon Fiber Polymer Composite Compositions and Methods of Making
Application:
14/234,120 →
Publication:
US 2014/0287176
Wafer Carrier
System and Method for Detecting Air in a Fluid
Application:
14/239,737 →
Publication:
US 2014/0303791
Antimony and Germanium Complexes Useful for Cvd/Ald of Metal Thin Films
Wafer Container with Latching Mechanism for Large Diameter Wafers
Diffusion Resistant Electrostatic Clamp
Method and Apparatus for Treating Fluids to Reduce Microbubbles
Precursor Compositions for Atomic Layer Deposition and Chemical Vapor Deposition of Titanate, Lanthanate, and Tantalate Dielectric Films
Non-Amine Post-Cmp Composition and Method of Use
Oxidizing Aqueous Cleaner for the Removal of Post-Etch Residues
System and Method for Pressure Compensation in a Pump
Enriched Silicon Precursor Compositions and Apparatus and Processes for Utilizing Same
Compositions and Methods for the Selective Removal of Silicon Nitride
Tellurium Compounds Useful for Deposition of Tellurium Containing Materials
Composition and Method for Low Temperature Chemical Vapor Deposition of Silicon-Containing Films Including Silicon Carbonitride and Silicon Oxycarbonitride Films
Wafer Container with Tubular Environmental Control Components
Method and Apparatus for Enhanced Lifetime and Performance of Ion Source in an Ion Implantation System
Post-Cmp Cleaning Apparatus and Method
Application:
14/347,170 →
Publication:
US 2014/0230170
Etching Agent for Copper or Copper Alloy
Modular Filter Cassette
B2F4 Manufacturing Process
Liner-Based Shipping and Dispensing Containers for the Substantially Sterile Storage, Shipment, and Dispense of Materials
Application:
14/351,511 →
Publication:
US 2014/0231427
Folded Liner for Use with an Overpack and Methods of Manufacturing the Same
Compositions and Methods for Selectively Etching Titanium Nitride
Gas Purifier
Alternate Materials and Mixtures to Minimize Phosphorus Buildup in Implant Applications
Post-Cmp Removal Using Compositions and Method of Use
Carbon Dopant Gas and Co-Flow for Implant Beam and Source Life Performance Improvement
Polymer-Based Multilayer Gas Barrier Film
Fluid Delivery System and Method
Methods for the Selective Removal of Ashed Spin-on Glass
Application:
14/384,303 →
Publication:
US 2015/0075570
Storage and Stabilization of Acetylene
Wafer Shipper
Manufacturing Method for Generally Cylindrical Three-Dimensional Conformal Liners
Application:
14/398,262 →
Publication:
US 2015/0125638
Replaceable Wafer Support Backstop
Wafer Container with Door Interface Seal
Wafer Container with Door Mounted Shipping Cushions
Cmp Conditioner Pads with Superabrasive Grit Enhancement
Application:
14/398,960 →
Publication:
US 2015/0087212
Silylene Compositions and Methods of Use Thereof
Composition and Process for Stripping Photoresist from a Surface Including Titanium Nitride
Source Reagent-Based Delivery of Fluid with High Material Flux for Batch Deposition
Ultra-High Purity Storage and Dispensing of Liquid Reagents
Apparatus for Preventing Microparticle and Dust Migration in Layered Bed Purification Devices
Application:
14/426,497 →
Publication:
US 2015/0283495
Anti-Spike Pressure Management of Pressure-Regulated Fluid Storage and Delivery Vessels
Cobalt Precursors for Low Temperature Ald or Cvd of Cobalt-Based Thin Films
Fluorine Free Tungsten Ald/Cvd Process
Cmp Brush Packaging
Purification system with manifold assembly and removable filter cassette
Opto-Electronic Inspection Quality Assurance System for Fluid Dispensing Valves
Reticle Pod with Cover to Baseplate Alignment System
Double Self-Aligned Phase Change Memory Device Structure
Electrostatic Chuck with Photo-Patternable Soft Protrusion Contact Surface
Methods, Systems, and Apparatuses for Controlling Substance Mixing Concentration
Ion Implantation System and Method
System and Method for Variable Dispense Position
A Pressurized System for Dispensing Fluids
Liquid Handling System with Electronic Information Storage
Gas Storage and Dispensing System with Monolithic Carbon Adsorbent
Dissolved Oxygen Sensor
Optical Sensor Apparatus to Detect Light Based on the Refractive Index of a Sample
Material Storage and Dispensing Packages and Methods
Application:
14/550,401 →
Publication:
US 2015/0078685
Metal and Dielectric Compatible Sacrificial Anti-Reflective Coating Cleaning and Removal Composition
Methods and Apparatus for Large Diameter Wafer Handling
Methods and Materials for Making a Monolithic Porous Pad Cast Onto a Rotatable Base
Antioxidants for Post-Cmp Cleaning Formulations
Patent:
46,427 →
Application:
14/595,758 →
Systems and Methods for Managing Material Storage Vessels Having Information Storage Elements
Substrate Container with Purge Ports
Single Use Dispense Head with Key Code
Compositions for Cleaning Iii-V Semiconductor Materials and Methods of Using Same
In-Situ Oxidized Nio as Electrode Surface for High K Mim Device
Gas Purification Filter Unit
I/O Systems, Methods and Devices for Interfacing A Pump Controller
Liner-Based Liquid Storage and Dispensing Systems with Empty Detection Capability
Method and Apparatus for Enhanced Lifetime and Performance of Ion Source in an Ion Implantation System
Fluid Processing Systems and Methods
Folded Liner for Use with an Overpack and Methods of Manufacturing the Same
Cleaning Agent for Semiconductor Provided with Metal Wiring
Liner-Based Assembly for Removing Impurities
Porous Barrier for Evenly Distributed Purge Gas in a Microenvironment
Rectangular Parallelepiped Fluid Storage and Dispensing Vessel
Vacuum Chuck with Polymeric Embossments
Ald Processes for Low Leakage Current and Low Equivalent Oxide Thickness Bitao Films
Ion Implantation Compositions, Systems, and Methods
Compositions and Methods for Selectively Etching Titanium Nitride
Endpoint Determination for Capillary-Assisted Flow Control
Composition and Method for Low Temperature Chemical Vapor Deposition of Silicon-Containing Films Including Silicon Carbonitride and Silicon Oxycarbonitride Films
Fluid Storage and Dispensing Systems and Processes
Liquid Dispensing Systems Encompassing Gas Removal
Application:
14/814,155 →
Publication:
US 2016/0039659
Method and Apparatus to Help Promote Contact of Gas with Vaporized Material
Organic Solvent Purifier and Method of Using
Ion Implantation System and Method
Application:
14/827,783 →
Publication:
US 2015/0357152
Chemical Mechanical Planarization Pad Conditioner
Fluid Monitoring Apparatus
Isotopically-Enriched Boron-Containing Compounds, and Methods of Making and Using Same
Articles Coated With Fluoro-Annealed Films
Compositions and Methods for the Selective Removal of Silicon Nitride
Sensor with Protective Layer
Preparation of High Pressure BF3/H2 Mixtures
Compositions and Methods for Selectively Etching Titanium Nitride
Front Opening Wafer Container with Weight Ballast
Remote Delivery of Chemical Reagents
Application:
14/906,537 →
Publication:
US 2016/0172164
AQUEOUS FORMULATIONS FOR REMOVING METAL HARD MASK AND POST-ETCH RESIDUE WITH Cu/W COMPATIBILITY
Silicon Implantation in Substrates and Provision of Silicon Precursor Compositions Therefor
Compositions and Methods for Selectively Etching Titanium Nitride
Liquid-Free Sample Traps And Analytical Method For Measuring Trace Level Acidic And Basic AMC
Etching Agent for Copper or Copper Alloy
Apparatus and Method for Preparation of Compounds or Intermediates Thereof from a Solid Material, and Using Such Compounds and Intermediates
Nested Blow Molded Liner and Overpack and Methods of Making Same
Generally Cylindrically-Shaped Liner for Use in Pressure Dispense Systems and Methods of Manufacturing the Same
Application:
14/959,679 →
Publication:
US 2016/0159519
Pvdf Pyrolyzate Adsorbent and Gas Storage and Dispensing System Utilizing Same
Non-Dewetting Porous Membranes
Apparatus and Method for Pressure Dispensing of High Viscosity Liquid-Containing Materials
Dip Tube Assemblies
Towers for Substrate Carriers
Anti-Rotation Device for Hydraulic Connectors
Microporous Polyamide-Imide Membranes
Anti-Rotation Device for Hydraulic Connectors
Dopant Precursors for Mono-Layer Doping
Fitment and Fitment Adapter for Dispensing Systems and Methods for Manufacturing Same
Surface Coating for Chamber Components Used in Plasma Systems
Wafer Carrier
Ni:Nige:Ge Selective Etch Formulations and Method of Using Same
CYCLOPENTADIENYL TITANIUM ALKOXIDES WITH OZONE ACTIVATED LIGANDS FOR ALD OF TiO2
Formulations to Selectively Etch Silicon and Germanium
Electrostatic Chuck and Method of Making Same
Non-Amine Post-Cmp Compositions and Method of Use
Nodule Ratios for Targeted Enhanced Cleaning Performance
Cobalt Precursors
Wafer Shipper with Stacked Support Rings
Disposable Liquid Chemical Sensor System
System and Method for Detection and Signaling of Component End-of-Life in a Dissolved Oxygen Sensor
System and Method for Ultra High Purity (Uhp) Carbon Dioxide Purification
System And Method For Removing Airborne Molecular Contaminants From Gas Streams
Chemical Mechanical Planarization Pad Conditioner with Elongated Cutting Edges
Refillable Ampoule with Purge Capability
Nested Blow Molded Liner and Overpack and Methods of Making Same
Application:
15/140,159 →
Publication:
US 2016/0236806
Front Opening Wafer Container with Robotic Flange
Cmp Pad Conditioning Assembly
Thin Wafer Shipper
AMINE CATALYSTS FOR LOW TEMPERATURE ALD/CVD SiO2 DEPOSITION USING HEXACHLORODISILANE/H2O
Application:
15/292,760 →
Publication:
US 2017/0103888
Electrostatic Chuck
Method and Apparatus to Help Promote Contact of Gas with Vaporized Material
Nitrous Oxide Regenerable Room Temperature Purifier and Method
Cobalt Cvd
High Purity Gas Purifier
System and Method for Operation of a Pump with Feed and Dispense Sensors, Filtration and Dispense Confirmation, and Reduced Pressure Priming of Filter
Application:
15/314,461 →
Publication:
US 2017/0107982
Anti-Backlash Mechanism for Motor-Driven Components in Precision Systems and Applications
Application:
15/314,469 →
Publication:
US 2017/0114879
Anti-Reflective Coating Cleaning and Post-Etch Residue Removal Composition Having Metal, Dielectric and Nitride Compatibility
Adsorbent-Based Pressure Stabilization of Pressure-Regulated Fluid Storage and Dispensing Vessels
Application:
15/317,821 →
Publication:
US 2017/0122496
Aqueous and Semi-Aqueous Cleaners for the Removal of Post-Etch Residues with Tungsten and Cobalt Compatibility
Molded Fluoropolymer Breakseal with Compliant Material
Solid Precursor-Based Delivery of Fluid Utilizing Controlled Solids Morphology
Carbon Materials for Carbon Implantation
Cobalt Precursors for Low Temperature Ald or Cvd of Cobalt-Based Thin Films
Compositions and Methods for Selectively Etching Titanium Nitride
Diffusion Resistant Electrostatic Clamp
Substrate Container with Window Retention Spring
Wafer Shipper with Purge Capability
Microporous Carbon Monoliths from Natural Carbohydrates
High Torque Polymer Fittings
Substrate Container
Application:
15/507,731 →
Publication:
US 2017/0294327
Phosphorus or Arsenic Ion Implantation Utilizing Enhanced Source Techniques
Cobalt Deposition Selectivity on Copper and Dielectrics
Pressure-Regulated Gas Supply Vessel
Application:
15/516,576 →
Publication:
US 2017/0248275
Point of Use or Point of Dispense Filter with Multiple Pleat Packs
Packaging for Dip Tubes
Ion Implantation Processes and Apparatus
Ion Implanter Comprising Integrated Ventilation System
Solid Vaporizer
Grafted Ultra High Molecular Weight Polyethylene Microporous Membranes
Substrate Container Valve Assemblies
Application:
15/532,320 →
Publication:
US 2017/0271188
Carbon Dioxide Compression and Delivery System
Film with Improved Flex Crack Resistance
Application:
15/533,721 →
Publication:
US 2017/0361583
Horizontal Substrate Container with Integral Corner Spring for Substrate Containment
Application:
15/533,833 →
Publication:
US 2017/0372931
Wafer Container Wiht Shock Condition Protection
Post Chemical Mechanical Polishing Formulations and Method of Use
Multi-Pass Gas Cell with Mirrors in Openings of Cylindrical Wall for Ir and Uv Monitoring
Smart Package
Coatings for Enhancement of Properties and Performance of Substrate Articles and Apparatus
Application:
15/550,630 →
Publication:
US 2018/0044800
High-Purity Tungsten Hexacarbonyl for Solid Source Delivery
Bottom Opening Pod with Magnetically Coupled Cassettes
Dry Sterilizable Bag and Clamp for Storing Liquid and Frozen Media and Dispensing
Application:
15/564,864 →
Publication:
US 2018/0104147
Wafer Container with External Passive Getter Module
Gas Cabinets
Application:
15/574,617 →
Publication:
US 2018/0149315
Wafer Container with Door Guide and Seal
Application:
15/586,462 →
Publication:
US 2017/0236737
Fluorinated compositions for ion source performance improvements in nitrogen ion implantation
Application:
15/593,486 →
Publication:
US 2017/0330726
Vapor Phase Etching of Hafnia and Zirconia
Gas Purifier
Carbon Electrode and Lithium Ion Hybrid Capacitor Comprising Same
Connection Verification Tool
Fluid Delivery System and Method
Depth Filtration Media with Multiple Organic and/or Inorganic Materials
Method and Apparatus for Enhanced Lifetime and Performance of Ion Source in an Ion Implantation System
Application:
15/664,554 →
Publication:
US 2017/0330756
Formulations for the Removal of Particles Generated by Cerium-Containing Solutions
Alon Coated Substrate with Optional Yttria Overlayer
Alloys of Co to Reduce Stress
Bag Assembly Sterilizable by Gamma Irradiation
Application:
15/705,878 →
Publication:
US 2018/0021218
Apparatus and Method for Pressure Dispensing of High Viscosity Liquid-Containing Materials
Wafer Carrier Having a Door with a Unitary Body
Application:
15/736,411 →
Publication:
US 2018/0174874
Flow Modification Fixture for an Equipment Front End Module
Aseptic Pods and Load Ports
Application:
15/736,902 →
Publication:
US 2018/0362910
Oblong Diaphragm Valves
Grafted Polysulfone Membranes
Formulations to Selectively Etch Silicon Germanium Relative to Germanium
Blended Potting Resins and Use Thereof
High Pressure Filter
Coatings for Glass Shaping Molds and Molds Comprising the Same
Application:
15/743,080 →
Publication:
US 2019/0077690
Fluid Supply Package
Application:
15/743,109 →
Publication:
US 2019/0078696
Substrate Container with Enhanced Containment
Wafer Support Column with Interlocking Features
Passivation of Germanium Surfaces
Microcrystalline Cellulose Pyrolyzate Adsorbent and Gas Supply Packages Comprising Same
Application:
15/752,822 →
Publication:
US 2019/0001299
Silicon Carbide/Graphite Composite and Articles and Assemblies Comprising Same
Internal Purge Diffuser with Offset Manifold
Substrate Container with Improved Substrate Retainer and Door Latch Assist Mechanism
Cold Sintering of Solid Precursors
Index of Refraction Sensor System with Dual Mode Temperature Control
Adsorbents and Fluid Supply Packages and Apparatus Comprising Same
Application:
15/773,652 →
Publication:
US 2020/0206717
Features on a Porous Membrane
Composition and Process for Selectively Etching P-Doped Polysilicon Relative to Silicon Nitride
Ion Implant Plasma Flood Gun Performance by Using Trace in Situ Cleaning Gas in Sputtering Gas Mixture
Application:
15/778,002 →
Publication:
US 2018/0337020
Cleaning Compositions for Removing Post Etch Residue
Removable Closure with a Key Code Body for a Fluid Container
Patent:
10,266,317 →
Application:
15/826,347 →
Precursors for Silicon Dioxide Gap Fill
Post-Etch Residue Removal for Advanced Node Beol Processing
Use of Non-Oxidizing Strong Acids for the Removal of Ion-Implanted Resist
Liquid Dispensing Systems with Gas Removal and Sensing Capabilities
B2F4 Manufacturing Process
Application:
15/899,692 →
Publication:
US 2019/0071313
Anti-Spike Pressure Management of Pressure-Regulated Fluid Storage and Delivery Vessels
Application:
15/900,033 →
Publication:
US 2018/0180225
Carbon Dopant Gas and Co-Flow for Implant Beam and Source Life Performance Improvement
Post Chemical Mechanical Polishing Formulations and Method of Use
Formulations to Selectively Etch Silicon-Germanium Relative to Silicon
Low Temperature Molybdenum Film Deposition Utilizing Boron Nucleation Layers
CVD Mo DEPOSITION BY USING MoOCl4
Post Chemical Mechanical Polishing Formulations and Method of Use
Fluidized Granular Absorbent Bed Filter
Thermochromic Indicator for Reagent Gas Vessel
Application:
16/002,916 →
Publication:
US 2018/0356041
Silicon Carbide Filter Membrane and Methods of Use
Modular Tray Ampoule
Wafer Contact Surface Protrusion Profile with Improved Particle Performance
Substrate Cushion Brace Retainer
Microenvironment for Flexible Substrates
Application:
16/076,082 →
Publication:
US 2020/0152496
Flexible Substrate Shipper
Application:
16/076,817 →
Publication:
US 2019/0019703
Glass Substrate Shipper
Application:
16/076,820 →
Publication:
US 2019/0019704
Diaphragm Valve with Total Valve Cavity Evacuation
Hydrophobic Polyethylene Membrane for Use in Venting, Degassing, and Membrane Distillation Processes
Gas Filter
Nozzle Filter
Tamper-Resistant Chemical Reagent Package
High Purity Gas Purifier
Compositions and Methods for Etching Silicon Nitride-Containing Substrates
Coatings for Enhancement of Properties and Performance of Substrate Articles and Apparatus
Automatable Closure
Coatings for Glass-Shaping Molds and Molds Comprising the Same
Combination Optimizer Filter and Manifold
Patent:
513,304 →
Application:
29/127,333 →
Rectangular Parallelepiped Fluid Storage and Dispensing Vessel
Patent:
545,393 →
Application:
29/212,522 →
Cleaning Sponge Roller
Patent:
622,920 →
Application:
29/286,342 →
Wafer Carrier Door
Patent:
611,437 →
Application:
29/305,320 →
Apparatus for Adjustable Stacker Bar Assembly Having Quick Change Features
Patent:
641,029 →
Application:
29/367,086 →
Substrate Container
Patent:
668,865 →
Application:
29/377,267 →
Substrate Shipper Component
Patent:
664,851 →
Application:
29/378,153 →
Substrate Cleaning Brush
Patent:
682,497 →
Application:
29/381,652 →
Packaging
Patent:
702,128 →
Application:
29/418,169 →
Substrate Shipper Component
Patent:
673,853 →
Application:
29/429,021 →
Wafer Carrier Ring
Patent:
723,239 →
Application:
29/430,855 →
Substrate Container
Patent:
689,696 →
Application:
29/434,621 →
Substrate Container
Patent:
740,031 →
Application:
29/467,250 →
Wafer Support Ring
Patent:
783,922 →
Application:
29/511,213 →
Liquid-Free Trap for Trace Level Acidic and Basic AMC and Components Thereof
Patent:
775,342 →
Application:
29/511,388 →
Wafer Carrier Ring
Patent:
767,233 →
Application:
29/518,509 →
Wafer Support Ring
Patent:
767,234 →
Application:
29/519,122 →
Wrench
Patent:
790,936 →
Application:
29/522,687 →
Breakseal for a Liquid Dispensing System
Patent:
766,720 →
Application:
29/534,705 →
Container
Patent:
799,825 →
Application:
29/538,054 →
Container
Patent:
801,046 →
Application:
29/544,422 →
Wafer Support Ring
Patent:
815,385 →
Application:
29/580,872 →
Wrench
Patent:
811,183 →
Application:
35/001,042 →
Haloalkynyl Dicobalt Hexacarbonyl Precursors for Chemical Vapor Deposition of Cobalt
Application:
62/425,807 →
Heat Transfer to Ampoule Trays
Application:
62/574,931 →
Compositions and Methods for Reducing Interaction Between Abrasive Particles and a Cleaning Brush
Application:
62/594,139 →
Chemical Delivery System and Method of Operating the Chemical Delivery System
Application:
62/595,740 →
Ampoule Vaporizer and Vessel
Application:
62/598,870 →
Methods and Assemblies Using Flourine Containing and Inert Gasses for Plasma Flood Gun (Pfg) Operation
Application:
62/599,098 →
Chemical Resistant Multi-Layer Coatings Applied by Atomic Layer Deposition
Application:
62/599,865 →
Aminoiodosilianes and Methods of Synthesizing These Aminoiodosilanes
Application:
62/616,568 →
Vapor Deposition of Molybdenum Using a Bis(Alkyl-Arene) Molybdenum Precursor
Application:
62/619,363 →
Adsorbent-Based Packages with Filter, and Related Methods and Uses
Application:
62/639,462 →
Fluorinated Filter Membrane, Filters, and Methods
Application:
62/643,402 →
Polyamide Coated Filter Membrane, Filters, and Methods
Application:
62/664,515 →
Regulator Stability in a Pressure Regulated Storage Vessel
Application:
62/666,755 →
Fluid Circuit with Integrated Electrostatic Discharge Mitigation
Application:
62/667,783 →
Molds That Include a Ceramic Material Surface, and Related Methods for Making and Using the Molds
Application:
62/670,070 →
Methods and Apparatus Using Germanium Tetraflouride and Hydrogen Mixtures for an Ion Implantation System
Application:
62/672,879 →
Conditioner for Chemical-Mechanical-Planarization Pad and Related Methods
Application:
62/672,938 →
Improvements to Selectively Etching Materials
Application:
62/694,578 →
Method for Selectively Removing Nickel Platinum Material
Application:
62/694,595 →
Cleaning Composition with Corrosion Inhibitor
Application:
62/701,198 →
Post Cmp Cleaning Compositions for Ceria Particles
Application:
62/723,759 →
Membrane Diffuser System for a Substrate Carrier
Application:
62/723,979 →
Ion Implantation Processes and Apparatus Using Gallium
Application:
62/730,198 →
Valve System with Position Indicator
Application:
62/730,696 →
Adsorbent-Based, Mechanically-Regulated Gas Storage and Delivery Vessel
Application:
62/730,754 →
Fluoropolymer with Perfluorinated Ionomers
Application:
62/737,572 →
Related Assignments
(6)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 19, 2016
From: ADVANCED TECHNOLOGY MATERIALS, INC.
To: ENTEGRIS, INC.
Reel/Frame 041029/0903 →
Release of Security Interest
Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.
Reel/Frame 047477/0032 →
Release of Security Interest
Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.
Reel/Frame 047477/0151 →
Security Interest
Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
Assignment of Assignor's Interest
Dec 12, 2018
From: KAMIMOTO, SATOSHI; OYASHIKI, YASUSHI
To: ENTEGRIS, INC.
Reel/Frame 047756/0659 →
Security Interest
Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →