IP Library › Granted Patent US 7,838,329
Granted Patent B2
US 7,838,329 · App. 12/307,101 · Granted Nov 23, 2010

Antimony and germanium complexes useful for CVD/ALD of metal thin films

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,838,329
App. No.
12/307,101
Granted
Nov 23, 2010
Kind
B2
Abstract

Antimony, germanium and tellurium precursors useful for CVD/ALD of corresponding metal-containing thin films are described, along with compositions including such precursors, methods of making such precursors, and films and microelectronic device products manufactured using such precursors, as well as corresponding manufacturing methods. The precursors of the invention are useful for forming germanium-antimony-tellurium (GST) films and microelectronic device products, such as phase change memory devices, including such films.

Claims (21)

1. A germanium precursor composition, comprising germanium bis(n-butyl, N,N-diisopropylamidinate),

2. The germanium precursor composition of claim 1 , further comprising a solvent medium.

3. The germanium precursor composition of claim 2 , wherein the solvent medium comprises at least one solvent species selected from the group consisting of alkane solvents, hexane, heptane, octane, pentane, ethers, aryl solvents, tetrahydrofuran, benzene, toluene, amines, triethylamine, tert-butylamine, imines, guanidines, amidines and hydrazines.

4. The germanium precursor composition of claim 2 , wherein the solvent medium comprises at least one solvent species selected from the group consisting of alkane solvents.

5. The germanium precursor composition of claim 2 , wherein the solvent medium comprises hexane.

6. The germanium precursor composition of claim 2 , wherein the solvent medium comprises octane.

7. The germanium precursor composition of claim 2 , wherein the solvent medium comprises toluene.

8. The germanium precursor composition of claim 2 , wherein the solvent medium comprises an ether.

9. The germanium precursor composition of claim 2 , wherein the solvent medium comprises tetrahydrofuran.

10. The germanium precursor composition of claim 1 , in a vapor state.

11. The germanium precursor composition of claim 1 , further comprising at least one additional precursor selected from the group consisting of tellurium precursors and antimony precursors.

12. The germanium precursor composition of claim 11 , comprising di-t-butyl telluride.

13. The germanium precursor composition of claim 11 , comprising tris(dimethylamido)antimony.

14. A method of depositing germanium on a substrate, comprising contacting the substrate under vapor deposition conditions with vapor of germanium bis(n-butyl, N,N-diisopropylamidinate),

15. The method of claim 14 , further comprising depositing at least one of antimony and tellurium on the substrate.

16. The method of claim 14 , carried out in fabrication of a phase change memory device.

17. The method of claim 14 , comprising bubbler delivery.

18. The method of claim 14 , comprising solid delivery.

19. The method of claim 14 , comprising liquid delivery.

20. The method of claim 14 , wherein said contacting is conducted in the presence of ammonia.

21. A precursor storage and dispensing package, comprising a package containing germanium bis(n-butyl, N,N-diisopropylamidinate),

Assignments (5)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →