IP Library Granted Patent US 7,317,971
Granted Patent B2
US 7,317,971 · App. 11/502,048 · Granted Jan 8, 2008

System for controlling fluid flow based on a valve break point

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Quick Facts
Patent No.
US 7,317,971
App. No.
11/502,048
Granted
Jan 8, 2008
Kind
B2
Abstract

Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.

Claims (40)

1. A system for regulating fluid flow comprising:

a liquid inlet conduit;

a liquid outlet conduit;

a first valve;

a fluid control valve coupled between the liquid inlet conduit and the liquid outlet conduit to control the flow of liquid from the liquid inlet conduit to the liquid outlet conduit and coupled to the first valve; and

a controller coupled to the first valve further comprising:

a processor;

a computer readable memory;

a set of computer instructions stored on the computer readable memory, the computer instructions comprising instructions executable by the processor to:

generate a flow control signal to the first valve to cause the fluid control valve to close from an initial position based on a first close rate parameter for a first segment of a close range;

generate the flow control signal to the first valve to cause the fluid control valve to close based on a second close rate parameter for a second segment of the close range; and

switch between generating the flow control signal based on the first close rate parameter to generating the flow control signal based on the second close rate parameter at a break point, wherein the flow control signal is generated to cause the fluid control valve to continuously close from the initial position to a fully closed position, wherein switching between generating the flow control signal based on the first close rate parameter to generating the flow control signal based on the second close rate parameter occurs at a specified valve position regardless of corresponding fluid velocity flow, and wherein the first close rate parameter is a first acceleration factor corresponding to a first rate of change in a close rate acceleration and the second close rate parameter corresponds to a second rate of change in the close rate acceleration.

2. The system of claim 1 , wherein the computer instructions further comprise instructions executable to determine if a valve position is less than a break point.

3. The system of claim 1 , wherein the first close rate parameter corresponds to shutting the fluid control valve as quickly as possible.

4. The system of claim 1 , wherein the second close rate parameter corresponds to shutting the fluid control valve as quickly as possible.

5. The system of claim 1 , further comprising a suckback valve, wherein the computer instructions further comprise instructions executable to generate a suckback control signal to cause the suckback valve to push fluid into a nozzle.

6. The system of claim 5 , and wherein the first valve comprises a proportional pneumatic control valve.

7. The system of claim 6 , wherein the proportional pneumatic control valve is responsive to the flow control signal, and wherein the proportional pneumatic control valve closes the fluid control valve by applying pneumatic pressure to the fluid control valve.

8. The system of claim 5 , wherein the computer instructions further comprise instructions executable to generate the suckback control signal configured to cause the suckback valve to push fluid to the end of the nozzle.

9. The system of claim 1 , wherein in the computer instructions further comprise instructions executable to generate the flow control signal based on at least one additional close rate parameter for at least one additional segment of the close range.

10. A computer program product comprising a set of computer instructions stored on a computer readable memory, executable by a computer processor, wherein the set of computer instructions comprise instructions executable to:

generate a flow control signal to a first valve to close a fluid control valve from an initial position based on a first close rate parameter for a first segment of a close range in response to a signal to close the fluid control valve from an initial position; and

generate the flow control signal to the first valve to close the fluid control valve based on a second close rate parameter for a second segment of the close range; and

switch between generating the flow control signal based on the first close rate parameter to generating the flow control signal based on the second close rate parameter at a break point, wherein the flow control signal is generated to continuously close the fluid control valve from the initial position to a fully closed position, wherein switching between generating the flow control signal based on the first close rate parameter to generating the flow control signal based on the second close rate parameter occurs at a specified valve position regardless of corresponding fluid velocity flow, and wherein the first close rate parameter is a first acceleration factor corresponding to a first rate of change in a close rate acceleration and the second close rate parameter corresponds to a second rate of change in the close rate acceleration.

11. The computer program product of claim 10 , wherein the set of computer instructions further comprise instructions executable to determine if a valve position is less than a break point.

12. The computer program product of claim 10 , wherein the first close rate parameter corresponds to shutting the fluid control valve as quickly as possible.

13. The computer program product of claim 10 , wherein the second close rate parameter corresponds to shutting the fluid control valve as quickly as possible.

14. The computer program product of claim 10 , wherein the set of computer instructions further comprise instructions executable to generate a suckback control signal configured to cause a suckback valve to push fluid to the end of a nozzle.

15. The computer program product of claim 14 , wherein the set of computer instructions further comprise instructions executable to generate the suckback control signal to cause the suckback valve to draw the fluid into the nozzle once the fluid has reached the end of the nozzle.

16. The computer program product of claim 10 , wherein in the computer instructions further comprise instructions executable to generate the flow control signal based on at least one additional close rate parameter for at least one additional segment of the close range.

17. A method of ending a dispense process comprising:

generating a flow control signal to a first valve to close a separate fluid control valve based on a first close rate parameter for a first segment of a close range and closing the fluid control valve according to the first close rate parameter;

determining that a second close rate parameter should apply;

generating the flow control signal to the first valve to close the fluid control valve based on the second close rate parameter for a second segment of the close range and closing the fluid control valve according to the second close rate parameter; and

switching between generating the flow control signal based on the first close rate parameter to generating the flow control signal based on the second close rate parameter at a break point, wherein the flow control signal is generated to continuously close the fluid control valve from the initial position to a fully closed position, wherein switching from generating the flow control signal according to the first close rate parameter to generating the flow control signal based on the second close rate parameter occurs at a specified valve position regardless of corresponding fluid velocity flow, wherein the first close rate parameter is a first acceleration factor corresponding to a first rate of change in a close rate acceleration and the second close rate parameter corresponds to a second rate of change in the close rate acceleration.

18. The method of claim 17 , further comprising generating a suckback control signal configured to cause a suckback valve to push fluid into the end of a nozzle.

19. The method of claim 17 , further comprising generating the flow control signal according to at least one additional close rate parameter for at least one additional segment of the close range.

20. The method of claim 17 , further comprising determining if a valve position is less than a break point position.

21. The method of claim 17 , wherein the first close rate parameter corresponds to shutting the fluid control valve as quickly as possible.

22. The method of claim 17 , wherein the second close rate parameter corresponds to shutting the fluid control valve as quickly as possible.

Assignments (12)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
CHANGE OF ADDRESS Recorded Sep 20, 2010
From: ENTEGRIS, INC.
To: ENTEGRIS, INC.
Reel/Frame 025017/0095 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
MERGER Recorded Nov 19, 2007
From: MYKROLIS CORPORATION
To: ENTEGRIS, INC.
Reel/Frame 020131/0691 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 26, 2007
From: LAVERDIERE, MARC; MCLOUGHLIN, ROBERT F.
To: MYKROLIS CORPORATION
Reel/Frame 020023/0293 →