IP Library › Assignment 026764/0880
Patent Assignment
Reel/Frame 026764/0880

Release of Security Interest

Recorded: 2011-08-17 Received: 2011-08-17 Pages: 46
Assignor
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MA, 01821-4600, UNITED STATES
Covered Properties (100)
Reusable Resilient Cushion for Wafer Container
Application: 12/303,789 →
System for Purging Reticle Storage
Application: 12/305,895 →
Automated Skin Spray and Dry System
Application: 12/763,535 →
Valve Manifold Assembly
Application: 12/373,840 →
Wafer Cassette
Application: 12/307,896 →
Filter Apparatus Capable of Releasing Air
Application: 12/438,049 →
Filtration Module
Application: 11/922,551 →
Apparatus and Method for Reducing Particle Contamination in a Vacuum Chamber
Application: 12/356,818 →
Filtering System for a Semiconductor Processing Tool
Application: 12/309,167 →
Apparatus and method for conditioning an immersion fluid
Application: 12/309,202 →
Transfer container
Application: 11/989,874 →
Fluid Handling Device with Isolating Chamber
Application: 12/281,941 →
System and Method for Liquid Filtration with Reduced Hold-Up Volume
Application: 12/308,230 →
Shock Absorbing Substrate Container
Application: 12/278,255 →
Welded Diaphragm Valve
Application: 12/160,037 →
Pleated Filter Cartridge
Application: 12/296,302 →
Fluid Flow Measuring and Proportional Fluid Flow Control Device
Application: 12/253,732 →
Method and apparatus for treating fluids to reduce microbubbles
Application: 11/919,110 →
Atmospheric Pressure Microwave Plasma Treated Porous Membranes
Application: 12/295,727 →
Fluid Handling Device with Directionally-Biased Wetting Surface
Application: 12/066,945 →
System and Method for a Variable Home Position Dispense System
Application: 11/666,124 →
Systems and Methods for Capture Substrates
Application: 11/989,553 →
Reticle Pod
Application: 12/088,120 →
Apparatus and Method for Making Dilute Bubble Free Solutions of Gas in a Liquid
Application: 61/095,230 →
Electrostatic Chuck
Application: 61/094,700 →
A Pressurized System for Dispensing Fluids
Application: 12/200,590 →
Liquid Filtration Device
Application: 12/221,309 →
Apparatus and Method for Making dilute bubble free solutions of gas in a liquid
Application: 61/082,535 →
Nanotube Polymer Composite Composition and Methods of Making
Application: 12/087,914 →
Method and System for High Viscosity Pump
Application: 12/218,325 →
Lithographic Projection Apparatus, Gas Purging Method, Device Manufacturing Method and Purge Gas Supply System
Application: 12/218,091 →
Filtration Module Including Unitary Filter Cartridge-Bowl Construction
Application: 12/215,539 →
Method to Increase Yield and Reduce Down Time in Semiconductor Fabrication Units by Preconditioning Components Using Sub-Aperture Reactive Atom Etch
Application: 61/059,928 →
Molded Rotatable Base for a Porous Pad
Application: 12/095,775 →
Electrostatic Chuck
Application: 61/054,259 →
Apparatus and Method for Making Dilute Bubble Free Solutions of Gas in a Liquid
Application: 61/054,223 →
Transport Module
Application: 12/119,240 →
Network Interface Device
Application: 12/114,414 →
Low Impurity Elastomeric Material
Application: 12/083,570 →
Wafer Carrier Door
Application: 29/305,320 →
Hollow Fiber Membrane Contact Apparatus and Process
Application: 12/050,247 →
System and Method for Non-Intrusive Thermal Monitor
Application: 12/048,881 →
Purge Tower and Getter
Application: 61/036,353 →
Purge System for a Substrate Container
Application: 12/039,700 →
Porous Membranes Containing Exchange Resins
Application: 12/029,672 →
Quick Connect Electrical Box
Application: 12/069,154 →
Substrate Container with Fluid-Sealing Flow Passageway
Application: 12/026,336 →
System and Method of Chemical Dilution and Dispense
Application: 12/024,689 →
Porous Sintered Composite Materials
Application: 12/001,112 →
System and Method for Operation of a Pump
Application: 11/948,585 →
System for Controlling Valve Fluid Flow Based on Rate of Change of Close Rate Acceleration
Application: 11/937,931 →
System, Method, and Apparatus for Conversion Bonding of Precursor Subcomponents into a Unitary Monolith
Application: 11/937,626 →
Low off-gassing polyurethanes
Application: 11/920,036 →
Exchange Apparatus
Application: 11/981,082 →
Device and method for increasing mass transport at liquid-solid diffusion boundary layer
Application: 11/981,300 →
System and Method for Removing Contaminants
Application: 11/628,576 →
Fluid Flow Measuring and Proportional Fluid Flow Control Device
Application: 11/897,740 →
Multilayer Porous Membrane And Process
Application: 11/793,639 →
Magnetic Flow Meter with Unibody Construction and Conductive Polymer Electrodes
Application: 11/807,996 →
System and Apparatus for Adjustable Stacker Bar Assembly Having Vertical Accommodation Features
Application: 11/800,537 →
Cleaning Sponge Roller
Application: 29/286,342 →
Thin Wafer Insert
Application: 11/787,082 →
Front Opening Substrate Container with Bottom Plate
Application: 11/786,035 →
Removal Of Metal Contaminants From Ultra-High Purity Gases
Application: 11/631,985 →
Method for the removal of airborne molecular contaminants using extra clean dry air
Application: 11/706,044 →
Composite substrate carrier
Application: 11/699,749 →
Potted exchange devices and methods of making
Application: 10/583,904 →
Wafer Container and Door with Vibration Dampening Latching Mechanism
Application: 11/651,779 →
System and Method for a Pump with Reduced Form Factor
Application: 11/602,464 →
System and Method for Pressure Compensation in a Pump
Application: 11/602,508 →
Error Volume System and Method for a Pump
Application: 11/602,507 →
I/O Systems, Methods and Devices for Interfacing a Pump Controller
Application: 11/602,449 →
System and Method for Position Control of a Mechanical Piston in a Pump
Application: 11/602,485 →
System and Method for Valve Sequencing in a Pump
Application: 11/602,465 →
System and Method for Correcting for Pressure Variations Using a Motor
Application: 11/602,472 →
O-Ring-Less Low Profile Fittings and Fitting Assemblies
Application: 11/602,513 →
Receptor for a Separation Module
Application: 11/599,195 →
Liquid Filtration Device
Application: 11/591,283 →
Pleated Type Cartridge Filter Device
Application: 11/549,140 →
Composition for removing moisture from hydrogen halides
Application: 11/524,079 →
Wafer Container with Door Actuated Wafer Restraint
Application: 11/514,796 →
Method of forming substrate carriers and articles from compositions comprising carbon nanotubes
Application: 11/509,419 →
Non-Porous Adherent Inert Coatings and Methods of Making
Application: 10/590,132 →
Methods and Materials for Making a Monolithic Porous Pad Cast Onto a Rotatable Base
Application: 10/566,847 →
Apparatus and method for purification of corrosive gas streams
Application: 10/559,070 →
Systems and Methods for Fluid Flow Control in an Immersion Lithography System
Application: 11/502,729 →
System for Controlling Fluid Flow Based on a Valve Break Point
Application: 11/502,048 →
Porous Sintered Composite Materials
Application: 11/502,215 →
Chemically Inert Flow Controller with Non-Contaminating Body
Application: 11/482,542 →
Filter Cartridge Construction
Application: 11/476,890 →
CMP retaining ring
Application: 11/440,461 →
System and method of monitoring contamination
Application: 11/437,994 →
Disposable Fluid Separation Device and Manifold Assembly Design with Easy Change-Out Feature
Application: 11/434,668 →
Lithographic Projection Apparatus, Purge Gas Supply System and Gas Purging Method
Application: 10/565,486 →
Identification Tag for Fluid Containment Drum
Application: 11/400,053 →
High-volume fluid dispense system
Application: 11/400,034 →
Drum Cap Venting Device
Application: 11/397,333 →
Environmental Control in a Reticle Smif Pod
Application: 11/396,949 →
Method and Apparatus for Treating Fluids
Application: 10/559,018 →
Hydride Gas Purification for the Semiconductor Industry
Application: 10/565,353 →