Patent Application
Utility
PCT National Stage
App. No. 12/309,202
· Confirmation No. 9061
Apparatus and method for conditioning an immersion fluid
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2012-07-11 | ABN |
Abandonment | 2 | View | |
| 2011-12-22 | CTNF |
Non-Final Rejection | 10 | View | |
| 2011-12-22 | 892 |
List of references cited by examiner | 1 | View | |
| 2011-12-22 | SRNT |
Examiner's search strategy and results | 8 | View | |
| 2011-12-22 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2011-12-22 | 1449 |
List of References cited by applicant and considered by examiner | 3 | View | |
| 2011-12-22 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2009-12-24 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2009-10-01 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2009-09-28 | CFILE |
Request for Corrected Filing Receipt | 12 | View | |
| 2009-09-28 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-09-17 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2009-09-17 | M903 |
Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed | 2 | View | |
| 2009-09-15 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2009-09-15 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2009-09-15 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2009-08-17 | STATUS.LET |
Request for status of Application | 3 | View | |
| 2009-03-13 | PA.. |
Power of Attorney | 18 | View | |
| 2009-01-09 | TRNA |
Transmittal of New Application | 4 | View | |
| 2009-01-09 | A.PE |
Preliminary Amendment | 1 | View | |
| 2009-01-09 | SPEC |
Specification | 1 | View | |
| 2009-01-09 | CLM |
Claims | 4 | View | |
| 2009-01-09 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2009-01-09 | OATH |
Oath or Declaration filed | 8 | View | |
| 2009-01-09 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2009-01-09 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2009-01-09 | FOR |
Foreign Reference | 27 | View | |
| 2009-01-09 | FOR |
Foreign Reference | 20 | View | |
| 2009-01-09 | 371P |
Documents submitted with 371 (National Stage) Applications | 4 | View | |
| 2009-01-09 | P.409.IN |
Incoming IPEA/409 - International Preliminary Report on Patentability | 7 | View | |
| 2009-01-09 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2009-01-09 | ABST |
Abstract | 1 | View | |
| 2009-01-09 | SPEC |
Specification | 36 | View | |
| 2009-01-09 | CLM |
Claims | 5 | View | |
| 2009-01-09 | DRW |
Drawings-only black and white line drawings | 11 | View | |
| 2009-01-09 | FRPR |
Certified Copy of Foreign Priority Application | 38 | View | |
| 2009-01-09 | FRPR |
Certified Copy of Foreign Priority Application | 51 | View | |
| 2009-01-09 | P.409.IN |
Incoming IPEA/409 - International Preliminary Report on Patentability | 1 | View | |
| 2009-01-09 | P.409.IN |
Incoming IPEA/409 - International Preliminary Report on Patentability | 5 | View | |
| 2009-01-09 | P.409.IN |
Incoming IPEA/409 - International Preliminary Report on Patentability | 1 | View |
Inventors
Bipin S. Parekh
Chelmsford, MA
Annie Xia
Lynnfield, MA
Michael Clarke
Bedford, MA
Joseph E. Smith
North Andover, MA
Attorneys & Agents of Record
Classification
USPC
355/30
G03F7/70341
C02F1/32
C02F1/42
C02F1/444
C02F9/00
C02F2001/427
C02F2101/30
C02F2103/04
C02F2103/346
F28D2021/0077
G03F7/2041
G03F7/70908
Prosecution
- Examiner
- ASFAW, MESFIN T
- Art Unit
- 2882
- Customer No.
- 21005
- Docket No.
- 3194.1048-005
- Confirmation No.
- 9061
Publication
- Pub. No.
- US20090316119A1
- Pub. Date
- 2009-12-24
Parent
PCT
is a National Stage Entry of
→
PCT/US2007/016232
Filed 2007-07-18
· Abandoned -- Failure to Respond to an Office Action
Parent
Claims priority from a provisional application
→
App. 60/832,472
Filed 2006-07-21
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/931,275
Filed 2007-05-21
· Provisional Application Expired
RELEASE OF SECURITY INTEREST
Recorded 2011-08-17
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2009-03-10
from
ENTEGRIS, INC.
SECURITY AGREEMENT
Recorded 2009-03-09
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Quick Facts
- App. No.
- 12/309,202
- Filed
- 2009-01-09
- Pub. No.
- US20090316119A1
- Examiner
- ASFAW, MESFIN T
- Art Unit
- 2882
External Links