Assignment of Assignor's Interest

Recorded: 2009-03-10 Pages: 18

Assignors

PAREKH, BIPIN S.

Executed: 2008-12-31

XIA, ANNIE

Executed: 2009-02-11

CLARKE, MICHAEL

Executed: 2008-11-19

SMITH, JOSEPH E.

Executed: 2008-11-19

Assignee

ENTEGRIS, INC.

3500 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318

Covered Property (1)

Apparatus and method for conditioning an immersion fluid

Application: 12/309,202 →

Publication: US 2009/0316119

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.