IP Library Granted Patent US 8,029,247
Granted Patent B2
US 8,029,247 · App. 11/602,508 · Granted Oct 4, 2011

System and method for pressure compensation in a pump

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Quick Facts
Patent No.
US 8,029,247
App. No.
11/602,508
Granted
Oct 4, 2011
Kind
B2
Abstract

Systems and methods for maintaining substantially a baseline pressure in a chamber of a pumping apparatus are disclosed. Embodiments of the present invention may serve to control a motor to compensate or account for a pressure drift which may occur in a chamber of the pumping apparatus. More specifically, a dispense motor may be controlled to substantially maintain a baseline pressure in the dispense chamber before a dispense based on a pressure sensed in the dispense chamber. In one embodiment, before a dispense is initiated a control loop may be utilized such that it is repeatedly determined if the pressure in the dispense chamber is above a desired pressure and, if so, the movement of the pumping means regulated to maintain substantially the desired pressure in the dispense chamber until a dispense of fluid is initiated.

Claims (48)

1. A method, comprising:

introducing fluid into a chamber of a pumping apparatus; sensing a pressure in the chamber

determining if the sensed pressure in the chamber is above a desired pressure;

moving a pumping means of the pumping apparatus to increase the volume of the chamber to compensate for the pressure increase if the pressure in the chamber is above a desired pressure; and

dispensing fluid from the chamber, wherein the determination and movement are repeated to substantially maintain substantially the desired pressure until the dispense of fluid is initiated.

2. The method of claim 1 , wherein the desired pressure is a dispense pressure.

3. The method of claim 1 , wherein the desired pressure is a fraction of the dispense pressure.

4. The method of claim 1 , wherein determining if the pressure in the chamber is above the desired pressure comprises receiving the pressure in the chamber from a pressure sensor and determining if the pressure is within a tolerance of the desired pressure.

5. The method of claim 4 , wherein dispensing the fluid further comprises determining a dispense position based on an initial position of the pumping means and moving the pumping means from a position of the pumping means when the dispense is initiated to the dispense position.

6. The method of claim 4 , wherein dispensing the fluid comprises calculating a dispense distance based upon an initial position of the pumping means and a correction distance based on the distance the pumping means moves to maintain the desired pressure and moving the pumping means the dispense distance plus the correction distance.

7. The method of claim 4 , wherein dispensing the fluid comprises calculating a dispense distance based upon an initial position of the pumping means and moving the pumping means the dispense distance.

8. The method of claim 4 , wherein no determination is made if the pressure is above the desired pressure while the pumping means is moving.

9. The method of claim 4 , further comprising disabling the pressure sensor while the pumping means is moving.

10. The method of claim 4 , further comprising detecting that the pumping means has stopped moving, before determining if the pressure is within a tolerance of the desired pressure.

11. The method of claim 4 , wherein the pressure is received at a sampling rate.

12. The method of claim 11 , wherein the sampling rate is around 30 khz, around 10 khz or around 1 khz.

13. The method of claim 4 , wherein the pumping means is moved a motor increment.

14. A computer readable medium, comprising instructions translatable for:

introducing fluid into a chamber of a pumping apparatus; sensing a pressure in the chamber

determining if the sensed pressure in the chamber is above a desired pressure;

moving a pumping means of the pumping apparatus to increase the volume of the chamber to compensate for the pressure increase if the pressure in the chamber is above a desired pressure; and

dispensing fluid from the chamber, wherein the determination and movement are repeated to substantially maintain substantially the desired pressure until the dispense of fluid is initiated.

15. The computer readable medium of claim 14 , wherein the desired pressure is a dispense pressure.

16. The computer readable medium of claim 14 , wherein the desired pressure is a fraction of the dispense pressure.

17. The computer readable medium of claim 14 , wherein determining if the pressure in the chamber is above the desired pressure comprises receiving the pressure in the chamber from a pressure sensor and determining if the pressure is within a tolerance of the desired pressure.

18. The computer readable medium of claim 17 , wherein dispensing the fluid further comprises determining a dispense position based on an initial position of the pumping means and moving the pumping means from a position of the pumping means when the dispense is initiated to the dispense position.

19. The computer readable medium of claim 17 , wherein dispensing the fluid comprises calculating a dispense distance based upon an initial position of the pumping means and a correction distance based on the distance the pumping means moves to maintain the desired pressure and moving the pumping means the dispense distance plus the correction distance.

20. The computer readable medium of claim 17 , wherein dispensing the fluid comprises calculating a dispense distance based upon an initial position of the pumping means and moving the pumping means the dispense distance.

21. The computer readable medium of claim 17 , wherein no determination is made if the pressure is above the desired pressure while the pumping means is moving.

22. The computer readable medium of claim 17 , the instructions translatable for:

disabling the pressure sensor while the pumping means is moving.

23. The computer readable medium of claim 17 , the instructions translatable for detecting that the pumping means has stopped moving, before determining if the pressure is within a tolerance of the desired pressure.

24. The computer readable medium of claim 17 , wherein the pressure is received at a sampling rate.

25. The computer readable medium of claim 24 , wherein the sampling rate is around 30 khz, around 10 khz or around 1 khz.

26. The computer readable medium of claim 17 , wherein the pumping means is moved a motor increment.

27. A system, comprising

a pumping apparatus comprising a feed chamber, a dispense chamber operable to receive fluid for dispense, a pumping means within the dispense chamber and a pressure sensor operable to sense a pressure in the dispense chamber; and

a controller configured to receive the pressure, determine if the pressure in the chamber is above a desired pressure, regulate the movement of the pumping means to maintain substantially the desired pressure in the dispense chamber and repeat this receiving, determination and regulation until a dispense of fluid is initiated, wherein the controller is further operable to regulate the movement of the pumping means to dispense fluid from the dispense chamber.

28. The system of claim 27 , wherein determining if the pressure in the dispense chamber is above the desired pressure comprises receiving the pressure in the chamber from a pressure sensor and determining if the pressure is within a tolerance of the desired pressure.

29. The system of claim 28 , wherein dispensing the fluid further comprises determining a dispense position based on an initial position of the pumping means and regulating the movement of the pumping means such that the pumping means moves from a position of the pumping means when the dispense is initiated to the dispense position.

30. The system of claim 28 , wherein dispensing the fluid comprises calculating a dispense distance based upon an initial position of the pumping means and a correction distance based on the distance the pumping means moves to maintain the baseline pressure and regulating the movement of the pumping means such that the pumping means moves the dispense distance plus the correction distance.

31. The system of claim 28 , wherein dispensing the fluid comprises calculating a dispense distance based upon an initial position of the pumping means and regulating the movement of the pumping means such that the pumping means moves the dispense distance.

32. The system of claim 28 , wherein no determination is made if the pressure is above the desired pressure while the pumping means is moving.

33. The system of claim 28 , the controller operable to disable the pressure sensor while the pumping means is moving.

34. The system of claim 28 , the controller operable to detect that the pumping means has stopped moving, before determining if the pressure is within a tolerance of the desired pressure.

35. The system of claim 28 , wherein the pressure is received at a sampling rate.

36. The system of claim 35 , wherein the sampling rate is around 30 khz, around 10 khz or around 1 khz.

37. The system of claim 28 , wherein the pumping means is regulated to move a motor increment.

Assignments (11)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
CHANGE OF ADDRESS Recorded Sep 20, 2010
From: ENTEGRIS, INC.
To: ENTEGRIS, INC.
Reel/Frame 025017/0095 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 9, 2007
From: CEDRONE, JAMES; GONNELLA, GEORGE
To: ENTEGRIS, INC.
Reel/Frame 018926/0852 →