IP Library Granted Patent US 7,866,480
Granted Patent B2
US 7,866,480 · App. 11/786,035 · Granted Jan 11, 2011

Front opening substrate container with bottom plate

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Quick Facts
Patent No.
US 7,866,480
App. No.
11/786,035
Granted
Jan 11, 2011
Kind
B2
Abstract

A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.

Claims (39)

1. A container, comprising:

a container portion having an interior and an exterior;

supports disposed in the interior for accommodating a substrate;

a door sealingly accommodated by the container portion;

a bottom plate connected to the container portion at a plurality of locations and having a plurality of radially aligned kinematic grooves, the bottom plate spaced from the container portion except at said plurality of locations;

at least one bore extending through the bottom plate and the container portion at one of the plurality of locations where the bottom plate is connected to the container portion and providing fluid communication between the interior of the container portion and the exterior; and

a valve disposed in said at least one bore.

2. The container of claim 1 , in which the valve is a check valve.

3. The container of claim 1 , further comprising a filter positionally disposed to filter air entering the container portion via said valve when said valve is open.

4. The container of claim 1 , further comprising:

a plurality of adjustable spacers for adjusting a positioning of the bottom plate with respect to the container portion, each of said adjustable spacers comprising a first member and a second member threadably connected to the first member.

5. The container of claim 4 , wherein the positioning of the bottom plate with respect to the container portion is adjustable by way of rotation of at least one of the first member and the second member.

6. The container of claim 1 , further comprising an elastomeric dampener disposed between the bottom plate and the container portion.

7. A substrate container, comprising:

a container portion with an open front, the container portion comprising a pair of opposite side walls, a bottom wall, a top wall, and a back wall connecting and defining an open interior and a plurality of substrate supports in the open interior for supporting substrates;

a door for sealingly closing the open front;

a bottom plate connected to the container portion at a plurality of locations, the bottom plate spaced apart from the container portion except at said plurality of locations;

at least one bore positioned at one of the plurality of locations providing fluid communication between the interior of the container portion and an exterior of the container portion; and

at least one of a valve, filter, or plug positioned in the at least one bore.

8. The substrate container of claim 7 , wherein a check valve is positioned in the at least one bore.

9. The substrate container of claim 7 , wherein a duckbill valve is positioned in the at least one bore.

10. The substrate container of claim 7 , wherein the at least one bore includes both a valve and a filter positioned therein.

11. The container of claim 7 , further comprising:

a plurality of adjustable spacers for adjusting a positioning of the bottom plate with respect to the container portion, each of said adjustable spacers comprising a first member and a second member threadably connected to the first member.

12. The container of claim 11 , wherein the positioning of the bottom plate with respect to the container portion is adjustable by way of rotation of at least one of the first member and the second member.

13. The container of claim 7 , further comprising an elastomeric dampener disposed between the bottom plate and the container portion.

14. A substrate container, comprising:

a container portion with an open front, the container portion comprising a pair of opposite side walls, a bottom wall, a top wall, and a back wall connecting and defining an open interior and a plurality of substrate supports in the open interior for supporting substrates;

a door for sealingly closing the open front;

a coupling plate connected to the container portion for coupling the container portion to a machine interface;

at least one aperture fluidly communicating the interior of the container portion with an exterior of the container portion extending through a location where the coupling plate is connected to the container portion; and

at least one of a valve, filter, or plug positioned in the at least one bore.

15. The substrate container of claim 14 , wherein a check valve is positioned in the at least one bore.

16. The substrate container of claim 14 , wherein a duckbill valve is positioned in the at least one bore.

17. The substrate container of claim 14 , wherein the at least one bore includes both a valve and a filter positioned therein.

18. The container of claim 14 , further comprising:

a plurality of adjustable spacers for adjusting a positioning of the coupling plate with respect to the container portion, each of said adjustable spacers comprising a first member and a second member threadably connected to the first member.

19. The container of claim 18 , wherein the positioning of the coupling plate with respect to the container portion is adjustable by way of rotation of at least one of the first member and the second member.

20. The container of claim 14 , further comprising an elastomeric dampener disposed between the coupling plate and the container portion.

Assignments (10)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 21, 2010
From: BURNS, JOHN; FULLER, MATTHEW A.; KING, JEFFERY J.; FORBES, MARTIN L.; SMITH, MARK V.
To: ENTEGRIS, INC.
Reel/Frame 024422/0510 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →