IP Library Granted Patent US 8,082,066
Granted Patent B2
US 8,082,066 · App. 11/937,931 · Granted Dec 20, 2011

System for controlling valve fluid flow based on rate of change of close rate acceleration

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Quick Facts
Patent No.
US 8,082,066
App. No.
11/937,931
Granted
Dec 20, 2011
Kind
B2
Abstract

Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.

Claims (38)

1. A computer program product comprising a non-transitory computer readable storage medium storing a set of computer instructions, executable by a computer processor, wherein the set of computer instructions comprise instructions executable to:

generate a flow control signal to close a fluid control valve based on a first close rate parameter for a first segment of a close range;

generate a flow control signal to close the fluid control valve based on a second close rate parameter for a second segment of the close range;

determine that the fluid control valve has closed;

generate a suckback control signal configured to cause a suckback valve to push a fluid to an end of a nozzle in response to the determination that the fluid control valve has closed; and

generate a suckback control signal configured to cause the suckback valve to draw the fluid into the nozzle after the fluid has reached the end of the nozzle;

wherein the first close rate parameter is a first acceleration factor corresponding to a first rate of change in a close rate acceleration and the second close rate parameter corresponds to a second rate of change in the close rate acceleration.

2. The computer program product of claim 1 , wherein the first close rate parameter corresponds to shutting the fluid control valve as quickly as possible.

3. The computer program product of claim 1 , wherein the second close rate parameter corresponds to shutting the fluid control valve as quickly as possible.

4. The computer program product of claim 1 , wherein the computer instructions further comprise instructions executable to generate the flow control signal based on at least one additional close rate parameter for at least one additional segment of the close range.

5. A computer program product comprising a non-transitory computer readable medium storing a set of computer instructions, wherein the set of computer instructions comprise instructions executable to:

generate a flow control signal to close a fluid control valve based on a first close rate parameter for a first segment of a close range;

generate a flow control signal to close the fluid control valve based on a second close rate parameter for a second segment of the close range;

determine that the fluid control valve has closed;

generate a suckback control signal configured to cause a suckback valve to push a fluid to an end of a nozzle; and

generate a suckback control signal configured to cause the suckback valve to draw the fluid into the nozzle after the fluid has reached the end of the nozzle;

wherein the first close rate parameter is a first acceleration factor corresponding to a first rate of change in a close rate acceleration and the second close rate parameter corresponds to a second rate of change in the close rate acceleration.

6. The computer program product of claim 5 , wherein the first close rate parameter corresponds to shutting the fluid control valve as quickly as possible.

7. The computer program product of claim 5 , wherein the second close rate parameter corresponds to shutting the fluid control valve as quickly as possible.

8. The computer program product of claim 5 , wherein in the computer instructions further comprise instructions executable to generate the flow control signal based on at least one additional close rate parameter for at least one additional segment of the close range.

9. A system for regulating fluid flow comprising:

a fluid control valve;

a suckback valve downstream of the fluid control valve;

a nozzle downstream of the suckback valve;

a controller further comprising:

a processor;

a computer readable memory;

a set of computer instructions stored on the computer readable memory, the computer instructions comprising instructions executable by the processor to:

generate a flow control signal to close the fluid control valve based on a first close rate parameter for a first segment of a close range;

generate a flow control signal to close the fluid control valve based on a second close rate parameter for a second segment of the close range;

determine that the fluid control valve has closed;

generate a suckback control signal configured to cause the suckback valve to push a fluid to an end of the nozzle; and

generate a suckback control signal configured to cause the suckback valve to draw the fluid into the nozzle after the fluid has reached the end of the nozzle,

wherein the first close rate parameter is a first acceleration factor corresponding to a first rate of change in a close rate acceleration and the second close rate parameter corresponds to a second rate of change in the close rate acceleration.

10. The system of claim 9 , wherein the computer instructions further comprise instructions executable to switch from generating the flow control signal according to the first close rate parameter to generating the flow control signal based on the second close rate parameter based on a break point.

11. The system of claim 9 , wherein in the computer instructions further comprise instructions executable to generate the flow control signal based on at least one additional close rate parameter for at least one additional segment of the close range.

12. The system of claim 9 , wherein the first close rate parameter corresponds to shutting the fluid control valve as quickly as possible.

13. The system of claim 9 , wherein the second close rate parameter corresponds to shutting the fluid control valve as quickly as possible.

Assignments (12)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
CHANGE OF ADDRESS Recorded Sep 20, 2010
From: ENTEGRIS, INC.
To: ENTEGRIS, INC.
Reel/Frame 025017/0095 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
MERGER Recorded Nov 12, 2007
From: MYKROLIS CORPORATION
To: ENTEGRIS, INC.
Reel/Frame 020095/0526 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 9, 2007
From: LAVERDIERE, MARC; MCLOUGHLIN, ROBERT F
To: MYKROLIS CORPORATION
Reel/Frame 020093/0063 →