IP Library Granted Patent US 7,885,773
Granted Patent B2
US 7,885,773 · App. 12/253,732 · Granted Feb 8, 2011

Fluid flow measuring and proportional fluid flow control device

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Quick Facts
Patent No.
US 7,885,773
App. No.
12/253,732
Granted
Feb 8, 2011
Kind
B2
Abstract

Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a fluid flow device can be calibrated using a single standard calibration fluid. The fluid flow of a first fluid through a flow meter is measured by calculating a first pressure difference between pressures sensed by two pressure sensors of the flow meter. The fluid flow of a second fluid through the flow meter is measured by calculating a second pressure difference between pressures sensed by the same two pressure sensors. A calibration coefficient is determined based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for the first and second fluids. A relationship between the calibration coefficient and the kinematic viscosity of each fluid is then determined and stored.

Claims (34)

1. A method of calibrating a fluid flow device using a single standard calibration fluid, comprising:

providing a flow meter having first and second pressure sensors;

measuring the fluid flow of a first fluid through said flow meter by calculating a first pressure difference between the pressures sensed by said first and second pressure sensors;

measuring the fluid flow of a second fluid through said flow meter by calculating a second pressure difference between the pressures sensed by said first and second pressure sensors;

determining a calibration coefficient based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for said first and second fluids;

determining a relationship between said calibration coefficient and the kinematic viscosity of each said fluid; and

storing said relationship.

2. The method of claim 1 , further comprising comparing said stored relationship to the measured differential pressure of a third fluid and determining the flow rate of said third fluid based upon said comparison.

3. The method of claim 1 , further comprising correcting said relationship for temperature variations.

4. The method of claim 1 , further comprising controlling the fluid flow of the first fluid based on fuzzy logic rules.

5. The method of claim 4 , further comprising controlling the fluid flow of the second fluid based on fuzzy logic rules.

6. A method of calibrating a flow device comprising:

providing a flow meter having a first and second pressure sensors;

measuring the fluid flow of a first fluid through said flow meter by calculating a first pressure difference between the pressures sensed by said first and second pressure sensors;

measuring the fluid flow of a second fluid through said flow meter by calculating a second pressure difference between the pressure sensed by said first and second pressure sensors;

determining a calibration coefficient based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for said first and second fluids;

determining a relationship between said calibration coefficient and the kinematic viscosity of each said fluid;

storing said relationship.

7. The method of claim 6 , further comprising comparing said stored relationship to the measured differential pressure of a third fluid and determining the flow rate of said third fluid based on said comparison.

8. The method of claim 7 , further comprising regulating the flow of said third fluid based on fuzzy logic rules.

9. The method of claim 6 , further comprising correcting said relationship for temperature variations.

10. The method of claim 6 , further comprising controlling the fluid flow of the first fluid based on fuzzy logic rules.

11. The method of claim 10 , further comprising controlling the fluid flow of the second fluid based on fuzzy logic rules.

12. A method of calibrating a fluid flow device using a single standard calibration fluid, comprising:

measuring the fluid flow of a first fluid through a flow meter having first and second pressure sensors by calculating a first pressure difference between the pressures sensed by said first and second pressure sensors;

measuring the fluid flow of a second fluid through said flow meter by calculating a second pressure difference between the pressures sensed by said first and second pressure sensors;

determining a calibration coefficient based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for said first and second fluids;

determining a relationship between said calibration coefficient and the kinematic viscosity of each said fluid;

storing said relationship between said calibration coefficient and the kinematic viscosity of each said fluid;

comparing said stored relationship to the measured differential pressure of a third fluid; and

determining the flow rate of said third fluid based upon said comparison.

13. The method of claim 12 , further comprising correcting said relationship for temperature variations.

14. The method of claim 12 , further comprising controlling the fluid flow of the first fluid based on fuzzy logic rules.

15. The method of claim 14 , further comprising controlling the fluid flow of the second fluid based on fuzzy logic rules.

Assignments (12)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
CHANGE OF ADDRESS Recorded Sep 20, 2010
From: ENTEGRIS, INC.
To: ENTEGRIS, INC.
Reel/Frame 025017/0095 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
MERGER Recorded Jan 22, 2009
From: MYKROLIS CORPORATION
To: ENTEGRIS, INC.
Reel/Frame 022141/0057 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 21, 2009
From: WARGO, CHRISTOPHER; NIERMEYER, KARL J.; SHYU, JIEH-HWA; BRODEUR, CRAIG L.; BASSER, WILLIAM
To: MYKROLIS CORPORATION
Reel/Frame 022138/0977 →