Patent Application
Provisional
Small
App. No. 61/059,928
· Confirmation No. 3911
METHOD TO INCREASE YIELD AND REDUCE DOWN TIME IN SEMICONDUCTOR FABRICATION UNITS BY PRECONDITIONING COMPONENTS USING SUB-APERTURE REACTIVE ATOM ETCH
Inventor:
Wayne Hambek
Provisional Application Expired
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-06-24 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-06-09 | SPEC |
Specification | 14 | View | |
| 2008-06-09 | CLM |
Claims | 2 | View | |
| 2008-06-09 | ABST |
Abstract | 1 | View | |
| 2008-06-09 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2008-06-09 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-06-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2008-06-09 | ADS |
Application Data Sheet | 3 | View | |
| 2008-06-09 | TR.PROV |
Provisional Cover Sheet (SB16) | 2 | View |
Inventors
Wayne Hambek
Frisco, TX
Attorneys & Agents of Record
Prosecution
- Customer No.
- 35979
- Docket No.
- 068267.000196
- Confirmation No.
- 3911
Child
PCT
Claims priority from a provisional application
→
PCT/US2009/045897
Filed 2009-06-02
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 12/997,205
· US 8,721,906
Filed 2011-05-17
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 14/276,907
Filed 2014-05-13
· Abandoned -- Incomplete Application (Pre-examination)
RELEASE OF SECURITY INTEREST
Recorded 2011-08-17
from
ENTEGRIS, INC.
SECURITY AGREEMENT
Recorded 2009-03-09
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Quick Facts
- App. No.
- 61/059,928
- Filed
- 2008-06-09
External Links