Patent Assignment
Reel/Frame 025459/0368
Assignment of Assignor's Interest
Recorded: 2010-12-07
Pages: 3
Assignor
HAMBEK, WAYNE
Executed: 2010-12-06
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821-4600
Covered Property
(1)
Method to Increase Yield and Reduce Down Time in Semiconductor Fabrication Units by Preconditioning Components Using Sub-Aperture Reactive Atom Etch
Application:
61/059,928 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.