Patent Application
Provisional
App. No. 61/054,259
· Confirmation No. 9889
Electrostatic Chuck
Inventor:
Richard Cooke
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-06-05 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-05-19 | SPEC |
Specification | 20 | View | |
| 2008-05-19 | CLM |
Claims | 1 | View | |
| 2008-05-19 | ABST |
Abstract | 1 | View | |
| 2008-05-19 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2008-05-19 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2008-05-19 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-05-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Richard Cooke
Framingham, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29621
- Docket No.
- 200800034P
- Confirmation No.
- 9889
Child
Claims priority from a provisional application
→
App. 12/454,336
· US 9,543,187
Filed 2009-05-15
· Patented Case
Child
Claims priority from a provisional application
→
App. 15/294,950
· US 10,395,963
Filed 2016-10-17
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2009/003015
Filed 2009-05-15
· RO PROCESSING COMPLETED-PLACED IN STORAGE
RELEASE OF SECURITY INTEREST
Recorded 2011-08-17
from
ENTEGRIS, INC.
SECURITY AGREEMENT
Recorded 2009-03-09
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Quick Facts
- App. No.
- 61/054,259
- Filed
- 2008-05-19
External Links