IP Library Granted Patent US 8,172,546
Granted Patent B2
US 8,172,546 · App. 11/602,472 · Granted May 8, 2012

System and method for correcting for pressure variations using a motor

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Quick Facts
Patent No.
US 8,172,546
App. No.
11/602,472
Granted
May 8, 2012
Kind
B2
Abstract

Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber.

Claims (27)

1. A method for compensating for pressure in a pumping apparatus having a chamber, comprising

introducing a fluid into the chamber of the pumping apparatus; opening or closing a first valve of the pumping apparatus;

operating a motor to move a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase or a pressure decrease in the chamber caused by the opening or closing of the first valve;

opening a second valve in the chamber;

and dispensing the fluid from the chamber through the second valve.

2. The method of claim 1 , wherein the pressure increase is approximately proportional to a hold-back volume of the first valve.

3. The method of claim 2 , wherein the pumping means is moved to increase the volume of the chamber by an amount substantially equal to the hold-back volume of the first valve.

4. The method of claim 3 , further comprising moving the pumping means to dispense fluid from the chamber of the pumping apparatus.

5. The method of claim 3 , wherein the pumping means is moved to increase the volume of the chamber by approximately an overshoot volume and then moved to decrease the volume of the chamber by approximately the overshoot volume.

6. The method of claim 5 , further comprising moving the pumping means to dispense fluid from the pumping apparatus.

7. The method of claim 2 , wherein the pumping means is moved to increase the volume of the chamber until a desired pressure is achieved in the chamber.

8. The method of claim 7 , further comprising moving the pumping means to dispense fluid from the pumping apparatus.

9. The method of claim 7 , wherein the pumping means is moved to increase the volume of the chamber until a pressure below a desired pressure is achieved in the chamber and then moved to decrease the volume of the chamber until approximately the desired pressure is achieved.

10. The method of claim 9 , further comprising moving the pumping means to dispense fluid from the pumping apparatus.

11. A system, comprising a pumping apparatus comprising a feed chamber, a dispense chamber operable to receive fluid for dispense and a pumping means within the dispense chamber; and

a controller, configured to regulate the movement of the pumping means of the pumping apparatus such that:

when fluid is introduced into the dispense chamber of the pumping apparatus and a first valve of the pumping apparatus is opened or closed, a motor is operated to move the pumping means of the pumping apparatus to adjust the volume of the dispense chamber to compensate for a pressure increase or a pressure decrease in the dispense chamber caused by the opening or closing of the first valve;

when the volume is adjusted to compensate for the pressure increase or pressure decrease, a second valve is opened through which the fluid is dispensed from the chamber.

12. The system of claim 11 , wherein the pressure increase is approximately proportional to a hold-back volume of the first valve.

13. The system of claim 12 , wherein adjusting the volume of the dispense chamber comprises moving the pumping means to increase the volume of the dispense chamber by an amount substantially equal to the hold-back volume of the first valve.

14. The system of claim 13 , wherein the control system is further operable to regulate the movement of the pumping means to dispense fluid from the pumping apparatus.

15. The system of claim 13 , wherein adjusting the volume of the dispense chamber comprises moving the pumping means to increase the volume of the dispense chamber by approximately an overshoot volume and then moved to decrease the volume of the dispense chamber by approximately the overshoot volume.

16. The system of claim 15 , wherein the control system is further operable to regulate the movement of the pumping means to dispense fluid from the pumping apparatus.

17. The system of claim 12 , wherein adjusting the volume of the dispense chamber comprises moving the pumping means to increase the volume of the dispense chamber until a desired pressure is achieved in the chamber.

18. The system of claim 17 , wherein the control system is further operable to regulate the movement of the pumping means to dispense fluid from the pumping apparatus.

19. The system of claim 17 , wherein adjusting the volume of the dispense chamber comprises moving the pumping means to increase the volume of the dispense chamber until a pressure below a desired pressure is achieved in the chamber and then moved to decrease the volume of the dispense chamber until approximately the desired pressure is achieved.

20. The system of claim 19 , wherein the control system is further operable to regulate the movement of the pumping means to dispense fluid from the pumping apparatus.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
CHANGE OF ADDRESS Recorded Sep 20, 2010
From: ENTEGRIS, INC.
To: ENTEGRIS, INC.
Reel/Frame 025017/0095 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 16, 2007
From: CEDRONE, JAMES; GONNELLA, GEORGE; ZAGARS, RAYMOND A.; MCLOUGHLIN, ROBERT F.
To: ENTEGRIS, INC.
Reel/Frame 018805/0296 →