IP Library Granted Patent US 9,631,611
Granted Patent B2
US 9,631,611 · App. 11/948,585 · Granted Apr 25, 2017

System and method for operation of a pump

Inventors: Paul Magoon (Merrimack, NH); George Gonnella (Pepperell, MA); James Cedrone (Braintree, MA)
Assignee: Entegris, Inc.
F04B13/00F04B49/02F04B49/065
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Quick Facts
Patent No.
US 9,631,611
App. No.
11/948,585
Granted
Apr 25, 2017
Kind
B2
Abstract

Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. A value for a goodness of fit measure comparing the operating profile and baseline profile can be established. If the goodness of fit measure is insufficient, an alarm may be sent or another action taken, for example the pumping system may shut down, etc. An example goodness of fit measure is an R-squared measure.

Claims (36)

1. A system for monitoring operation of a pump, comprising: a multi-stage pump having a chamber, a barrier valve upstream to the chamber, and an outlet valve downstream from the chamber;

a pressure sensor coupled to the multi-stage pump to measure the pressure of a fluid within the chamber; and

a pump controller coupled to the multi-stage pump and the pressure sensor to control the pressure of the fluid at the pump, the pump controller operable to:

create an operating profile for a measured parameter of the pump associated with a recipe, wherein the recipe is one of a plurality of recipes stored in the controller, each recipe defining a sequence of operation of a plurality of valves or one or more motors of the multi-stage pump to dispense fluid from the multi-stage pump and each recipe of the plurality of recipes being associated with a baseline profile, and wherein the creation of the operating profile comprises recording a value of the parameter at each point of a set of points during the operation of the multi-stage pump when the multi-stage pump is operated according to the recipe;

compare the operating profile for the measured parameter associated with the recipe to the baseline profile for the parameter associated with the recipe to generate at least one goodness of fit measure for the operating profile that provides a statistical measure of how well the baseline profile predicts the operating profile, the at least one goodness of fit measure comprising an overall goodness of fit measure;

determine if the at least one goodness of fit measure for the operating profile is within a predetermined range; and

if the at least one goodness of fit measure is not within the predetermined range, generate an alarm.

2. The system of claim 1 , wherein the parameter comprises one or more of motor speed, motor current, or motor position.

3. The system of claim 1 , wherein the set of points comprises a set of points collected over a segment of the operation.

4. The system of claim 3 , wherein the controller is further operable to compare the value of the overall goodness of fit measure to an overall goodness of fit threshold.

5. The system of claim 1 , wherein the overall goodness of fit measure is an R-Squared measure.

6. The system of claim 1 , wherein the at least one goodness of fit measure comprises a goodness of fit measure for a portion of the operating profile.

7. The system of claim 6 , wherein the controller is further operable to compare the value of the goodness of fit measure for the portion of the operating profile to a goodness of fit threshold for that portion.

8. A method for monitoring operation of a multi-stage pump using a non-transitory, tangible computer readable medium storing a set of computer instructions, comprising:

establishing a baseline profile for a measured parameter of the multi-stage pump associated with a recipe, the multi-stage pump having a chamber, a barrier valve upstream to the chamber, and an outlet valve downstream from the chamber;

creating an operating profile for the measured parameter associated with the recipe, wherein the recipe is one of a plurality of recipes stored in the controller, each recipe defining a sequence of operation of a plurality of valves or one or more motors of the multi-stage pump to dispense fluid from the multi-stage pump and each recipe of the plurality of recipes being associated with a baseline profile, and wherein the creation of the operating profile comprises determining a value of the parameter at each point of a set of points during the operation of the multi-stage pump when the multi-stage pump is operated according to the recipe;

comparing the operating profile for the parameter associated with the recipe to the baseline profile for the parameter associated with the recipe to determine a value for at least one goodness of fit measure that provides a statistical measure of how well the baseline profile predicts the operating profile, the at least one goodness of fit measure comprising an overall goodness of fit measure;

determining if the at least one goodness of fit measure for the operating profile is within a predetermined range; and

if the at least one goodness of fit measure is not within the predetermined range, generating an alarm.

9. The method of claim 8 , wherein the parameter comprises one or more of motor speed, motor current, or motor position.

10. The method of claim 8 , wherein the set of points comprises a set of points collected over a segment of the operation.

11. The method of claim 8 , wherein the at least one goodness of fit measure comprises an R-squared measure.

12. The method of claim 11 , wherein the parameter comprises one or more of motor speed, motor current, or motor position.

13. The method of claim 8 , wherein the controller is further operable to compare the value of the overall goodness of fit measure to an overall goodness of fit threshold.

14. The method of claim 8 , wherein the at least one goodness of fit measure comprises a goodness of fit measure for a portion of the operating profile.

15. The method of claim 14 , wherein the controller is further operable to compare the value of the goodness of fit measure for the portion of the operating profile to a goodness of fit threshold for that portion.

16. A computer program product comprising a non-transitory, tangible computer readable medium storing a set of computer instructions, the computer instructions comprising instructions executable to:

establish a baseline profile for a measured parameter of a multi-stage pump associated with a recipe, the pump having a chamber, a barrier valve upstream to the chamber, and an outlet valve downstream from the chamber, wherein the recipe is one of a plurality of recipes stored in the controller, each recipe defining a sequence of operation of a plurality of valves or one or more motors of the multi-stage pump to dispense fluid from the multi-stage pump, wherein each recipe of the plurality of recipes is associated with a baseline profile;

create an operating profile based on one or more measurements corresponding to the parameter, the creating the operating profile comprising determining a value of the parameter at each point of a set of points during an operation of the multi-stage pump from a sensor, when the pump is operated according to the recipe;

compare the operating profile for the parameter associated with the recipe to the baseline profile for the parameter associated with the recipe to determine a value for at least one goodness of fit measure that provides a statistical measure how well the baseline profile predicts the operating profile, the at least one goodness of fit measure comprising an overall goodness of fit measure; and

determine if the at least one goodness of fit measure for the operating profile is within a predetermined range.

17. The computer program product of claim 16 , wherein the parameter comprises one or more of motor speed, motor current, or motor position.

18. The computer program product of claim 16 , wherein the at least one goodness of fit measure comprises an R-squared measure.

19. The computer program product of claim 18 , wherein the parameter comprises one or more of motor speed, motor current, or motor position.

20. The computer program product of claim 16 , wherein the at least one goodness of fit measure comprises a goodness of fit measure for a portion of the operating profile.

21. The computer program product of claim 20 , wherein the controller is further operable to compare the value of the goodness of fit measure for the portion of the operating profile to a goodness of fit threshold for that portion.

Assignments (11)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
CHANGE OF ADDRESS Recorded Sep 20, 2010
From: ENTEGRIS, INC.
To: ENTEGRIS, INC.
Reel/Frame 025017/0095 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 4, 2008
From: MAGOON, PAUL; GONNELLA, GEORGE; CEDRONE, JAMES
To: ENTEGRIS, INC.
Reel/Frame 020446/0321 →
Continuity (2)
Provisional Application 60861856 · Nov 30, 2006
Related Publication 20080131290A1 · Jun 5, 2008