IP Library Granted Patent US 7,862,646
Granted Patent B2
US 7,862,646 · App. 12/182,880 · Granted Jan 4, 2011

Nanoporous articles and methods of making same

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Quick Facts
Patent No.
US 7,862,646
App. No.
12/182,880
Granted
Jan 4, 2011
Kind
B2
Abstract

An adsorbent having porosity expanded by contact with a first agent effecting such expansion and a pressurized second agent effecting transport of the first agent into the porosity, wherein the adsorbent subsequent to removal of the first and second agents retains expanded porosity. The adsorbent can be made by an associated method in which materials such as water, ethers, alcohols, organic solvent media, or inorganic solvent media can be utilized as the first agent for swelling of the porosity, and helium, argon, krypton, xenon, neon, or other inert gases can be employed as the pressurized second agent for transport of both agents into the porosity of the adsorbent, subsequent to which the agents can be removed to yield an adsorbent of increased capacity for sorbable fluids, e.g., organometallic compounds, hydrides, halides and acid gases. Also described is a nanoporous carbon composite having porosity that is at least partially filled with material imparting to the composite an enhanced character with respect to characteristics selected from the group consisting of hardness, wear-resistance and toughness, as compared with the nanoporous carbon alone.

Claims (20)

1. An adsorbent having porosity expanded by contact with a first agent effecting such expansion and a pressurized second agent effecting transport of the first agent into said porosity, wherein the adsorbent subsequent to removal of said first and second agents retains expanded porosity.

2. The adsorbent of claim 1 , wherein the adsorbent has a loading capacity measured for boron trifluoride that is at least 35% higher than loading capacity of a corresponding adsorbent not contacted with said first and second agents.

3. The adsorbent of claim 1 , wherein the adsorbent has a loading capacity measured for boron trifluoride that is from 35% to 50% higher than loading capacity of a corresponding adsorbent not contacted with said first and second agents.

4. The adsorbent of claim 1 , comprising a carbon adsorbent.

5. The adsorbent of claim 4 , wherein said carbon adsorbent is in a bulk monolithic form.

6. The adsorbent of claim 4 , in the form of carbon discs in a stacked array in a fluid storage and dispensing vessel.

7. The adsorbent of claim 5 , having adsorbed thereon a fluid selected from the group consisting of organometallic compounds, hydrides, halides and acid gases.

8. The adsorbent of claim 1 , having increased loading capacity for a gas comprising a halide gas species, in relation to a corresponding adsorbent not contacted with the first and second agents.

9. The adsorbent of claim 8 , wherein said halide gas species is selected from the group consisting of boron trifluoride, diborane, boron trichloride, phosphorus trifluoride, arsenic pentafluoride, silicon tetrachloride, and germanium tetrafluoride.

10. The adsorbent of claim 8 , wherein said halide gas species is boron trifluoride.

11. The adsorbent of claim 1 , wherein said first and second agents have been removed at temperature below 350° C.

12. The adsorbent of claim 11 , wherein said first and second agents have been removed by vacuum and heating.

13. A method of increasing loading capacity of an adsorbent for a fluid, said method comprising (i) contacting the adsorbent with a first agent effecting expansion of porosity of said adsorbent, (ii) contacting the adsorbent contacted with the first agent, with a second agent under superatmospheric pressure conditions effecting transport of the first and second agents into said porosity, and (iii) removing said first and second agents from said adsorbent.

14. The method of claim 13 , wherein the first agent comprises a material selected from the group consisting of water, ethers, alcohols, organic solvent media, and inorganic solvent media.

15. The method of claim 13 , wherein the second agent comprises a material selected from the group consisting of helium, argon, krypton, xenon, neon, and inert gases.

16. The method of claim 13 , wherein the first and second agents are removed at temperature below 350° C.

17. The method of claim 13 , wherein the first and second agents are removed by vacuum and heating conditions.

18. The method of claim 13 , wherein: the adsorbent comprises a carbon adsorbent in a bulk monolithic form, having loading capacity measured for boron trifluoride that is at least 35% higher than loading capacity of a corresponding adsorbent not contacted with said first and second agents; the first agent comprises water; the second agent comprises helium; said pressure conditions comprise pressure in a range of 100 to 500 psi; and said removing comprises vacuum removal of the first and second agents, and heating the carbon adsorbent to temperature in a range of 100° C. to 300° C.

19. The method of claim 13 , wherein the adsorbent comprises a carbon adsorbent in a bulk monolithic form, having loading capacity measured for boron trifluoride that is at least 35% higher than loading capacity of a corresponding adsorbent not contacted with said first and second agents.

20. The method of claim 13 , wherein the first agent comprises water; the second agent comprises helium; said pressure conditions comprise pressure in a range of 100 to 500 psi; and said removing comprises vacuum removal of the first and second agents, and heating the carbon adsorbent to temperature in a range of 100° C. to 300° C.

Assignments (9)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 4, 2015
From: ADVANCED TECHNOLOGY MATERIALS, INC.
To: ENTEGRIS, INC.
Reel/Frame 034894/0025 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 20, 2008
From: CARRUTHERS, J. DONALD; DIMEO, FRANK (JR.); BOBITA, BRIAN
To: ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 021420/0267 →