IP Library › Granted Patent US 6,391,090
Granted Patent Utility
US 6,391,090 · Confirmation No. 9521

Method for purification of lens gases used in photolithography

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 Code Description Pages PDF
2008-04-15 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-04-15 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-04-10 PA.. Power of Attorney 1 View
2008-04-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-04-02 TRNA Transmittal of New Application 2 View
2001-04-02 SPEC Specification 22 View
2001-04-02 CLM Claims 6 View
2001-04-02 ABST Abstract 1 View
2001-04-02 DRW Drawings-only black and white line drawings 2 View
2001-04-02 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,391,090
App. No.
09/824,382
Filed
2001-04-02
Granted
2002-05-21
Art Unit
1724
PTA
-95 days