IP Library › Granted Patent US 6,645,898
Granted Patent Utility
US 6,645,898 · Confirmation No. 7968

METHOD FOR PURIFICATION OF LENS GASES USED IN PHOTOLITHOGRAPHY

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 Code Description Pages PDF
2008-04-15 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-04-15 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-04-10 PA.. Power of Attorney 1 View
2008-04-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2003-08-25 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-08-25 LET. Miscellaneous Incoming Letter 2 View
2002-02-19 TRNA Transmittal of New Application 2 View
2002-02-19 A.PE Preliminary Amendment 5 View
2002-02-19 SPEC Specification 22 View
2002-02-19 CLM Claims 6 View
2002-02-19 ABST Abstract 1 View
2002-02-19 DRW Drawings-only black and white line drawings 1 View
2002-02-19 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,645,898
App. No.
10/078,716
Filed
2002-02-19
Granted
2003-11-11
Pub. No.
US20020139247A1
Art Unit
1725
PTA
0 days