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App. No. 11/147,563 · Confirmation No. 6850

Method for purification of lens gases used in photolithography

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2006-12-01 ABN Abandonment 2 View
2006-04-07 CTNF Non-Final Rejection 4 View
2006-04-07 1449 List of References cited by applicant and considered by examiner 3 View
2006-04-07 BIB Bibliographic Data Sheet 2 View
2006-04-07 SRFW Search information including classification, databases and other search related notes 1 View
2006-04-03 SRNT Examiner's search strategy and results 2 View
2005-06-08 TRNA Transmittal of New Application 4 View
2005-06-08 SPEC Specification 23 View
2005-06-08 CLM Claims 2 View
2005-06-08 ABST Abstract 1 View
2005-06-08 DRW Drawings-only black and white line drawings 1 View
2005-06-08 OATH Oath or Declaration filed 5 View
2005-06-08 WFEE Fee Worksheet (SB06) 1 View
2005-06-08 WFEE Fee Worksheet (SB06) 1 View
2005-06-08 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2005-06-08 FOR Foreign Reference 30 View
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Quick Facts
App. No.
11/147,563
Filed
2005-06-08
Pub. No.
US20050229783A1
Art Unit
1724