Patent Application
Utility
App. No. 14/827,783
· Confirmation No. 8455
ION IMPLANTATION SYSTEM AND METHOD
Inventors:
Edward E. Jones, Sharad N. Yedave, Ying Tang, Barry Lewis Chambers, Robert Kaim, Joseph D. Sweeney, Oleg Byl, Peng Zou
Applicant:
Entegris, Inc.
Abandoned -- Failure to Respond to an Office Action
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| 2019-06-13 | ABN |
Abandonment | 2 | View | |
| 2018-12-01 | OA.POSTCARD |
A courtesy postcard sent by USPTO to users who opt-in for e-Office Action | 1 | View | |
| 2018-11-23 | CTNF |
Non-Final Rejection | 7 | View | |
| 2018-11-23 | 892 |
List of references cited by examiner | 1 | View | |
| 2018-11-23 | OA.APPENDIX |
Office Action Appendix | 1 | View | |
| 2018-11-23 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2018-11-23 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2018-11-23 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2018-09-06 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2018-09-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2018-09-06 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2018-09-06 | A.NE |
Response After Final Action | 1 | View | |
| 2018-09-06 | CLM |
Claims | 3 | View | |
| 2018-09-06 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2018-09-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2018-09-06 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2018-07-27 | CTFR |
Final Rejection | 9 | View | |
| 2018-07-27 | 892 |
List of references cited by examiner | 1 | View | |
| 2018-07-27 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2018-07-27 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2018-04-03 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2018-04-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2018-04-03 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2018-04-03 | CLM |
Claims | 3 | View | |
| 2018-04-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2018-01-19 | OA.POSTCARD |
A courtesy postcard sent by USPTO to users who opt-in for e-Office Action | 1 | View | |
| 2018-01-11 | CTNF |
Non-Final Rejection | 7 | View | |
| 2018-01-11 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2018-01-11 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2018-01-11 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2018-01-11 | FWCLM |
Index of Claims | 1 | View | |
| 2018-01-10 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2018-01-10 | FOR |
Foreign Reference | 52 | View | |
| 2018-01-10 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2017-12-06 | RCEX |
Request for Continued Examination (RCE) | 2 | View | |
| 2017-12-06 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2017-12-06 | CLM |
Claims | 2 | View | |
| 2017-12-06 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2017-12-06 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-12-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2017-12-06 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2017-12-06 | FOR |
Foreign Reference | 30 | View | |
| 2017-12-06 | FOR |
Foreign Reference | 50 | View | |
| 2017-12-06 | FOR |
Foreign Reference | 19 | View | |
| 2017-12-06 | FOR |
Foreign Reference | 3 | View | |
| 2017-12-06 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2017-10-14 | OA.POSTCARD |
A courtesy postcard sent by USPTO to users who opt-in for e-Office Action | 1 | View | |
| 2017-10-06 | CTFR |
Final Rejection | 12 | View | |
| 2017-10-06 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2017-10-06 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2017-10-06 | FWCLM |
Index of Claims | 1 | View | |
| 2017-06-27 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2017-06-27 | CLM |
Claims | 3 | View | |
| 2017-06-27 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2017-06-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2017-06-27 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2017-04-11 | CTNF |
Non-Final Rejection | 11 | View | |
| 2017-04-11 | 892 |
List of references cited by examiner | 1 | View | |
| 2017-04-11 | FWCLM |
Index of Claims | 1 | View | |
| 2017-04-11 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2017-04-11 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2017-01-19 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2016-12-06 | RCEX |
Request for Continued Examination (RCE) | 2 | View | |
| 2016-12-06 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2016-12-06 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-12-06 | PET.DEC.AUTO |
ePetition Grant Letter | 1 | View | |
| 2016-12-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2016-12-06 | PET.AUTO |
ePetition Request Form | 2 | View | |
| 2016-12-06 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-12-06 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-11-18 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2016-11-18 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-11-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-09-09 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2016-09-09 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2016-09-06 | PA.. |
Power of Attorney | 2 | View | |
| 2016-09-06 | C.AD |
Change of Address | 2 | View | |
| 2016-09-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-09-06 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 4 | View | |
| 2016-08-26 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 7 | View | |
| 2016-08-26 | 1449 |
List of References cited by applicant and considered by examiner | 4 | View | |
| 2016-08-26 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 3 | View | |
| 2016-08-26 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2016-08-26 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2016-08-02 | RCEX |
Request for Continued Examination (RCE) | 3 | View | |
| 2016-08-02 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2016-08-02 | FOR |
Foreign Reference | 30 | View | |
| 2016-08-02 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-08-02 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2016-08-02 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-06-06 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 7 | View | |
| 2016-06-06 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2016-06-06 | FWCLM |
Index of Claims | 1 | View | |
| 2016-06-06 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 3 | View | |
| 2016-06-06 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2016-05-09 | DIST.E.FILE |
Terminal Disclaimer-Filed (Electronic) | 2 | View | |
| 2016-05-09 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-05-09 | DISQ.E.FILE |
Terminal Disclaimer-Electronic-Approved | 1 | View | |
| 2016-05-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-05-09 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2016-05-09 | CLM |
Claims | 4 | View | |
| 2016-05-09 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2016-05-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-05-09 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-04-28 | CTNF |
Non-Final Rejection | 6 | View | |
| 2016-04-28 | 892 |
List of references cited by examiner | 1 | View | |
| 2016-04-28 | FWCLM |
Index of Claims | 1 | View | |
| 2016-04-28 | 1449 |
List of References cited by applicant and considered by examiner | 4 | View | |
| 2016-04-28 | SRNT |
Examiner's search strategy and results | 6 | View | |
| 2016-04-28 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2016-04-28 | 1449 |
List of References cited by applicant and considered by examiner | 4 | View | |
| 2016-04-28 | 1449 |
List of References cited by applicant and considered by examiner | 12 | View | |
| 2016-04-28 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2016-01-15 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2016-01-15 | FOR |
Foreign Reference | 27 | View | |
| 2016-01-15 | FOR |
Foreign Reference | 1 | View | |
| 2016-01-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2015-12-11 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2015-12-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2015-12-10 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2015-11-04 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 12 | View | |
| 2015-11-04 | FOR |
Foreign Reference | 30 | View | |
| 2015-11-04 | FOR |
Foreign Reference | 1 | View | |
| 2015-11-04 | FOR |
Foreign Reference | 49 | View | |
| 2015-11-04 | FOR |
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| 2015-11-04 | FOR |
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| 2015-11-04 | FOR |
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| 2015-11-04 | FOR |
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| 2015-11-04 | FOR |
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| 2015-11-04 | FOR |
Foreign Reference | 62 | View | |
| 2015-11-04 | FOR |
Foreign Reference | 22 | View | |
| 2015-11-04 | FOR |
Foreign Reference | 37 | View | |
| 2015-11-04 | N417 |
Electronic Filing System Acknowledgment Receipt | 7 | View | |
| 2015-10-05 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2015-10-05 | OATH |
Oath or Declaration filed | 8 | View | |
| 2015-09-15 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2015-09-02 | CFILE |
Request for Corrected Filing Receipt | 4 | View | |
| 2015-09-01 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2015-09-01 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2015-08-17 | TRNA |
Transmittal of New Application | 1 | View | |
| 2015-08-17 | ADS |
Application Data Sheet | 9 | View | |
| 2015-08-17 | PA.. |
Power of Attorney | 1 | View | |
| 2015-08-17 | PA.. |
Power of Attorney | 1 | View | |
| 2015-08-17 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 2 | View | |
| 2015-08-17 | OATH |
Oath or Declaration filed | 8 | View | |
| 2015-08-17 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2015-08-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2015-08-17 | SPEC |
Specification | 26 | View | |
| 2015-08-17 | CLM |
Claims | 3 | View | |
| 2015-08-17 | ABST |
Abstract | 1 | View | |
| 2015-08-17 | DRW |
Drawings-only black and white line drawings | 9 | View |
Inventors
Edward E. Jones
Woodbury, CT
Sharad N. Yedave
Danbury, CT
Ying Tang
Brookfield, CT
Barry Lewis Chambers
Midlothian, VA
Robert Kaim
Brookline, MA
Joseph D. Sweeney
New Milford, CT
Oleg Byl
Southbury, CT
Peng Zou
Ridgefield, CT
Attorneys & Agents of Record
Classification
USPC
438/514
H10P30/20
H01J37/08
H01J37/3171
C23C14/48
C23C14/52
H01J37/32055
H01J37/32412
H01J37/32449
H01J2237/006
H01J2237/022
Prosecution
- Examiner
- QUINTO, KEVIN V
- Art Unit
- 2817
- Customer No.
- 29621
- Docket No.
- 201000956 US3
- Confirmation No.
- 8455
Publication
- Pub. No.
- US20150357152A1
- Pub. Date
- 2015-12-10
Parent
is a Continuation of
→
App. 14/452,192
· US 9,111,860
Filed 2014-08-05
· Patented Case
Parent
is a Continuation of
→
App. 13/502,855
· US 8,796,131
Filed 2012-06-19
· Patented Case
Parent
PCT
is a National Stage Entry of
→
PCT/US2010/053977
Filed 2010-10-25
· Abandoned -- Failure to Respond to an Office Action
Parent
Claims priority from a provisional application
→
App. 61/255,097
Filed 2009-10-27
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 61/358,514
Filed 2010-06-25
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 61/349,202
Filed 2010-05-27
· Provisional Application Expired
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679
Recorded 2019-11-05
SECURITY INTEREST
Recorded 2018-11-13
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Quick Facts
- App. No.
- 14/827,783
- Filed
- 2015-08-17
- Pub. No.
- US20150357152A1
- Examiner
- QUINTO, KEVIN V
- Art Unit
- 2817
External Links