Granted Patent
Utility
US 6,617,175 · App. 10/140,848
Infrared thermopile detector system for semiconductor process monitoring and control
Inventor:
Jose I. Arno
Patented Case
View Patent ↗
Granted: Sep 9, 2003
Filed: May 8, 2002
Inventor
Jose I. Arno
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.