Granted Patent
Utility
US 6,723,691
· Confirmation No. 5145
POST CHEMICAL-MECHANICAL PLANARIZATION (CMP) CLEANING COMPOSITION
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2007-08-15 | PA.. |
Power of Attorney | 1 | View | |
| 2007-08-15 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2007-08-15 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 1 | View | |
| 2007-08-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2003-12-10 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2003-12-10 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2003-12-10 | DRW |
Drawings-only black and white line drawings | 16 | View | |
| 2003-11-26 | A.NA |
Amendment after Notice of Allowance (Rule 312) | 1 | View | |
| 2003-11-26 | CLM |
Claims | 2 | View | |
| 2003-11-26 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2003-11-26 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-11-14 | PA.. |
Power of Attorney | 1 | View | |
| 2003-11-14 | OATH |
Oath or Declaration filed | 7 | View | |
| 2003-11-14 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2001-02-12 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-02-12 | SPEC |
Specification | 19 | View | |
| 2001-02-12 | CLM |
Claims | 3 | View | |
| 2001-02-12 | ABST |
Abstract | 1 | View | |
| 2001-02-12 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2001-02-12 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
510/175
H10P70/277
C11D2111/22
H10P70/234
C11D1/62
C11D3/0073
C11D3/28
C11D3/30
C11D7/261
C11D7/265
C11D7/3209
C11D7/3218
C11D7/3245
C11D7/3254
C23G1/20
G03F7/425
Prosecution
- Examiner
- DELCOTTO, GREGORY R
- Art Unit
- 1751
- Docket No.
- ESCI-103US
- Confirmation No.
- 5145
Publication
- Pub. No.
- US20010004633A1
- Pub. Date
- 2001-06-21
Patent Term Adjustment
-326days
Parent
is a Continuation in-part of
→
App. 09/587,883
· US 6,492,308
Filed 2000-06-06
· Patented Case
Parent
is a Continuation in-part of
→
App. 09/440,917
· US 6,194,366
Filed 1999-11-16
· Patented Case
Child
PCT
is a Continuation of
→
PCT/US2002/003422
Filed 2002-02-06
· RO PROCESSING COMPLETED-PLACED IN STORAGE
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679
Recorded 2019-11-05
SECURITY INTEREST
Recorded 2018-11-13
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-12-19
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
TERMINATION/RELEASE OF SECURITY INTEREST
Recorded 2008-03-14
from
ESC, INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-11-14
from
ESC, INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-10-24
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-02-12
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Quick Facts
- Patent No.
- US 6,723,691
- App. No.
- 09/781,859
- Filed
- 2001-02-12
- Granted
- 2004-04-20
- Pub. No.
- US20010004633A1
- Examiner
- DELCOTTO, GREGORY R
- Art Unit
- 1751
- PTA
- -326 days
External Links