IP Library › Granted Patent US 8,455,049
Granted Patent B2
US 8,455,049 · App. 12/672,684 · Granted Jun 4, 2013

Strontium precursor for use in chemical vapor deposition, atomic layer deposition and rapid vapor deposition

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Quick Facts
Patent No.
US 8,455,049
App. No.
12/672,684
Granted
Jun 4, 2013
Kind
B2
Abstract

A method of depositing a crystalline strontium titanate film on a substrate is provided, comprising carrying out an atomic layer deposition (ALD) process with strontium and titanium precursors, wherein the strontium precursor is bis(n-propyltetramethylcyclopentadienyl)strontium.

Claims (6)

1. A method of depositing a strontium titanate film on a substrate, comprising carrying out an atomic layer deposition (ALD) process with strontium and titanium precursors, wherein the strontium precursor is bis(n-propyltetramethylcyclopentadienyl)strontium.

2. The method of claim 1 , wherein the precursor is dissolved in a solvent medium.

3. The method of claim 2 , wherein the solvent in the solvent medium is a single-component solvent or a multicomponent solvent mixture.

4. The method of claim 3 , wherein the solvent medium is selected from the group consisting of C 3 -C 12 alkanes, C 2 -C 12 ethers, C 6 -C 12 aromatics, C 7 -C 16 arylalkanes, C 10 -C 25 arylcyloalkanes, and further alkyl-substituted forms of the aromatic, arylalkane and arylcyloalkane species, wherein the further alkyl

substituents in the case of multiple alkyl substituents may be the same as or different from one another and wherein each is independently selected from C 1 -C 8 alkyl.

5. The method of claim 1 , wherein the precursor is in liquid form and is vaporized for vapor delivery in the atomic layer deposition process.

Assignments (9)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 9, 2021
From: ENTEGRIS, INC.
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 056803/0565 →
RELEASE OF SECURITY INTEREST Recorded Jun 15, 2021
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: ENTEGRIS, INC.
Reel/Frame 056550/0726 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 26, 2010
From: CAMERON, THOMAS M.; XU, CHONGYING
To: ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 024743/0796 →