Patent Assignment
Reel/Frame 056550/0726
Release of Security Interest
Recorded: 2021-06-15
Pages: 6
Assignor
MORGAN STANLEY SENIOR FUNDING, INC.
Executed: 2021-06-14
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Properties
(10)
Strontium Precursor for Use in Chemical Vapor Deposition, Atomic Layer Deposition and Rapid Vapor Deposition
Non-Amine Post-Cmp Composition and Method of Use
Germanium Antimony Telluride Materials and Devices Incorporating Same
Germanium Antimony Telluride Materials and Devices Incorporating Same
DOPING OF ZrO2 FOR DRAM APPLICATIONS
Tellurium Compounds Useful for Deposition of Tellurium Containing Materials
Non-Amine Post-Cmp Composition and Method of Use
Tellurium Compounds Useful for Deposition of Tellurium Containing Materials
Etching Agent for Copper or Copper Alloy
Etching Agent for Copper or Copper Alloy
Related Assignments
(10)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 4, 2015
From: ADVANCED TECHNOLOGY MATERIALS, INC.
To: ENTEGRIS, INC.
Reel/Frame 034894/0025 →
Assignment of Assignor's Interest
Dec 19, 2016
From: ADVANCED TECHNOLOGY MATERIALS, INC.
To: ENTEGRIS, INC.
Reel/Frame 041029/0903 →
Security Interest
May 15, 2017
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 042375/0769 →
Security Interest
May 15, 2017
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 042375/0740 →
Release of Security Interest
Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.
Reel/Frame 047477/0032 →
Release of Security Interest
Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.
Reel/Frame 047477/0151 →
Security Interest
Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
Assignment of Patent Security Interest Recorded at Reel/Frame 048811/0679
Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
Assignment of Assignor's Interest
Jun 28, 2021
From: ENTEGRIS, INC.
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 056686/0538 →
Assignment of Assignor's Interest
Jul 9, 2021
From: ENTEGRIS, INC.
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 056803/0565 →