IP Library Granted Patent US 8,015,995
Granted Patent B2
US 8,015,995 · App. 12/777,019 · Granted Sep 13, 2011

System and method for flow monitoring and control

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Quick Facts
Patent No.
US 8,015,995
App. No.
12/777,019
Granted
Sep 13, 2011
Kind
B2
Abstract

One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.

Claims (66)

1. A flow control device comprising:

a housing;

an inlet for receiving a flow into the flow control device;

an outlet in fluid communication with the inlet for directing the flow out of the flow control device to components of a flow system;

a valve located in the housing and between the inlet and the outlet and responsive to valve control signals for regulating the flow through the flow control device;

a pressure sensor to measure a pressure of a fluid entering the flow control device at the inlet, passing the valve, and exiting the flow control device at the outlet along a single flow path, wherein the pressure sensor is the only sensor in the housing of the flow control device and wherein the flow control device is calibrated at installation; and

a controller coupled to the pressure sensor, the controller configured to:

determine a flow rate corresponding primarily to a pressure measured at the pressure sensor by comparing the pressure measured at the pressure sensor to a calibration curve of flow rates, the calibration curve correlating a sensed pressure at the pressure sensor and a corresponding flow rate in the flow system in which the flow device is installed, and

generate a valve control signal responsive to the pressure measured at the pressure sensor to regulate the flow.

2. The flow control device of claim 1 , wherein the pressure sensor is located upstream of the valve.

3. The flow control device of claim 1 , wherein the pressure sensor is located downstream of the valve.

4. The flow control device of claim 1 , wherein the controller is further operable to:

receive pressure measurements from the pressure sensor;

monitor the pressure measurements for a fluctuation;

compare the fluctuation to a predetermined limit; and

if the fluctuation is greater than the predetermined limit, generate an alarm.

5. The flow control device of claim 1 , wherein the controller is further operable to:

monitor the valve for a change in valve position; and

if the change in valve position is greater than a predetermined amount, generate an alarm.

6. The flow control device of claim 1 , wherein the controller is further configured to:

compare the determined flow rate to a set point, and

if the determined flow rate does not equal the set point, generate an error gain based on the pressure measured at the pressure sensor.

7. The flow control device of claim 1 , wherein the calibration curve of flow rates is stored in a memory of the controller or a computer readable medium accessible by the controller.

8. A flow control device comprising:

an inlet for receiving a flow into the flow control device;

an outlet in fluid communication with the inlet for directing the flow out of the flow control device to a flow system which, when in fluid communication with the flow control device, causes a pressure loss associated with the flow;

a valve located between the inlet and the outlet and responsive to valve control signals for regulating the flow to the flow control device;

a pressure sensor to measure a pressure of a fluid in the flow control device; and

a controller coupled to the pressure sensor, the controller configured to:

determine a flow rate corresponding primarily to a pressure measured at the pressure sensor by comparing the pressure measured at the pressure sensor to a calibration curve of flow rates, the calibration curve correlating a sensed pressure at the pressure sensor and a corresponding flow rate in the flow system in which the flow device is installed, taking into consideration the pressure loss caused by the flow system, and

generate a valve control signal responsive to the pressure measured at the pressure sensor to regulate the flow.

9. The flow control device of claim 8 , wherein the pressure sensor is located upstream of the valve.

10. The flow control device of claim 8 , wherein the pressure sensor is located downstream of the valve.

11. The flow control device of claim 8 , wherein the controller is further operable to:

receive pressure measurements from the pressure sensor;

monitor the pressure measurements for a fluctuation;

compare the fluctuation to a predetermined limit; and

if the fluctuation is greater than the predetermined limit, generate an alarm.

12. The flow control device of claim 8 , wherein the controller is further operable to:

monitor the valve for a change in valve position; and

if the change in valve position is greater than a predetermined amount, generate an alarm.

13. The flow control device of claim 8 , wherein the controller is further configured to:

compare the determined flow rate to a set point, and

if the determined flow rate does not equal the set point, generate an error gain based on the pressure measured at the pressure sensor.

14. The flow control device of claim 8 , wherein the calibration curve of flow rates is stored in a memory of the controller or a computer readable medium accessible by the controller.

15. A computer program product comprising at least one non-transitory computer readable medium storing instructions translatable by a controller of a flow control device, wherein the flow control device further comprises:

an inlet for receiving a flow into the flow control device;

an outlet in fluid communication with the inlet for directing the flow out of the flow control device to components of a flow system;

a valve located in the housing and between the inlet and the outlet and responsive to valve control signals for regulating the flow through the flow control device; and

a pressure sensor to measure a pressure of a fluid entering the flow control device at the inlet, passing the valve, and exiting the flow control device at the outlet along a single flow path;

wherein the instructions are translatable by the controller to:

determine a flow rate corresponding primarily to a pressure measured at the pressure sensor by comparing the pressure measured at the pressure sensor to a calibration curve of flow rates, the calibration curve correlating a sensed pressure at the pressure sensor and a corresponding flow rate in the flow system in which the flow device is installed, and

generate a valve control signal responsive to the pressure measured at the pressure sensor to regulate the flow.

16. The computer program product of claim 15 , wherein the instructions are further translatable by the controller to:

receive pressure measurements from the pressure sensor;

monitor the pressure measurements for a fluctuation;

compare the fluctuation to a predetermined limit; and

if the fluctuation is greater than the predetermined limit, generate an alarm.

17. The computer program product of claim 15 , wherein the instructions are further translatable by the controller to:

monitor the valve for a change in valve position; and

if the change in valve position is greater than a predetermined amount, generate an alarm.

18. The computer program product of claim 15 , wherein the instructions are further translatable by the controller to:

compare the determined flow rate to a set point, and

if the determined flow rate does not equal the set point, generate an error gain based on the pressure measured at the pressure sensor.

19. The computer program product of claim 15 , wherein the at least one non-transitory computer readable medium comprises a memory and wherein the calibration curve of flow rates is stored in the memory.

20. The computer program product of claim 19 , wherein the memory is accessible by the controller.

Assignments (11)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
CORRECTION OF REEL 024500 FRAME 0432 BY DECLARATION Recorded Aug 9, 2013
From: ENTEGRIS, INC.
To: ENTEGRIS INC.
Reel/Frame 031122/0714 →
MERGER Recorded Jun 16, 2010
From: MYKROLIS CORPORATION
To: ENTEGRIS INC.
Reel/Frame 024542/0408 →
CONFIRMATORY LICENSE Recorded Jun 8, 2010
From: UNIVERSITY OF IOWA
To: NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF HEALTH AND HUMAN SERVICES (DHHS), U.S. GOVERNMENT
Reel/Frame 024500/0432 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 8, 2010
From: BRODEUR, CRAIG L.; LAVERDIERE, MARC; MCLOUGHLIN, ROBERT R.; NIERMEYER, J. KARL; SHYU, JIEH-HWA
To: MYKROLIS CORPORATION
Reel/Frame 024504/0923 →