Granted Patent
Utility
US 6,821,795
· Confirmation No. 3977
INFRARED THERMOPILE DETECTOR SYSTEM FOR SEMICONDUCTOR PROCESS MONITORING AND CONTROL
Inventor:
Jose Arno
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-10-28 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2004-10-13 | IFEE |
Issue Fee Payment (PTO-85B) | 4 | View | |
| 2004-07-20 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-07-20 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-07-20 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-07-20 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-07-20 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-07-20 | FWCLM |
Index of Claims | 1 | View | |
| 2004-07-20 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-07-13 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2004-07-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-06-28 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2004-06-28 | CLM |
Claims | 7 | View | |
| 2004-06-28 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2004-06-28 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2004-06-14 | CTRS |
Requirement for Restriction/Election | 4 | View | |
| 2004-06-14 | FWCLM |
Index of Claims | 1 | View | |
| 2003-12-09 | TRNA |
Transmittal of New Application | 2 | View | |
| 2003-12-09 | SPEC |
Specification | 23 | View | |
| 2003-12-09 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2003-12-09 | OATH |
Oath or Declaration filed | 6 | View | |
| 2003-12-09 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2003-12-09 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-12-09 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-12-09 | CLM |
Claims | 9 | View | |
| 2003-12-09 | ABST |
Abstract | 1 | View |
Inventors
Jose Arno
Brookfield, CT
Attorneys & Agents of Record
Classification
USPC
438/14
H10P74/00
G01N21/3504
Y10T483/16
H10P72/0604
G01J5/0007
G01J5/0014
G01J5/025
G01J5/12
Prosecution
- Examiner
- LUK, OLIVIA T
- Art Unit
- 2812
- Customer No.
- 25559
- Docket No.
- ATMI 567-DIV-CON-2
- Confirmation No.
- 3977
Publication
- Pub. No.
- US20040121494A1
- Pub. Date
- 2004-06-24
Patent Term Adjustment
0days
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679
Recorded 2019-11-05
SECURITY INTEREST
Recorded 2018-11-13
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-02-04
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
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Quick Facts
- Patent No.
- US 6,821,795
- App. No.
- 10/731,763
- Filed
- 2003-12-09
- Granted
- 2004-11-23
- Pub. No.
- US20040121494A1
- Examiner
- LUK, OLIVIA T
- Art Unit
- 2812
- PTA
- 0 days
External Links