IP Library › Patent Application 14347170
Patent Application Utility PCT National Stage
App. No. 14/347,170 · Confirmation No. 1586

POST-CMP CLEANING APPARATUS AND METHOD

Inventor: Chintan Patel
Applicant: ENTEGRIS, INC.
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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Quick Facts
App. No.
14/347,170
Filed
2014-03-25
Pub. No.
US20140230170A1
Art Unit
3723