IP Library › Patent Application 61539342
Patent Application Provisional
App. No. 61/539,342 · Confirmation No. 6785

POST-CMP CLEANING APPARATUS AND METHOD

Inventor: Chintan PATEL
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2012-06-28 APP.FILE.REC Filing Receipt 3 View
2011-10-04 NTC.OMIT.APP Notice of Omitted Items Application 2 View
2011-10-04 APP.FILE.REC Filing Receipt 3 View
2011-09-26 ADS Application Data Sheet 4 View
2011-09-26 SPEC Specification 18 View
2011-09-26 CLM Claims 1 View
2011-09-26 ABST Abstract 1 View
2011-09-26 DRW Drawings-only black and white line drawings 11 View
2011-09-26 WFEE Fee Worksheet (SB06) 2 View
2011-09-26 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/539,342
Filed
2011-09-26