Patent Assignment
Reel/Frame 027283/0426
Assignment of Assignor's Interest
Recorded: 2011-11-28
Pages: 3
Assignor
PATEL, CHINTAN
Executed: 2011-11-22
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Post-Cmp Cleaning Apparatus and Method
Application:
61/539,342 →