Granted Patent B2

US 8,919,563 · App. 13/847,345 · Granted Dec 30, 2014

Abstract

Claims (16)

1. A front opening semiconductor wafer container for receiving a plurality of large diameter circular wafers positioned in a stacked army with a vertical axis, the container comprising:

a container portion having a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers centrally positioned within the open interior;

a door attachable to the container portion to close the open front and selectively latchable to the container portion;

the container portion comprising a pair of columns of interconnected wafer supports vertically aligned in the open interior, one of said pair proximate the left side and one proximate the right side, each of said pair having a radially inward margin with an arcuate shape to follow the circular shape of the wafers for providing peripheral support to the wafers, the arcuate shape of the radially inward margin of each of said pair of columns extending around to the open front side to a most inwardly and forward vertical stack of support tips whereby the opening between the respective vertical stacks of support tips measured with respect to the axis of the array of stacked wafers is between 85 to 110 degrees,

wherein the interconnected wafer supports include a plurality of arcuate lateral wafer shelves that define a plurality of V-shaped wafer slots therebetween, the V-shaped wafer slots at least partially defining the plurality of slots, each of the plurality of slots defining a transport position wherein the respective wafer is seated at an apex of the respective V-shaped wafer slot.

2. The container of claim 1 , wherein each of said pair of columns is a unitarily molded structure comprising an arcuate portion that follows the peripheral edges of the circular wafers, with a forward end, and further comprising a support leg extending from the forward end at an acute angle with respect, to the arcuate portion toward the respective side.

3. The front opening semiconductor wafer container of claim 1 wherein each of the interconnected wafer supports that extend more than 85 degrees around the periphery of the respective wafer engaged by the wafer support.

4. The front opening semiconductor wafer container of claim 1 in combination with an end effector configured for engaging the: rear periphery of the wafer at positions defining an arc 80 to 90 degrees and for engaging the front periphery of the wafer at positions defining an arc of 80 to 90 degrees.

5. The front opening semiconductor wafer container of claim 1 , wherein the plurality of slots are further defined by a plurality of V-shaped supports, wherein the wafers are engaged in apexes of the V-shaped supports when in the transport position, and wherein each slot of the plurality of slots has a transfer position when the wafers are resting on the shelves, such that in the transfer position each wafer is supported on a pair of the lateral arcuate wafer shelves, one of said pair on each side of the wafer container, each of said shelves providing engagement of at least about 90 degrees on the periphery of the wafer and wherein the wafer container has an access opening defined intermediate the lateral arcuate wafer supports for receiving a robotic arm for conveying the wafers in and out of the wafer container and providing a robotic engagement access to the front edge of the wafer of 88 to 105 degrees, and wherein when the wafers are in said transfer position in said slots, the wafers are unsupported at least two positions in the rear of the wafer container portion, the two positions spread at least about 70 degrees around the periphery of the wafer.

6. The front opening semiconductor wafer container of claim 5 , wherein each V-shaped wafer slot defines a first apex angle and each V-shaped support defines a second apex angle, the first apex angle being greater than the second apex angle.

7. The container of claim 1 , wherein the opening between the respective vertical stack of support tips measured with respect to the axis of the array of stacked wafers is between 88 to 105 degrees.

8. A front opening semiconductor wafer container for large diameter 450 mm wafers, comprising:

a container portion having a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers;

a door attachable to the container portion to close the open front and selectively latchable to the container portion;

the container portion comprising a pair of columns of interconnected wafer supports vertically aligned in the open interior, one of said pair proximate the left side and one proximate the right side, each of said pair having a radially inward margin with an arcuate shape to follow the circular shape of the wafers for providing peripheral support to the wafers, the arcuate shape of the radially inward margin of each of said pair of columns extending around to the open front side to a most inwardly and forward vertical stack of support tips whereby the opening between the respective vertical stack of support tips measured with respect to the axis of the array of stacked wafers is between 85 to 110 degrees.

9. The from opening semiconductor wafer container for large diameter 450 mm wafers of claim 8 , wherein the opening between the respective vertical stack of support tips measured with respect to the axis of the array of stacked wafers is between 88 to 105 degrees.

Assignments (8)