IP Library Granted Patent US 7,168,587
Granted Patent B2
US 7,168,587 · App. 11/109,494 · Granted Jan 30, 2007

Wafer carrier door and spring biased latching mechanism

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Quick Facts
Patent No.
US 7,168,587
App. No.
11/109,494
Granted
Jan 30, 2007
Kind
B2
Abstract

A wafer container with a door, the door has at least one latching mechanism, wherein the latching mechanism has a spring member that holds the latching mechanism at one or more desired positions that preferably correspond to latch-open and latch-closed conditions. In a preferred embodiment, the spring member has an over-center condition that urges the latching mechanism towards the favored positions, thereby resisting unintended actuation of the latching mechanism. Moreover, in preferred embodiments, the latching mechanism has soft stops at the latch open or latch closed condition that minimizes abrupt snapping into position of the latching mechanism. Preferred embodiments utilize a rotatable member configured as a cammed member with an elongate rigid plastic member having at least one node, forming a plastic spring. The spring is pivotally mounted on the rotatable member and pivotally mounted to the door structure.

Claims (11)

1. A wafer container, comprising:

a container portion including a top, a bottom, a pair of opposing sides, a back and an open front:

a pair of wafer supports in the container portion for holding a plurality of horizontally aligned and spaced wafers; and

a door to sealingly close the open front, the door comprising:

a door chassis;

at least one latching mechanism on the door chassis, said at least one latching mechanism having a rotary actuating member presenting a radial protuberance; and

at least a first spring member operably coupled with the door chassis, said spring member having structure for engaging the radial protuberance of the rotary actuating member to hold the rotary actuating member at a first favored position, said spring member adapted to urge said rotary actuating member toward the first favored position over a first rotational range of said rotary actuating member of at least 5 degrees proximate to the first favored position.

2. The wafer container of claim 1 , wherein said spring member is neutrally biased when said rotary actuating member is at the first favored position.

3. The wafer container of claim 1 , wherein the rotary actuating member presents a second radial protuberance, and wherein the spring member further comprises structure for engaging the second radial protuberance to hold the rotary actuating member at a second favored position, the spring member arranged so as to urge said rotary actuating member toward the second favored position over a second rotational range of said rotary actuating member of at least 5 degrees proximate to the second favored position.

4. The wafer container of claim 3 , wherein said spring member is neutrally biased when said rotary actuating member is at the second favored position.

5. The wafer container of claim 1 , wherein said spring member has an arcuate shape.

Assignments (11)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
MERGER Recorded Feb 10, 2009
From: ENTEGRIS, INC. (MINNESOTA CORPORATION)
To: ENTEGRIS, INC. (DELAWARE CORPORATION)
Reel/Frame 022228/0618 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 13, 2005
From: EGGUM, SHAWN D.
To: ENTEGRIS, INC.
Reel/Frame 016129/0784 →