WAFER CARRIER HAVING A DOOR WITH A UNITARY BODY
A front opening wafer carrier includes: a container portion. The container portion includes a top wall, a bottom wall, a pair of side walls, a back wall, and a door frame opposite the back wall, the door frame defining a front opening, and a door removably received in the door frame for closing the front opening. The door has a single body construction and a substantially smooth exterior surface including one or more automation interface receiving features having a minimal volume, which may minimize the amount of oxygen that can be trapped between the wafer carrier door and an equipment front end module when the wafer carrier is in use.
1 . A front opening wafer carrier comprising:
a container portion including a top wall, a bottom wall, a pair of side walls, a back wall, and a door frame opposite the back wall, the door frame defining a front opening; and
a door removably received in the door frame for closing the front opening, the door having a single body construction and including a substantially flat first surface facing in a direction outwardly from the front opening and an opposing second surface, the first surface including one or more recessed automation interface features and the second surface comprising one or more recesses formed therein, wherein the door minimizes oxygen trapped between the wafer carrier and an equipment front end module.
2 . The wafer carrier according to claim 1 , wherein the door further comprises at least one automation interface feature formed in the exterior surface of the door.
3 . The wafer carrier according to claim 2 , wherein the at least one automation interface feature is recessed from the exterior surface of the door.
4 . The wafer carrier according to claim 2 , wherein the at least one automation interface feature is a key hole.
5 . The wafer carrier according to claim 2 , wherein the at least one automation interface feature is a door pin socket.
6 . The wafer carrier according to claim 1 , wherein the door comprises a plurality of ribs formed on an interior surface of the door.
7 . The wafer carrier according to claim 6 , wherein the plurality of ribs extends radially outward from a center portion of the door.
8 . The wafer carrier according to claim 1 , further comprising an elastomeric seal extending around a periphery of the door, the elastomeric seal engaging structure on the door frame when the door is received in the door frame to hermetically seal the enclosure portion.
9 . The wafer carrier according to claim 1 , further comprising a wafer cushion disposed on a rear side of the door.
10 . The wafer carrier according to claim 1 , further comprising a plurality of magnets distributed about a door perimeter and configured to interact with corresponding elements provided about an inner perimeter of the door frame.
11 . The wafer carrier according to claim 1 , wherein the door does not include a mechanical latching mechanism.
12 - 17 . (canceled)
18 . A method of minimizing trapped oxygen between a wafer carrier and an equipment front end module having a door, the method comprising:
docking a wafer carrier on a load port adjacent an opening of the equipment front end module, the wafer earner comprising a container portion and a door, the door having a single body construction and comprising a first surface and a second surface, the first surface being substantially flat and facing in a direction toward the opening of the equipment front end module and including one or more recessed automation interface features and the second surface comprising one more ribs providing structural support to the door; opening the door of the equipment front end interface module; and
disengaging the door from the container portion of the wafer carrier.
19 . The method of claim 18 , wherein the door does not include a mechanical latching mechanism.