IP Library Granted Patent US 11,154,811
Granted Patent B2
US 11,154,811 · App. 16/087,210 · Granted Oct 26, 2021

Gas filter

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Quick Facts
Patent No.
US 11,154,811
App. No.
16/087,210
Granted
Oct 26, 2021
Kind
B2
Abstract

A gas filter includes a housing including a mounting portion and a main portion. The mounting portion is configured to mount the gas filter on a surface of a device. The main portion is configured to be positioned apart from the surface of the device and extends from the mounting portion in a horizontal direction. The housing has an inlet and an outlet and defines a flow channel between the inlet and the outlet. The flow channel has first and second channel portions, the first channel portion extending from the inlet to the second channel portion, the second channel portion extending in a direction substantially parallel to the horizontal direction. A filter member is positioned in the flow channel between the inlet and the outlet.

Claims (25)

1. A gas filter, comprising:

a housing including a mounting portion and a main portion, the mounting portion configured to mount the gas filter on a first surface of a device, the main portion configured to be positioned apart from the surface of the device, the main portion extending from the mounting portion in a horizontal direction and extending along a second surface of the device, the housing having an inlet and an outlet and defining a flow channel between the inlet and the outlet, the flow channel having first and second channel portions, the first channel portion extending from the inlet to the second channel portion, the second channel portion extending in a direction substantially parallel to the horizontal direction; and

a filter member positioned in the flow channel between the inlet and the outlet.

2. The gas filter of claim 1 , wherein first channel portion extends in a direction substantially perpendicular to the direction of the second channel portion.

3. The gas filter of claim 1 , wherein the flow channel includes a chamber defined by the housing, the filter member being positioned in the chamber.

4. The gas filter of claim 3 , wherein the chamber has a larger cross-sectional area than any other portion of the flow channel to gain a large flow volume through the filter member.

5. The gas filter of claim 1 , wherein the mounting portion of the housing is configured to also extend along the second surface of the device.

6. The gas filter of claim 1 , wherein the main portion of the housing has a cylindrical shape.

7. The gas filter of claim 1 , wherein the mounting portion of the housing includes the inlet, and wherein the main portion of the housing includes the outlet.

8. The gas filter of claim 1 , wherein the filter member includes two parallel surfaces, the surfaces positioned substantially perpendicular to the horizontal direction.

9. The gas filter of claim 1 , wherein the filter member includes a membrane.

10. The gas filter of claim 1 , wherein the filter member includes a sintered material having a plurality of layers.

11. The gas filter of claim 1 , wherein the filter member is welded to the main portion of the gas filter.

12. The gas filter of claim 1 , wherein the filter member is a disc.

13. A gas filter, comprising:

a housing including a mounting portion and a main portion, the mounting portion configured to mount the gas filter on a surface of a device, the main portion configured to be positioned apart from the surface of the device, the main portion extending from the mounting portion in a horizontal direction, the housing having an inlet and an outlet and defining a flow channel between the inlet and the outlet, the flow channel having first and second channel portions, the first channel portion extending from the inlet to the second channel portion, the second channel portion extending in a direction substantially parallel to the horizontal direction; and

a filter member positioned in the flow channel between the inlet and the outlet, wherein the filter member and the outlet are concentrically aligned.

14. The gas filter of claim 1 , wherein the outlet is offset from the second channel portion.

15. The gas filter of claim 1 , wherein the housing has an electro-polished surface finish on fluid-facing surfaces.

16. A method of filtering a gas, the method comprising:

directing a stream of gas through the gas filter of claim 1 ; and

capturing impurities within the gas at the filter member.

17. The gas filter of claim 1 , wherein the main portion is configured to be adjacent to the second surface.

18. The gas filter of claim 1 , wherein the main portion is configured to be in contact with the second surface.

19. The gas filter of claim 1 , wherein, when the gas filter is mounted to the first surface of the device, the filter member is substantially parallel to the second surface of the device.

Assignments (4)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 12, 2018
From: NAKAMURA, YUKI
To: ENTEGRIS, INC.
Reel/Frame 047754/0383 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →