IP Library Granted Patent US 7,201,276
Granted Patent B2
US 7,201,276 · App. 10/982,400 · Granted Apr 10, 2007

Front opening substrate container with bottom plate

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Quick Facts
Patent No.
US 7,201,276
App. No.
10/982,400
Granted
Apr 10, 2007
Kind
B2
Abstract

A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.

Claims (41)

1. A substrate container, comprising a container portion with an open front and a door for sealingly closing the open front, a bottom plate connecting to the container portion through a plurality of adjustable spacers;

the container portion comprising:

a pair of opposite side walls, a bottom wall, a top wall, and a back wall connecting and defining an open interior;

a plurality of substrate supports at the pair of side walls and extending into the open interior for supporting the substrates horizontal spaced array,

the bottom wall having a plurality of bottom surface apertures;

the bottom plate having a plurality of plate apertures, each of said plate apertures aligning with one of said plurality of bottom surface apertures, and

a plurality of radially disposed kinematic coupling grooves;

the plurality of adjustable spacers for adjusting the positioning of said container portion and said plate, each of said adjustable spacers comprising:

a first member affixed to one of said bottom surface apertures, and

a second member affixed to one of said plate apertures and threadably connected to said first member,

wherein at least one of the first member and the second member is rotatable so that rotation of one of the first and second members with respect to the other of the first and second members exclusively provides an adjustable spacing between the bottom plate and the container portion.

2. The container of claim 1 , in which each said first member is a first bushing.

3. The container of claim 2 , in which each said first member further comprises a detent to attach said first member to the container portion.

4. The container of claim 3 , further comprising an O-ring disposed between said detent and said container portion.

5. The container of claim 2 , in which each said second member is a second bushing.

6. The container of claim 5 , in which each said second bushing is generally annular.

7. The container of claim 5 , further comprising an O-ring disposed between the second bushing and the bottom plate.

8. A substrate container, comprising a container portion with an open front, a door for sealingly closing the open front, a bottom plate connecting to the container portion through a plurality of connectors;

the container portion comprising:

a pair of opposite side walls, a bottom wall, a top wall, and a back wall connecting and defining an open interior;

a plurality of substrate supports at the pair of side walls and extending into the open interior for supporting the substrates in a horizontal spaced array,

the bottom wall having a plurality of bottom surface apertures opening into the open interior;

the bottom plate having a plurality of plate apertures, each of said plate apertures aligning with one of said plurality of bottom surface apertures;

a plurality of radially disposed kinematic coupling grooves; and

the plurality of connectors each inserted into one of the plate apertures and an aligned one of said plurality of bottom surface apertures of said container portion and said plate, each of said connectors having a bore extending therethrough from the open interior to the exterior of the container.

9. The container of claim 8 , in which each connector comprises a first member disposed in one of said bottom surface apertures, a second member disposed in one of said plate apertures and threadably connected to said first member.

10. The container of claim 9 , wherein the position of the plate with respect to the container portion is adjustable by way of rotation of one of the first and the second member.

11. The container of claim 9 , wherein each connector has a plurality of prongs.

12. The container of clan 8 , further comprising at least one of a filter cartridge and a blank disposed in one of said bores in one of said connectors.

13. The container of claim 8 , wherein each of said connectors has a diameter greater than about 12 millimeters and less than 77 millimeters.

14. The container of claim 8 , further comprising a dampener disposed between the bottom plate and the container portion.

15. A substrate container, comprising a container portion with a top, a bottom, and an open front, a door sealingly closing the open front, a bottom plate connecting to the container portion through a plurality of connectors, the containers further comprising a kinematic coupling on said bottom, the container portion comprising;

a pair of opposite side walls, a bottom wall, a top wall, and a back wall connecting and defining an open interior;

a plurality of substrate supports at the pair of side walls and extending into the open interior for supporting the substrates in a horizontal spaced array;

the bottom wall having a plurality of bottom surface apertures opening into the open interior;

the bottom plate having a plurality of plate apertures, each of said plate apertures aligning with one of said plurality of bottom surface apertures; and

the plurality of connectors each inserted into one of the plate apertures and an aligned one of said plurality of bottom surface apertures of said container portion and said plate, each of said connectors having a bore extending therethrough from the open interior to the exterior of the container.

16. The container of claim 15 , in which each connector comprises a first member disposed in one of said bottom surface apertures, a second member disposed in one of said plate apertures and threadably connected to said first member.

17. The container of claim 15 , wherein each connector has a plurality of prongs.

18. The container of claim 15 , further comprising at least one of a cartridge and a blank disposed in one of said bores in one of said connectors.

19. The container of claim 15 , wherein each of said connectors has a diameter greater than about 12 millimeters and less than 77 millimeters.

Assignments (11)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
MERGER Recorded Feb 10, 2009
From: ENTEGRIS, INC. (MINNESOTA CORPORATION)
To: ENTEGRIS, INC. (DELAWARE CORPORATION)
Reel/Frame 022228/0618 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 9, 2005
From: BURNS, JOHN; FULLER, MATTHEW A.; KING, JEFFREY J.; FORBES, MARTIN L.; SMITH, MARK V.
To: ENTEGRIS, INC.
Reel/Frame 015666/0129 →