Granted Patent
Utility
US 6,800,218
· Confirmation No. 9597
ABRASIVE FREE FORMULATIONS FOR CHEMICAL MECHANICAL POLISHING OF COPPER AND ASSOCIATED MATERIALS AND METHOD OF USING SAME
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2006-07-05 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 2 | View | |
| 2006-06-20 | PA.. |
Power of Attorney | 1 | View | |
| 2006-06-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2006-06-20 | TRNA |
Transmittal of New Application | 2 | View | |
| 2006-06-20 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 1 | View | |
| 2004-08-26 | IFEE |
Issue Fee Payment (PTO-85B) | 4 | View | |
| 2004-07-26 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2004-07-26 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2004-05-26 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-05-26 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-05-26 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-05-26 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-05-26 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-05-12 | A.NE |
Response After Final Action | 2 | View | |
| 2004-05-12 | CLM |
Claims | 6 | View | |
| 2004-05-12 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2004-05-12 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-05-12 | WCLM |
Claims Worksheet (PTO-2022) | 2 | View | |
| 2004-05-12 | WFEE |
Fee Worksheet (SB06) | 3 | View | |
| 2004-03-24 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 6 | View | |
| 2004-02-18 | CTFR |
Final Rejection | 6 | View | |
| 2004-02-18 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-02-18 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-02-18 | FWCLM |
Index of Claims | 1 | View | |
| 2003-11-17 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 6 | View | |
| 2003-09-30 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2003-09-30 | CLM |
Claims | 6 | View | |
| 2003-09-30 | REM |
Applicant Arguments/Remarks Made in an Amendment | 9 | View | |
| 2003-05-27 | C.AD |
Change of Address | 1 | View | |
| 2003-04-11 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2003-04-11 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2003-04-11 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2003-04-11 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2003-04-11 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2003-03-31 | CTNF |
Non-Final Rejection | 15 | View | |
| 2003-03-31 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-03-31 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2003-03-20 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2003-02-19 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-02-19 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2003-02-06 | CTRS |
Requirement for Restriction/Election | 7 | View | |
| 2002-10-10 | C.AD |
Change of Address | 1 | View | |
| 2002-06-14 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2002-01-28 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2002-01-28 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-01-16 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2002-01-16 | FOR |
Foreign Reference | 14 | View | |
| 2001-10-04 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 1 | View | |
| 2001-08-23 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-08-23 | SPEC |
Specification | 16 | View | |
| 2001-08-23 | CLM |
Claims | 9 | View | |
| 2001-08-23 | ABST |
Abstract | 1 | View | |
| 2001-08-23 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2001-08-23 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2001-08-23 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2001-08-23 | FWCLM |
Index of Claims | 1 | View | |
| 2001-08-23 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-08-23 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2001-08-23 | SPEC |
Specification | 16 | View | |
| 2001-08-23 | CLM |
Claims | 9 | View | |
| 2001-08-23 | ABST |
Abstract | 1 | View | |
| 2001-08-23 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-08-23 | WFEE |
Fee Worksheet (SB06) | 3 | View | |
| 2001-08-23 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Ying Ma
Weatherford, TX
Michael Jones
Phoenix, AZ
Thomas H. Baum
New Fairfield, CT
Deepak Verma
Scottsdale, AZ
David Bernhard
Newton, CT
Attorneys & Agents of Record
Classification
USPC
216/13
C23F3/06
H10P52/403
C09G1/04
Prosecution
- Examiner
- GOUDREAU, GEORGE A
- Art Unit
- 1763
- Docket No.
- 020732-156.520
- Confirmation No.
- 9597
Publication
- Pub. No.
- US20030047539A1
- Pub. Date
- 2003-03-13
Patent Term Adjustment
-278days
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679
Recorded 2019-11-05
SECURITY INTEREST
Recorded 2018-11-13
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-12-19
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-05-22
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Quick Facts
- Patent No.
- US 6,800,218
- App. No.
- 09/935,805
- Filed
- 2001-08-23
- Granted
- 2004-10-05
- Pub. No.
- US20030047539A1
- Examiner
- GOUDREAU, GEORGE A
- Art Unit
- 1763
- PTA
- -278 days
External Links