IP Library Granted Patent US 7,182,203
Granted Patent B2
US 7,182,203 · App. 10/982,402 · Granted Feb 27, 2007

Wafer container and door with vibration dampening latching mechanism

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Quick Facts
Patent No.
US 7,182,203
App. No.
10/982,402
Granted
Feb 27, 2007
Kind
B2
Abstract

A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.

Claims (27)

1. A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement, the container comprising:

an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front;

at least one wafer support in the enclosure;

a kinematic coupling on the bottom of the enclosure; and

a door for sealingly closing the open front comprising:

a chassis; and

an operable latching mechanism on the chassis including a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position, the latching mechanism including a biasing spring having a first resilient portion operably coupled with the cam and the chassis and disposed to provide a biasing force for urging the latching mechanism toward each of the first and second favored positions, the latching mechanism further including at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions, wherein the cam has an elongate slot defined therein with first and second opposing ends and the latching mechanism further comprises at least one laterally slidable latching arm having a cam follower portion slidably engaged in the slot, and wherein the at least one vibration dampener includes a spring disposed proximate the first end of the slot so as to engage the cam follower portion and exert a biasing force resisting motion of the cam follower portion towards the first end of the slot.

2. The container of claim 1 , wherein the vibration dampener further comprises a second spring disposed proximate the second end of the slot so as to engage the cam follower portion and exert a biasing force resisting motion of the cam follower portion towards the second end of the slot.

3. A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement, the container comprising:

an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front;

at least one wafer support in the enclosure;

a kinematic coupling on the bottom of the enclosure; and

a door for sealingly closing the open front comprising:

a chassis; and

an operable latching mechanism on the chassis including a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position, the latching mechanism including a biasing spring having a first resilient portion operably coupled with the cam and the chassis and disposed to provide a biasing force for urging the latching mechanism toward each of the first and second favored positions, the latching mechanism further including at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions, wherein the at least one vibration dampener includes a second resilient portion of the biasing spring operably coupled with the chassis at a location separated from the location where the first resilient portion is coupled to the chassis.

4. The container of claim 3 , wherein the door includes a wafer cushion portion, wherein the cam and the biasing spring are electrically conductive, and wherein the second resilient portion of the biasing spring is electrically conductively coupled with the wafer cushion portion.

5. A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement, the container comprising:

an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front;

at least one wafer support in the enclosure;

a kinematic coupling on the bottom of the enclosure; and

a door for sealingly closing the open front comprising:

a chassis; and

an operable latching mechanism on the chassis including a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position, the latching mechanism including a biasing spring having a first resilient portion operably coupled with the cam and the chassis and disposed to provide a biasing force for urging the latching mechanism toward each of the first and second favored positions, the latching mechanism further comprising means to dampening vibrations as the latching mechanism is shifted toward at least one of generated when the latching mechanism is shifted between the first and second favored positions.

6. The container of claim 5 , wherein the cam has an elongate slot defined therein with first and second opposing ends and the latching mechanism further comprises at least one laterally slidable latching arm having a cam follower portion slidably engaged in the slot and wherein the means for dampening vibrations includes a spring disposed proximate the first end of the slot so as to engage the cam follower portion and exert a biasing force resisting motion of the cam follower portion towards the first end of the slot.

7. The container of claim 6 , wherein the means for dampening vibrations further comprises a second spring disposed proximate the second end of the slot so as to engage the cam follower portion and exert a biasing force resisting motion of the cam follower portion towards the second end of the slot.

8. The container of claim 7 , wherein the latching mechanism further comprises a biasing spring having a first resilient portion operably coupled with the cam and the chassis and disposed to provide a biasing force for urging the latching mechanism toward each of the first and second favored positions, and wherein the at least one vibration dampener includes a second resilient portion of the biasing spring operably coupled wit the chassis.

9. The container of claim 8 , wherein the door includes a wafer cushion portion, wherein the cam and the biasing spring are electrically conductive, and wherein the second resilient portion of the biasing spring is electrically conductively coupled with the wafer cushion portion.

Assignments (5)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →