IP Library Granted Patent US 7,107,128
Granted Patent B2
US 7,107,128 · App. 10/779,009 · Granted Sep 12, 2006

System for controlling fluid flow

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Quick Facts
Patent No.
US 7,107,128
App. No.
10/779,009
Granted
Sep 12, 2006
Kind
B2
Abstract

Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.

Claims (16)

1. A system for regulating fluid flow comprising:

a controller further comprising:

a processor;

a computer readable memory;

a set of computer instructions stored on the computer readable memory, the computer instructions comprising instructions executable by the processor to:

generate a flow control signal to close a fluid control valve based on a first close rate parameter for a first segment of a close range; and

generate a flow control signal to close the fluid control valve based on a second close rate parameter for a second segment of the close range,

wherein the first close rate parameter is a first acceleration factor corresponding to a first rate of change in a close rate acceleration and the second close rate parameter corresponds to a second rate of change in the close rate acceleration.

2. The system of claim 1 , wherein the computer instructions further comprise instructions executable to determine if a valve position is less than a break point.

3. The system of claim 1 , wherein the computer instructions further comprise instructions executable to generate a suckback control signal to cause a suckback valve to push fluid into a nozzle.

4. The system of claim 1 , further comprising:

a fluid control device coupled to the controller comprising the fluid control valve;

a suckback valve coupled to the controller in fluid communication with the fluid control device; and

wherein the fluid control device is responsive to the flow control signal to close the fluid control valve.

5. The system of claim 4 , wherein the fluid control device comprises the fluid control valve and a proportional pneumatic control valve.

6. The system of claim 5 , wherein the proportional pneumatic control valve is responsive to the flow control signal, and wherein the proportional pneumatic control valve closes the fluid control valve by applying pneumatic pressure to the fluid control valve.

Assignments (12)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
CHANGE OF ADDRESS Recorded Sep 20, 2010
From: ENTEGRIS, INC.
To: ENTEGRIS, INC.
Reel/Frame 025017/0095 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
MERGER Recorded Jul 28, 2006
From: MYKROLIS CORPORATION
To: ENTEGRIS, INC.
Reel/Frame 018026/0873 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 15, 2004
From: LAVERDIERE, MARC; MCLOUGHLIN, ROBERT F.
To: MYKROLIS CORPORATION
Reel/Frame 015565/0252 →