Precursors for silicon dioxide gap fill
View Patent ↗A full fill trench structure is described, including a microelectronic device substrate having a high aspect ratio trench therein and filled with silicon dioxide of a substantially void-free character and substantially uniform density throughout its bulk mass. A method of manufacturing a semiconductor product also is described, involving use of specific silicon precursor compositions for forming substantially void-free and substantially uniform density silicon dioxide material in the trench. The precursor fill composition may include silicon and germanium, to produce a microelectronic device structure including a GeO 2 /SiO 2 trench fill material. A suppressor component may be employed in the precursor fill composition, to eliminate or minimize seam formation in the cured trench fill material.
1. A precursor composition, comprising:
a germanium precursor;
a silicon precursor;
alcohol; and
an oxidant.
2. The composition of claim 1 , wherein the composition is in a vapor phase.
3. The composition of claim 1 , wherein the germanium precursor comprises TMOG.
4. The composition of claim 1 , wherein the silicon precursor comprises tetraethylorthosilicate.
5. The composition of claim 1 , wherein the alcohol is selected from the group consisting of isopropyl alcohol, ethanol, and mixtures thereof.
6. The composition of claim 1 , wherein the oxidant comprises ozone.
7. A method of processing a substrate including a trench or gap structure therein, comprising contacting the substrate with a composition according to claim 1 , under conditions effecting deposition of a germanium- and silicon-containing oxide in the trench or gap structure.
8. The composition of claim 1 , wherein the germanium precursor comprises TMOG, the silicon precursor comprises tetraethylorthosilicate, the alcohol is selected from the group consisting of isopropanol, methanol, ethanol, and mixtures of two or more thereof, and the oxidant comprises ozone.
9. A method of forming an oxide material in a trench structure of a substrate for filling thereof, said method comprising depositing on the substrate, for filling of the trench structure, a precursor composition including (i) oxide precursor material comprising germanium and silicon, and (ii) suppressor, to suppress seam formation, wherein said depositing is conducted at temperature below 400° C.
10. The method of claim 9 , wherein deposited oxide precursor material is cured under an ozone atmosphere.
11. The method of claim 9 , wherein the oxide precursor material comprises a germanium alkoxide.
12. The method of claim 9 , wherein said oxide precursor material is cured to form a GeSi oxide composition in said trench structure.
13. The method of claim 9 , wherein said depositing is conducted at temperature below 350° C.
14. The method of claim 9 , wherein the suppressor comprises hydroxyl functionality.
15. The method of claim 9 , wherein the suppressor comprises at least one hydroxyl functional suppressor, selected from the group consisting of alcohols, polyols and glycols.
16. The method of claim 9 , wherein the suppressor comprises alcohol.
17. The method of claim 9 , wherein the suppressor comprises a hydrocarbon with one or more carbonyl groups.
18. The method of claim 9 , wherein the suppressor is oxidized by ozone.
19. A method of forming an oxide material in a trench structure of a substrate for filling thereof, said method comprising depositing tetraethylorthosilicate (TEOS) in a TEOS/ozone process to form silicon oxide material in the trench, with addition to the TEOS of an aldehyde effective to suppress deposition outside of the trench structure relative to the bottom of the trench.
20. A method of forming an oxide material in a trench structure of a substrate for filling thereof, said method comprising depositing tetraethylorthosilicate (TEOS) in a TEOS/ozone process to form silicon oxide material in the trench, wherein said TEOS is deposited in a composition comprising ethylene glycol and isopropyl alcohol, wherein the ethylene glycol and isopropyl alcohol are effective to suppress deposition outside of the trench structure relative to the bottom of the trench structure.