IP Library Granted Patent US 8,002,880
Granted Patent B2
US 8,002,880 · App. 12/392,077 · Granted Aug 23, 2011

Gas storage and dispensing system with monolithic carbon adsorbent

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Quick Facts
Patent No.
US 8,002,880
App. No.
12/392,077
Granted
Aug 23, 2011
Kind
B2
Abstract

A pyrolyzed monolith carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25° C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of the adsorbent including slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity including micropores of diameter<2 nanometers; and (c) having a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter, preferably from 0.9 to 2.0 grams per cubic centimeter.

Claims (26)

1. A pyrolyzed monolith carbon physical adsorbent that is characterized by at least one of the following characteristics:

(a) a fill density measured for arsine gas at 25° C. and pressure of 650 ton that is greater than 400 grams arsine per liter of adsorbent;

(b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprising micropores of diameter<2 nanometers; and

(c) a bulk density of from 0.9 to 2.0 grams per cubic centimeter.

2. The adsorbent of claim 1 , wherein the adsorbent is characterized by characteristic (a).

3. The adsorbent of claim 1 , wherein the adsorbent is characterized by characteristic (b).

4. The adsorbent of claim 1 , wherein the adsorbent is characterized by characteristic (c).

5. The adsorbent of claim 1 , wherein the adsorbent is characterized by characteristics (a) and (b).

6. The adsorbent of claim 1 , wherein the adsorbent is characterized by characteristics (b) and (c).

7. The adsorbent of claim 1 , wherein the adsorbent is characterized by characteristics (a) and (c)

8. The adsorbent of claim 1 , wherein the adsorbent is characterized by characteristics (a), (b) and (c).

9. The adsorbent of claim 1 , comprising one or more pyrolyzed monolith adsorbent articles, wherein each such article has a disc shape.

10. The adsorbent of claim 9 , wherein the adsorbent comprises a multiplicity of said articles in a vertical stack, wherein each article has a height to diameter ratio, H/D, that is from about 0.10 to about 0.80.

11. The adsorbent of claim 1 , wherein the adsorbent has a bulk density of from 1 to 1.3 grams per cubic centimeter.

12. The adsorbent of claim 1 , wherein the adsorbent has three-dimensional x, y and z dimensions greater than 1.5 centimeters.

13. The adsorbent of claim 1 , wherein the adsorbent has at least 30% of its porosity in pores with a diameter of less than 2 nanometers.

14. The adsorbent of claim 1 , wherein the adsorbent has a doping agent thereon, wherein the doping agent comprises at least one agent selected from the group consisting of boric acid, sodium tetraborate, sodium silicate, and disodium hydrogen phosphate.

15. The adsorbent of claim 1 , wherein the fill density measured for arsine gas at 25° C. and pressure of 650 torr is greater than 450 grams arsine per liter of adsorbent, and wherein at least 50% of overall porosity of said adsorbent comprises pores having a size in a range of from about 0.3 to about 0.72 nanometer.

16. A pyrolyzed monolith carbon physical adsorbent that is characterized by at least one of the characteristics (a) and (b): (a) a fill density measured for arsine gas at 25° C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; and (b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprising micropores of diameter<2 nanometers.

17. The adsorbent of claim 16 , wherein the adsorbent is characterized by characteristic (a).

18. The adsorbent of claim 16 , wherein the adsorbent is characterized by characteristic (b).

19. The adsorbent of claim 16 , wherein the adsorbent is characterized by characteristics (a) and (b).

20. A pyrolyzed monolith carbon physical adsorbent that is characterized by the following characteristics:

(a) a fill density measured for arsine gas at 25° C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent;

(b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprising micropores of diameter<2 nanometers; and

(c) a bulk density of from about 0.8 to about 2.0 grams per cubic centimeter.

Assignments (9)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 4, 2015
From: ADVANCED TECHNOLOGY MATERIALS, INC.
To: ENTEGRIS, INC.
Reel/Frame 034894/0025 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 16, 2009
From: CARRUTHERS, J. DONALD
To: ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 022403/0727 →