IP Library Granted Patent US 7,381,243
Granted Patent B2
US 7,381,243 · App. 10/531,512 · Granted Jun 3, 2008

Method for purifying carbon dioxide

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Quick Facts
Patent No.
US 7,381,243
App. No.
10/531,512
Granted
Jun 3, 2008
Kind
B2
Abstract

The invention is a method for the decontamination of CO 2 to a sufficient level of purity to allow it to be used in the semiconductor industry. The invention comprises the exposure of fluid CO 2 to a combination metallic states of at least one metal under the appropriate conditions for removal of contaminants. The adsorbents are then decontaminated/activated to return the adsorbent to a mixed oxidation state and allow further rounds of decontamination. The adsorbents are selected to be complimentary to each other, preferentially adsorbing different contaminants. Additionally, the adsorbents are selected to undergo reduction differently such that upon regeneration only a portion of the metals are reduced and the adsorbent is returned essentially to its original state.

Claims (36)

1. A method of removing contaminants from a stream of carbon dioxide (CO 2 ), comprising:

contacting a stream of CO 2 with a quantity of at least one mixed metal oxide for a period of time to reduce the contaminant content of the stream, wherein the mixed metal oxide includes: iron (Fe) and manganese oxide (MnO x ); nickel oxide (NiO) and titanium oxide (TiO x ); palladium oxide (PdO x ) and cerium oxide (CeO x ); or vanadium oxides (VO x ).

2. The method of claim 1 , wherein the contaminant content is reduced to not more than 100 parts per billion (ppb).

3. The method of claim 1 , wherein the contaminant content is reduced to not more than 10 ppb.

4. The method of claim 1 , wherein the contaminant content is reduced to not more than 1 ppb.

5. The method of claim 1 , wherein the mixed metal oxide includes: iron (Fe) and a manganese oxide selected from the group consisting of MnO and MnO 2 ; or vandium oxides selected from the group consisting of VO, VO 2 , V 2 O 3 and V 2 O 5 .

6. A method for activation and regeneration of mixed metal oxide adsorbents for the purification of carbon dioxide (CO 2 ) comprising:

heating a mixed metal oxide adsorbent that has been used for the purification of carbon dioxide to a first temperature to release contaminants adsorbed thereto, wherein the adsorbent includes at least one mixed metal oxide, the mixed metal oxide including: iron (Fe) and manganese oxide (MnO x ); nickel oxide (NiO) and titanium oxide (TiO x ); palladium oxide (PdO x ) and cerium oxide (CeO x ); vanadium oxides (VO x ); nickel (Ni) and nickel oxide (NiO); or iron oxides (Fe x O y );

exposing the adsorbent to an oxidizing agent to oxidize the adsorbent;

cooling the oxidized adsorbent to a second temperature; and

exposing the cooled adsorbent to a reducing agent to produce a mixed metal oxide usable for the purification of carbon dioxide (CO 2 ).

7. The method of claim 6 , wherein the first temperature is between about 300° C. to about 500° C.

8. The method of claim 7 , wherein the first temperature is about 400° C.

9. The method of claim 6 , wherein the oxidizing agent comprises oxygen (O 2 ).

10. The method of claim 6 , wherein the second temperature is between about 100° C. to about 250° C.

11. The method of claim 6 , wherein the reducing agent comprises a mixture of hydrogen (H 2 ) and an inert gas.

12. The method of claim 11 , wherein the hydrogen gas comprises between about 1% to about 5% of the mixture by volume.

13. The method of claim 11 , wherein the inert gas is selected from the group consisting of nitrogen (N 2 ) and argon and combinations thereof.

14. A method for Continuous purification of carbon dioxide (CO 2 ), comprising:

a) purifying CO 2 by contacting a stream of CO 2 with a quantity of at least one mixed metal oxide for a period of time to reduce a contaminant content of the stream in a first bed of a dual bed purifier apparatus;

b) regenerating an adsorbent in a second bed of the dual bed purifier apparatus by heating the adsorbent to a first temperature to release contaminants adsorbed thereto; exposing the adsorbent to an oxidizing agent to oxidize the adsorbent; cooling the oxidized adsorbent to a second temperature; and exposing the cooled adsorbent to a reducing agent to produce a mixed metal oxide during the coincident purification of the CO 2 in the previous step; followed by

c) purifying CO 2 as in step a in the second bed after completion of regeneration of the adsorbent as in step b, coincident with the regeneration of the adsorbent of the first bed; and

d) repeating steps a)-c) for continuous purification.

15. A method of removing contaminants from a stream of carbon dioxide (CO 2 ), comprising contacting a stream of CO 2 with a quantity of at least one mixed metal oxide for a period of time to reduce the contaminant content of the stream, wherein the mixed metal oxide includes nickel (Ni) and nickel oxide (NiO).

16. The method of claim 6 , wherein the mixed metal oxide includes: iron (Fe) and manganese oxide selected from the group consisting of MnO and MnO 2 ; vandium oxides selected from the group consisting of VO, VO 2 , V 2 O 3 and V 2 O 5 ; nickel (Ni) and nickel oxide (NiO); or FeO and Fe 2 O 3 .

17. The method of claim 16 , wherein the mixed metal oxide includes nickel (Ni) and nickel oxide (NiO).

18. The method of claim 14 , wherein the mixed metal oxide includes: iron (Fe) and manganese oxide (MnO x ); nickel oxide (NiO) and titanium oxide (TiO x ); palladium oxide (PdO x ) and cerium oxide (CeO x ); vanadium oxides (VO x ); nickel (Ni) and nickel oxide (NiO); or iron oxides (Fe x O y ).

19. The method of claim 18 , wherein the mixed metal oxide includes: iron (Fe) and manganese oxide selected from the group consisting of MnO and MnO 2 ; vandium oxides selected from the group consisting of VO, VO 2 , V 2 O 3 and V 2 O 5 ; nickel (Ni) and nickel oxide (NiO); or FeO and Fe 2 O 3 .

20. The method of claim 19 , wherein the mixed metal oxide includes nickel (Ni) and nickel oxide (NiO).

21. A method for activation and regeneration of a mixed metal oxide adsorbent for the purification of carbon dioxide (CO 2 ), comprising:

heating a mixed metal oxide adsorbent that has been used for the purification of carbon dioxide to a first temperature to release contaminants adsorbed thereto;

exposing the adsorbent to an oxidizing agent to oxidize the adsorbent;

cooling the oxidized adsorbent to a second temperature; and

exposing the cooled adsorbent to a reducing agent to produce a mixed metal oxide usable for the purification of carbon dioxide (CO 2 ), wherein the reducing agent comprises a mixture of hydrogen (H 2 ) and an inert gas, and wherein the hydrogen gas comprises between about 1% to about 5% of the mixture by volume.

22. The method of claim 6 , wherein the adsorbent includes at least one mixed metal oxide, the mixed metal oxide including: iron (Fe) and manganese oxide (MnO x ); nickel oxide (NiO) and titanium oxide (TiO x ); palladium oxide (PdO x ) and cerium oxide (CeO x ); or vanadium oxides (VO x ).

23. The method of claim 14 , wherein the adsorbent includes at least one mixed metal oxide, the mixed metal oxide including: iron (Fe) and manganese oxide (MnO x ); nickel oxide (NiO) and titanium oxide (TiO x ); palladium oxide (PdO x ) and cerium oxide (CeO x ); or vanadium oxides (VO x ).

Assignments (11)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
MERGER Recorded Jul 28, 2006
From: MYKROLIS CORPORATION
To: ENTEGRIS, INC.
Reel/Frame 018026/0873 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 21, 2005
From: ALVAREZ, JR., DANIEL; SPIEGELMAN, JEFFREY J.; HOLMES, RUSSELL J.
To: MYKROLIS CORPORATION
Reel/Frame 016376/0297 →